Micro pick up array pivot mount

Patent metadata

Field	Value
Publication number	US-10150669-B2
Application number	US-201715460915-A
Country	US
Kind code	B2
Filing date	Mar 16, 2017
Priority date	Jun 12, 2014
Publication date	Dec 11, 2018
Grant date	Dec 11, 2018

Abstract

Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.

First claim

What is claimed is:

1. A pivot mount comprising:
a pivot platform;
a base;
a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root;
wherein each spring arm includes a switch-back along an axial length of said each spring arm such that a pair of first and second lengths of said each spring arm immediately adjacent the switch-back are parallel to each other.

2. The pivot mount of claim 1 , wherein the switch-back is an inner switch-back along an inner length of said each spring arm, and further comprising an outer switch-back along an outer length of said each spring arm.

3. The pivot mount of claim 1 , wherein the plurality of spring arms comprises three or more spring arms.

4. The pivot mount of claim 3 , wherein the switch-back is an inner switch-back along an inner length of said each spring arm, and further comprising an outer switch-back along an outer length of said each spring arm.

5. The pivot mount of claim 1 , wherein the inner root is perpendicular to an inner length of said each spring arm extending from the pivot platform, and the outer root is perpendicular to an outer length of said each spring arm extending from the base.

6. The pivot mount of claim 1 , wherein the pivot platform is movable relative to the base in a direction orthogonal to a contact surface of the pivot platform, wherein movement of the pivot platform in the direction orthogonal to the contact surface of the pivot platform causes a normal strain that is characterized as being parallel to the axial length of said each spring arm at the first and second lengths of said each spring arm.

7. The pivot mount of claim 6 , wherein the normal strain comprises opposite signs on the first and second lengths of said each spring arm.

8. The pivot mount of claim 7 , further comprising an electrostatic clamp contact on the pivot platform.

9. The pivot mount of claim 8 , further comprising a first wiring that connects the electrostatic clamp contact to an electrical connection on the base.

10. The pivot mount of claim 9 , wherein the first wiring runs along a first spring arm of the plurality of spring arms.

11. The pivot mount of claim 9 , further comprising a voltage contact electrode on the pivot platform.

12. The pivot mount of claim 11 , further comprising a second wiring that connects the voltage contact electrode to the electrical connection on the base.

13. The pivot mount of claim 12 , wherein the second wiring runs along a second spring arm of the plurality of spring arms.

14. The pivot mount of claim 12 , wherein the first wiring and the second wiring run along a same spring arm of the plurality of spring arms.

15. The pivot mount of claim 12 , wherein the electrical connection is a flex circuit along an edge of the base.

Assignees

• Apple Inc

Inventors

• Bathurst Stephen P
• Parks Paul Argus
• Light Nile Alexander

Classifications

• H10P72/72

  using electrostatic chucks · CPC title

• B25J7/00

  Micromanipulators {(specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20)} · CPC title

• B25J15/0085

  with means for applying an electrostatic force on the object to be gripped · CPC title

• B81C99/002 Primary

  Apparatus for assembling MEMS, e.g. micromanipulators (micromanipulators per se B25J7/00) · CPC title

• H02N13/00

  Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect · CPC title