Mold, method for producing mold, and method for producing nanoimprint film

Patent metadata

Field	Value
Publication number	US-10155340-B2
Application number	US-201214004190-A
Country	US
Kind code	B2
Filing date	Mar 1, 2012
Priority date	Mar 11, 2011
Publication date	Dec 18, 2018
Grant date	Dec 18, 2018

Abstract

A mold is disclosed, which is capable of producing a nanoimprint film without a problem of clogging of irregularities of the mold with a resin material. A method for producing the mold and a method for producing a nanoimprint film using the mold are further disclosed. In an embodiment, the mold includes: a first surface having a nanostructure including plural recesses spaced at an interval of less than 1 μm between bottom points of adjacent recesses; and at least two second surfaces substantially not having the nanostructure, wherein the first surface is coplanar with the at least two second surfaces and is positioned between two second surfaces.

First claim

The invention claimed is:

1. A method for producing a nanoimprint film including plural protrusions spaced at an interval of less than 1 μm between top points of adjacent protrusions, the method comprising the steps of:
forming a hard coat layer on a base film;
applying an imprint resin composition on the hard coat layer; and
imprinting a pattern by pressing a mold to the applied imprint resin composition and curing the imprint resin composition,
wherein the mold comprises a first surface having a nanostructure including plural recesses spaced at an interval of less than 1 μm between bottom points of adjacent recesses; and at least two second surfaces substantially not having the nanostructure,
wherein the first surface is coplanar with the at least two second surfaces and is positioned between two second surfaces,
wherein the at least two second surfaces are formed by masking portions of the mold apart from each end portion without masking end portions of the mold,
wherein the hard coat layer has a narrower width than the base film,
wherein the imprint resin composition is applied on a main region of the hard coat layer and is not applied on an edge region of the hard coat layer in the step of applying, the edge region of the hard coat layer being exposed, and
wherein the first surface of the mold is pressed on the main region and the at least two second surfaces of the mold are pressed on the edge region in the step of imprinting.

2. The method for producing a nanoimprint film according to claim 1 ,
wherein the hard coat layer is softer than the imprint resin composition when the mold is pressed to the imprint resin composition in the step of imprinting, and the cured hard coat layer is harder than the cured imprint resin composition.

3. The method for producing a nanoimprint film according to claim 1 ,
wherein the adjacent protrusions are spaced at an interval of less than 380 nm between top points of the protrusions.

4. The method for producing a nanoimprint film according to claim 1 ,
wherein the mold has a cylindrical shape, and
the recesses each have an aspect ratio of less than 3.

5. The method for producing a nanoimprint film according to claim 1 ,
wherein the mold includes a base member covered with a member constituting the first surface and members constituting the at least two second surfaces.

6. The method for producing a nanoimprint film according to claim 5 ,
wherein an insulating film is provided between the base member and the member constituting the first surface and between the base member and the members constituting the at least two second surfaces.

7. The method for producing a nanoimprint film according to claim 5 ,
wherein a material of the member constituting the first surface is aluminum oxide, and
materials of the members constituting the at least two second surfaces are aluminum.

8. The method for producing a nanoimprint film according to claim 5 ,
wherein a material of the base member is nickel or stainless steel.

9. The method for producing a nanoimprint film according to claim 1 ,
wherein the first surface has a microstructure including plural recesses spaced at an interval of 20 μm or more between bottom points of adjacent recesses.

10. The method for producing a nanoimprint film according to claim 1 ,
wherein the mold includes a conductive rod passing through the inside of the mold,
the conductive rod includes a side face covered with an insulating film,
the conductive rod includes at least one end portion exposed to the outside, and
the conductive rod is electrically connected to a member constituting the first surface in the mold.

11. The method for producing a nanoimprint film according to claim 1 ,
wherein the mold includes an electrode electrically connected to a member constituting the first surface, on an outer peripheral surface.

12. The method for producing a nanoimprint film according to claim 1 ,
wherein the masking refers to application of a tape.

13. The method for producing a nanoimprint film according to claim 1 ,
wherein the mold is produced by the step of repeatedly performing anodizing the surface of an untreated mold and etching the anodized surface.

14. The method for producing a nanoimprint film according to claim 1 ,
wherein a rate of imprinting using the mold is 1 m/min or more and 100 m/min or less.

15. The method for producing a nanoimprint film according to claim 1 ,
wherein the hard coat layer is formed by applying a hard coat resin on a base film and curing the hard coat resin in the step of forming.

16. The method for producing a nanoimprint film according to claim 15 ,
wherein the hard coat resin is dissolved in a solvent to give a solution and the solution is applied on the base film in the step of forming.

Assignees

• Nakamatsu Kenichiro
• Hayashi Hidekazu
• Minoura Kiyoshi
• Isurugi Akinobu
• Sharp Kk

Inventors

• Nakamatsu Kenichiro
• Hayashi Hidekazu
• Minoura Kiyoshi
• Isurugi Akinobu

Classifications

• B29C33/424 Primary

  Moulding surfaces provided with means for marking or patterning (for injection moulding B29C45/372) · CPC title

• B29C59/04

  using rollers or endless belts · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• B29C59/026 Primary

  of layered or coated substantially flat surfaces · CPC title

• B29C33/3842

  Manufacturing moulds, e.g. shaping the mould surface by machining · CPC title