Porous piezoelectric material with dense surface, and associated methods and devices

Patent metadata

Field	Value
Publication number	US-10147870-B2
Application number	US-201515526713-A
Country	US
Kind code	B2
Filing date	Nov 12, 2015
Priority date	Nov 12, 2014
Publication date	Dec 4, 2018
Grant date	Dec 4, 2018

Abstract

A method for producing a porous piezoelectric polymer film with a dense surface, includes depositing a polymer solution onto a substrate to form a polymer film including a solvent; evaporating a portion of the solvent to form the dense surface away from the substrate; forming water droplets in interior of the polymer film; and substantially evaporating the water droplets and remaining solvent to form porous interior. A piezoelectric composition includes a piezoelectric material with a porous interior and a dense surface for interfacing with an electrode. A piezoelectric device includes a first electrode; a porous piezoelectric film with a dense surface and porous interior, wherein the porous piezoelectric film is deposited on the first electrode and the dense surface is away from the first electrode; and a second electrode deposited on the dense surface for, together with the first electrode, providing an electrical interface for the porous piezoelectric film.

First claim

What is claimed is:

1. A piezoelectric composition comprising:
a piezoelectric material including
a porous interior, and
a dense surface for interfacing with an electrode, the dense surface having density greater than the porous interior.

2. The piezoelectric composition of claim 1 , the dense surface being substantially composed of a first material; and
the porous interior being substantially composed of the first material and pores embedded in the first material.

3. The piezoelectric composition of claim 2 , the first material including a polymer.

4. The piezoelectric composition of claim 2 , the first material substantially composed of a polymer.

5. The piezoelectric composition of claim 1 , the piezoelectric material being a film.

6. The piezoelectric composition of claim 1 , the piezoelectric material being flexible.

7. A piezoelectric device comprising:
a first electrode;
a porous piezoelectric film having a dense surface and porous interior, the porous piezoelectric film being deposited on the first electrode such that the dense surface faces away from the first electrode; and
a second electrode deposited on the dense surface for, together with the first electrode, providing an electrical interface for the porous piezoelectric film.

8. The piezoelectric device of claim 7 , electrical contact between the second electrode and the dense surface being substantially independent of dynamic dimensional variation of the porous piezoelectric film.

9. The piezoelectric device of claim 7 , the second electrode having extent into the dense surface that is insufficient to produce an electrical short to the first electrode.

10. The piezoelectric device of claim 7 , the porous piezoelectric film and the first and second electrodes being flexible.

11. The piezoelectric device of claim 7 , the porous piezoelectric film being a polymer film.

12. The piezoelectric device of claim 7 , further comprising electronic circuitry, communicatively coupled with the first and second electrodes, for measuring an electrical property of the porous piezoelectric film indicative of mechanical force exerted on the porous piezoelectric film.

13. The piezoelectric device of claim 7 , further comprising electronic circuitry, communicatively coupled with the first and second electrodes, for applying an electrical condition to the porous piezoelectric film to change a dimensional property of the porous piezoelectric film.

Assignees

• Dartmouth College

Inventors

• Zhang John X J
• Chen Dajing

Classifications

• H01L41/45

  Electricity · mapped topic

• H01L41/193 Primary

  Electricity · mapped topic

• H01L41/1132

  Electricity · mapped topic

• H01L41/09

  Electricity · mapped topic

• H01L41/047

  Electricity · mapped topic