Mems sensor
US-2015212109-A1 · Jul 30, 2015 · US
US10149054B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10149054-B2 |
| Application number | US-201615057708-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 1, 2016 |
| Priority date | Mar 2, 2015 |
| Publication date | Dec 4, 2018 |
| Grant date | Dec 4, 2018 |
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Official abstract text for this publication.
An operable membrane device is provided, including a plate, a plurality of membranes suspended from the plate and being a seat of residual mechanical constraints, at least a first actuator configured to deform the plate outside its plane, second actuators, each second actuator being configured to deform a membrane outside its plane, and control electronics configured to generate second control signals at the second actuators in order to vibrate the membranes and configured to generate first control signals at the first actuator to cause a deformation of the plate so that the plate is found in the deformed state, wherein a mechanical constraint is applied to the membranes that at least reduces the residual constraints of the membranes.
Opening claim text (preview).
The invention claimed is: 1. An operable membranes device, comprising: a plate; membranes suspended from the plate, the membranes being subject to residual mechanical constraints; at least one first actuator configured to deform the plate outside its plane; second actuators, each second actuator being configured to deform one of the membranes outside its plane; and control electronics configured to generate second control signals at the second actuators in order to vibrate the membranes and configured to generate first control signals at the at least one first actuator to cause a deformation of the plate, wherein the deformation of the plate reduces the residual mechanical constraints of the membranes. 2. The operable membrane device according to claim 1 , wherein deformation of the plate cancels out the residual mechanical constraints of the membranes. 3. The operable membrane device according to claim 1 , wherein the control electronics are further configured to generate additional control signals at the at least one first actuator in order to cause the plate to vibrate, independently of the deformation of the plate. 4. The operable membrane device according to claim 3 , wherein the additional control signals causing the vibration of the plate are alternating signals. 5. The operable membrane device according to claim 1 , wherein the first control signals causing the deformation of the plate are continuous signals. 6. The operable membrane device according to claim 1 , wherein the at least one first actuator and/or the second actuators are piezoelectric and/or ferroelectric actuators. 7. The operable membrane device according to claim 1 , wherein the total surface of at least one first actuator is between 5% and 40% of the surface of the plate and/or wherein the total surface of the second actuators is between 5% and 40% of the total surface of the membranes. 8. The operable membrane device according to claim 1 , wherein the at least one first actuator comprises several first actuators distributed along at least one edge of the plate. 9. The operable membrane device according to claim 8 , wherein the plate is in the form of a disc and the first actuators are in the form of an arc of circle centered on the center of the disc. 10. The operable membrane device according to claim 8 , wherein the plate is in the form of a rectangle and the several first actuators extending parallel to at least two opposite edges of the plate. 11. The operable membrane device according to claim 8 , wherein the plate is in the form of a disc and the first actuators are in the form of a ring centered on the center of the disc. 12. The operable membrane device according to claim 1 , wherein the membranes are situated on one face of the plate. 13. A digital speaker comprising at least one operable membrane device according to claim 1 . 14. A hydraulic micro-pump comprising at least one operable membrane device according to claim 1 . 15. A ultrasound emission device comprising at least one operable membrane device according to claim 1 . 16. A controlling method for controlling a digital speaker comprising at least an operable membranes device comprising a plate, membranes suspended from said plate, the membranes being subject to residual mechanical constraints, at least one first actuator configured to deform the plate outside its plane, second actuators, each second actuator being configured to deform one of the membranes outside its plane, and control electronics configured to generate second control signals at the second actuators in order to vibrate the membranes and configured to generate first control signals at the at least one first actuator to cause a deformation of the plate, wherein the deformation of the plate reduces the residual mechanical constraints of the membranes, the controlling method comprising: generating a first continuous control signal at the at least one first actuator causing the deformation of the plate; and generating second control signals at all or part of the second actuators as a function of a sound to be produced. 17. The controlling method according to claim 16 , further comprising generating an additional control signal of alternating type at the at least one first actuator for vibrating the plate. 18. The controlling method according to claim 17 , wherein the additional control signal is generated while the first continuous control signal is generated.
Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor {(manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182)} · CPC title
For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers · CPC title
Microphones or microspeakers · CPC title
Structural combinations of separate transducers or of two parts of the same transducer and responsive respectively to two or more frequency ranges · CPC title
using transducers reproducing the same frequency band · CPC title
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