Position measuring device and method for determining positions of a measurement object

Patent metadata

Field	Value
Publication number	US-10151571-B2
Application number	US-201715608016-A
Country	US
Kind code	B2
Filing date	May 30, 2017
Priority date	Nov 27, 2014
Publication date	Dec 11, 2018
Grant date	Dec 11, 2018

Abstract

In a position measuring device (5) and a method for ascertaining positions of an object (3) to be measured, at least one capacitive position measuring sensor (7) provides a position measurement signal (PM) relating to the object (3) to be measured and at least one capacitive reference measurement sensor (14) provides a reference measurement signal (RM). The measuring sensors (7, 14) are connected to a computing unit (8) which is embodied to calculate a position signal (P) to ascertain the positions from the position measurement signal (PM) and the reference measurement signal (RM). As a result of interfering influences being contained substantially equally in the position measurement signal (PM) and the reference measurement signal (RM) as an interference signal (S), it is possible to determine and eliminate the interference signal (S) during the calculation.

First claim

What is claimed is:

1. A position measuring device, comprising:
at least one capacitive position measuring sensor configured to provide a position measurement signal (P M ) relating to an object being measured,
at least one capacitive reference measuring sensor configured to provide a reference measurement signal (R M ),
a computing unit programmed to ascertain a position of the object being measured,
said computing unit being connected to the at least one position measuring sensor and the at least one reference measuring sensor and
said computing unit being embodied such that a position signal (P) is calculated for ascertaining the position from the position measurement signal (P M ) and from the reference measurement signal (R M ),

wherein the at least one reference measuring sensor comprises a first reference electrode and a second reference electrode, said reference electrodes being arranged at a carrier body, wherein the carrier body consists of a material which has a coefficient of thermal expansion α at a temperature of 20° C., for which: |α|≤10·10 −8 /K, and
wherein the computing unit is connected to the position measuring sensor and the reference measuring sensor via signal lines which, at least in sections, form a signal cable.

2. The position measuring device as claimed in claim 1 , wherein the signal lines form over 70% of a total length (L) of the signal cable.

3. The position measuring device as claimed in claim 1 , wherein the position measuring device comprises plural position measuring sensors and plural reference measuring sensors, and
wherein a respective one of the reference measuring sensors is assigned to a respective one of the position measuring sensors for calculating the position signal (P).

4. The position measuring device as claimed in claim 1 , wherein the position measuring device comprises plural position measuring sensors, and wherein the reference measuring sensor is a common reference measuring sensor assigned to the plural position measuring sensors for calculating the position signal (P).

5. The position measuring device as claimed in claim 1 , wherein the at least one reference measuring sensor is arranged at a distance (d) of at most 10 mm from an associated one of the at least one position measuring sensor.

6. The position measuring device as claimed in claim 1 , wherein the first reference electrode and the second reference electrode are configured not to displace relative to one another.

7. The position measuring device as claimed in claim 1 , wherein the reference electrodes define a reference distance D R , wherein, for a ratio of a mean position D M of the object being measured to the reference distance D R : 0.7≤D M /D R ≤1.3.

8. The position measuring device as claimed in claim 6 , wherein, for the coefficient of thermal expansion α: |α|≤8·10 −8 /K.

9. The position measuring device as claimed in claim 6 , wherein the carrier body is configured as a hollow profile in cross section and the reference electrodes are arranged at opposite inner sides of the carrier body.

10. The position measuring device as claimed in claim 6 , wherein the carrier body is arranged between the reference electrodes.

11. The position measuring device as claimed in claim 6 , wherein the carrier body is formed by the object being measured.

12. The position measuring device as claimed in claim 1 , wherein the at least one reference measuring sensor is arranged such that the reference measurement signal (R M ) changes in accordance with the position of the object being measured.

13. The position measuring device as claimed in claim 1 , wherein at least one of the capacitive measuring sensors comprises a signal amplification transistor integrated into a housing of the at least one capacitive measuring sensor.

14. The position measuring device as claimed in claim 1 , wherein the at least one position measuring sensor and the at least one reference measuring sensor are of identical construction.

15. A positioning appliance comprising:
an object being measured to be positioned,
an actuator configured to position the object being measured,
a position measuring device as claimed in claim 1 .

16. The positioning appliance as claimed in claim 15 , wherein the computing unit is configured to actuate the actuator in accordance with the calculated position signal (P), wherein the actuator has, in particular, a positioning accuracy of at least 1.0 nm, in particular of at least 0.5 nm, and in particular of at least 0.1 nm.

17. The positioning appliance as claimed in claim 16 , wherein the actuator has a positioning accuracy of at least 1.0 nm.

18. A positioning appliance comprising:
an object being measured to be positioned,
an actuator configured to position the object being measured,
a position measuring device configured to ascertain positions of the object being measured, comprising:
at least one capacitive position measuring sensor configured to provide a position measurement signal (P M ) relating to the object being measured,
at least one capacitive reference measuring sensor configured to provide a reference measurement signal (R M ),
a computing unit programmed to ascertain positions of the object being measured,
said computing unit being connected to the at least one position measuring sensor and the at least one reference measuring sensor and
said computing unit being embodied such that a position signal (P) is calculated for ascertaining the positions from the position measurement signal (P M ) and the reference measurement signal (R M ),

wherein the at least one reference measuring sensor comprises a first reference electrode and a second reference electrode, said reference electrodes being arranged at a carrier body,
wherein the carrier body consists of a material which has a coefficient of thermal expansion α at a temperature of 20° C., for which: |α|≤10·10 −8 /K, and
wherein at least one of the capacitive measuring sensors comprises a signal amplification transistor integrated into a housing of the at least one capacitive measuring sensor.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Vogt Peter
• Bart Florian

Classifications

• G01B7/14

  for measuring distance or clearance between spaced objects or spaced apertures (G01B7/30 takes precedence) · CPC title

• G01B7/082

  Height gauges · CPC title

• G01B7/06

  for measuring thickness {(measuring during the manufacture of coatings C23C14/54)} · CPC title

• G01B7/023

  for measuring distance between sensor and object (G01B7/082 and G01B7/102 take precedence) · CPC title

• G01B7/003 Primary

  for measuring position, not involving coordinate determination (coordinate measuring G01B7/004) · CPC title