Gas treatment apparatus

Patent metadata

Field	Value
Publication number	US-10150120-B2
Application number	US-201415031096-A
Country	US
Kind code	B2
Filing date	Sep 30, 2014
Priority date	Nov 5, 2013
Publication date	Dec 11, 2018
Grant date	Dec 11, 2018

Abstract

A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.

First claim

The invention claimed is:

1. A gas treatment apparatus, comprising:
a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and
an electrostatic precipitation chamber operable to receive said scrubbed gas stream to be treated therewithin to provide a treated gas stream, said electrostatic precipitation chamber defining a first chamber and said gas scrubber chamber defining a second chamber, said first chamber being configured to surround said second chamber wherein said first chamber and said second chamber share a common wall, an inner surface of said common wall defining an outer wall of said second chamber and an outer surface of said common wall defining an inner wall of said first chamber; said second chamber comprising an elongate chamber defined by said inner surface of said common wall and said first chamber comprising an elongate annular chamber defined by said outer surface of said common wall and an inner surface of an enclosing wall; wherein said electrostatic precipitation chamber comprises an elongate annular electrode structure located between said outer surface of said common wall and said inner surface of said enclosing wall, and outlets for ejecting liquid to provide a circumferentially flowing liquid curtain along both said outer surface of said common wall and said inner surface of said enclosing wall;
wherein said gas scrubbing chamber comprises a header tank at least partially defining said gas scrubbing chamber and comprising a sieve plate, wherein a fluid path extends from said header tank to the outlets of the electrostatic precipitation chamber to provide the liquid curtain along the outer surface of the common wall; wherein said gas scrubbing chamber comprises an effluent gas stream inlet for receiving said effluent gas stream and a conduit to convey said scrubbed gas stream to an inlet of said electrostatic precipitation chamber located away from a suspension structure for said elongate annular electrode structure, said electrostatic precipitation chamber comprising a treated gas stream outlet for providing treated gas stream, said effluent gas stream inlet and said treated gas stream outlet being positioned to cause gas flow along an axial length of both said gas scrubbing chamber and said electrostatic precipitation chamber.

2. The apparatus of claim 1 , wherein said elongate annular electrode structure extends axially along said electrostatic precipitation chamber.

3. The apparatus of claim 1 , wherein said elongate annular electrode structure is located a constant distance between said outer surface of said common wall and said inner surface of said enclosing wall.

4. The apparatus of claim 1 , wherein said elongate annular electrode structure comprises discharge points extending towards said outer surface of said common wall and said inner surface of said enclosing wall.

5. The apparatus of claim 4 , wherein a number of discharge points extend toward the outer surface of said common wall and a number of discharge points extend toward the inner surface of said enclosing wall, the outer surface of the common wall has an area and the inner surface of the enclosing wall has an area and wherein a ratio of the number of said discharge points extending towards said outer surface of said common wall over the number of said discharge points extending towards said inner surface of said enclosing wall is proportional to a ratio of the area of said outer surface of said common wall and the area of said inner surface of said enclosing wall.

Assignees

• Edwards Ltd

Inventors

• Seeley Andrew James
• Pope Alexander Michael
• Cohn Thomas Frank

Classifications

• B01D2252/103

  Water · CPC title

• B01D53/14

  by absorption · CPC title

• B03C3/41

  Ionising-electrodes · CPC title

• B01D2258/0216

  from CVD treatment or semi-conductor manufacturing · CPC title

• B01D53/1456 Primary

  Removing acid components · CPC title