Plasma etching apparatus

Patent metadata

Field	Value
Publication number	US-10153135-B2
Application number	US-201615190722-A
Country	US
Kind code	B2
Filing date	Jun 23, 2016
Priority date	Jun 26, 2015
Publication date	Dec 11, 2018
Grant date	Dec 11, 2018

Abstract

An ICP plasma etching apparatus for etching a substrate includes at least one chamber, a substrate support positioned within the chamber, a plasma production device for producing a plasma for use in etching the substrate, and a protective structure which surrounds the substrate support so that, in use, a peripheral portion of the substrate is protected from unwanted deposition of material. The protective structure is arranged to be electrically biased and is formed from a metallic material so that metallic material can be sputtered from the protective structure onto an interior surface of the chamber to adhere particulate material to the interior surface.

First claim

What is claimed is:

1. An ICP plasma etching apparatus for etching a substrate comprising:
at least one chamber;
a substrate support within the chamber, the substrate support comprising a platen positioned above a bottom of the chamber, the platen having a support surface dedicated to receive and support a substrate when the substrate is etched in the chamber;
a plasma production device for producing a plasma for use in etching the substrate; and
a protective structure comprising a body of metallic material which surrounds the substrate support; and
a dark space shield which extends around the substrate support and terminates at a level below the level of the platen,
in which the protective structure is arranged to be electrically biased, the body of metallic material of the protective structure has a lower part situated below the level of the support surface of the substrate support and an upper part situated above the level of the support surface of the substrate support so that, in use, a peripheral portion of the substrate received on the support surface of the substrate support is protected from unwanted deposition of material by the protective structure, and the metallic material can be sputtered from the protective structure onto an interior surface of the chamber to adhere particulate material to the interior surface,
the dark space shield has a protective structure receiving portion that extends around and is spaced from the substrate support, and
a portion of the protective structure is received in the protective structure receiving portion of the dark space shield as spaced therefrom so as to define a gap therebetween, whereby the extent of plasma propagating around the protective structure into a region, including the gap, between the level of the platen and the bottom of the chamber is minimized by the presence of the dark space shield.

2. A plasma etching apparatus according to claim 1 in which the metallic material is aluminum, an aluminum alloy, or copper.

3. A plasma etching apparatus according to claim 1 in which the metallic material is also a getter material.

4. A plasma etching apparatus according to claim 3 in which the metallic material is titanium.

5. A plasma etching apparatus according to claim 1 in which the protective structure is a ring structure.

6. A plasma etching apparatus according to claim 1 in which the protective structure has a substrate receiving surface coplanar with the support surface of the substrate support.

7. A plasma etching apparatus according to claim 6 in which the protective structure has a recess, and the substrate receiving surface delimits part of the recess.

8. A plasma etching apparatus according to claim 1 in which the protective structure has a region adjacent to the support surface of the substrate which, in use, is proximal to the substrate received on the support surface, and said region is formed from a dielectric material.

9. A plasma etching apparatus according to claim 8 in which the dielectric material is present as a coating on the body of metallic material of the protective structure.

10. A plasma etching apparatus according to claim 8 in which the protective structure has a substrate receiving surface coplanar with the support surface of the substrate support, and the substrate receiving surface of the protective structure is formed from the dielectric material.

11. A plasma etching apparatus according to claim 8 in which the protective structure has a substrate receiving surface coplanar with the support surface of the substrate support and a wall portion surface subtending an angle with the substrate receiving surface, the protective structure has a recess therein, the recess is delimited by the substrate receiving surface and the wall portion surface, and the substrate receiving surface and the wall portion surface are formed from the dielectric material.

12. A plasma etching apparatus according to claim 8 in which the dielectric material is aluminum oxide.

13. A plasma etching apparatus according to claim 1 in which the protective structure comprises a region distal from the substrate support having at least one plasma facing surface which is inclined away from the substrate support.

14. A plasma etching apparatus according to claim 13 in which the region distal from the substrate support has a single plasma facing surface which is inclined away from the substrate support.

15. A plasma etching apparatus according to claim 13 in which the region distal from the substrate support is chamfered, beveled, coved or of ogee shape.

16. A plasma etching apparatus according to claim 1 in which the substrate support is electrically biased, and the protective structure is in electrical contact with the substrate support to provide an electrical bias on the protective structure.

17. A plasma etching apparatus according to claim 1 in which the chamber comprises a region formed from a dielectric material for transmission of RF energy, in which the plasma product device causes the RF energy to be coupled into the chamber through said region.

18. A plasma etching apparatus according to claim 1 in which the apparatus is a sputter etch apparatus.

19. A method of reducing contamination by particulate material in a plasma etching apparatus of the kind used for etching a substrate, comprising steps of:
providing an apparatus having the at least one chamber, substrate support and plasma production device according to claim 1 and a protective structure comprising a body of metallic material which surrounds the substrate support, the body of metallic material of the protective structure having a lower part situated below the level of the support surface of the substrate support and an upper part situated above the level of the support surface of the substrate support;
producing a plasma in the chamber which sputters metallic material from the protective structure onto an interior surface of the chamber to adhere particulate material which has been deposited on an interior surface of the chamber to the interior surface of the chamber,
wherein the protective structure is electrically biased during the step of producing a plasma in the chamber; and
providing a dark space shield having a protective structure receiving portion around the substrate support with the protective structure receiving portion spaced apart from the substrate support, such that a portion of the protective structure is received in the protective structure receiving portion as spaced therefrom such that a gap is defined therebetween, and such that the dark space shield including the protective structure receiving portion is located below the level of the platen,
whereby the extent to which plasma propagates around the protective structure and into a region, including the gap, between the level of the platen and the bottom of the chamber is minimized.

20. A method according to claim 19 in which the sputtering of the metallic material from the protective structure is performed concurrently with the etching of the substrate while the substrate is received on and supported by the support surface of the substrate support and a peripheral part of the substrate is protected from unwanted deposition of material by the protective structure.

21. A plasma etching apparatus according to claim 1 in which the protective structure receiving portion of the dark space shield is an annular flange that is spaced radially outwardly of said portion of the protective structure such

Assignees

• Spts Technologies Ltd

Inventors

• Wilby Anthony Paul
• Burgess Stephen R
• Moncrieff Ian
• Densley Paul
• Widdicks Clive L
• Rich Paul
• Thomas Adrian

Classifications

• H10P72/0421

  for drying etching · CPC title

• H10P50/242 Primary

  of Group IV materials · CPC title

• H01J37/32431

  Constructional details of the reactor · CPC title

• H01J37/32623

  Mechanical discharge control means · CPC title

• H01J37/32642

  Focus rings · CPC title