Beam generation unit and X-ray small-angle scattering apparatus

Patent metadata

Field	Value
Publication number	US-10145808-B2
Application number	US-201515114209-A
Country	US
Kind code	B2
Filing date	Feb 2, 2015
Priority date	Mar 27, 2014
Publication date	Dec 4, 2018
Grant date	Dec 4, 2018

Abstract

A micro beam generation unit capable of simultaneously capturing anisotropic images in a high signal-to-background ratio with a compact configuration and an X-ray small-angle scattering apparatus are provided. A micro beam generation unit 110 generates X-rays having a micro spot size, with which a sample is irradiated, in order to detect diffracted X-rays by a one-dimensional detector or a two-dimensional detector. The micro beam generation unit 110 includes a slit 115 that is provided on an X-ray optical path and reshapes X-rays into parallel beams, and two channel-cut monochromator crystals 117 and 118 that are arranged in arrangement of (+, −, −, +) and remove parasitic scattering of parallel beams reshaped by the slit. Accordingly, it is possible to simultaneously obtain anisotropic images in a high signal-to-background ratio with a compact configuration.

First claim

The invention claimed is:

1. A beam generation unit that generates X-rays with which a sample is irradiated in order to detect scattered X-rays or diffracted X-rays, the beam generation unit comprising:
a slit that is provided on an X-ray optical path and reshapes an X-ray beam shape;
two channel-cut monochromator crystals that are arranged in arrangement of (+, −, −, +), remove parasitic scattering of parallel beams reshaped by the slit, and generate parallel and micro X-ray beams; and
a first mirror that is arranged in a front stage of the slit, reflects X-rays within an optical path plane that is formed by the two channel-cut monochromator crystals, and prevents divergence of X-rays in a direction vertical to the optical path plane.

2. The beam generation unit according to claim 1 , wherein
the first mirror is a focusing mirror that forms a focal point on a detector.

3. The beam generation unit according to claim 1 , wherein the two channel-cut monochromator crystals each have a pair of symmetric cut faces.

4. The beam generation unit according to claim 1 , wherein one of the two channel-cut monochromator crystals has a pair of asymmetric cut faces.

5. The beam generation unit according to claim 1 , further comprising:
a second mirror that is arranged in the front stage of the slit, performs reflection within a plane vertical to the optical path plane that is formed by the two channel-cut monochromator crystals, and reshapes divergent beams into parallel beams within the optical path plane.

6. An X-ray small-angle scattering apparatus comprising:
a goniometer that mounts the beam generation unit according to claim 1 on a rotary arm.

7. The X-ray small-angle scattering apparatus according to claim 6 , further comprising:
a two-dimensional detector that detects scattered X-rays or diffracted X-rays generated by irradiation of a sample with X-rays generated by the beam generation unit.

8. A beam generation unit that generates X-rays with which a sample is irradiated in order to detect scattered X-rays or diffracted X-rays, the beam generation unit comprising:
a slit that is provided on an X-ray optical path and reshapes an X-ray beam shape; and
two channel-cut monochromator crystals that are arranged in arrangement of (+, −, −, +), remove parasitic scattering of parallel beams reshaped by the slit, and generate parallel and micro X-ray beams,
wherein one of the two channel-cut monochromator crystals has a pair of asymmetric cut faces.

9. The beam generation unit according to claim 8 , further comprising:
a mirror that is arranged in a front stage of the slit, performs reflection within a plane vertical to an optical path plane that is formed by the two channel-cut monochromator crystals, and reshapes divergent beams into parallel beams within the optical path plane.

10. An X-ray small-angle scattering apparatus, comprising:
a goniometer that mounts the beam generation unit according to claim 8 on a rotary arm.

11. The X-ray small-angle scattering apparatus according to claim 10 , further comprising:
a two-dimensional detector that detects scattered X-rays or diffracted X-rays generated by irradiation of a sample with X-rays generated by the bean generation unit.

12. An X-ray small-angle scattering apparatus comprising:
a beam generation unit that generates X-rays with which a sample is irradiated in order to detect scattered X-rays or diffracted X-rays, the beam generation unit including:
a slit that is provided on an X-ray optical path and reshapes an X-ray beam shape; and

two channel-cut monochromator crystals that are arranged in arrangement of (+, −, −, +), remove parasitic scattering of parallel beams reshaped by the slit, and generate parallel and micro X-ray beams; and
a goniometer that mounts the beam generation unit on a rotary arm.

13. The X-ray small-angle scattering apparatus according to claim 12 , wherein the two channel-cut monochromator crystals each have a pair of symmetric cut faces.

14. The X-ray small-angle scattering apparatus according to claim 12 ,
wherein one of the two channel-cut monochromator crystals has a pair of asymmetric cut faces.

15. The X-ray small-angle scattering apparatus according to claim 12 , further comprising:
a mirror that is arranged in a front stage of the slit, performs reflection within a plane vertical to an optical path plane that is formed by the two channel-cut monochromator crystals, and reshapes divergent beams into parallel beams within the optical path plane.

16. The X-ray small-angle scattering apparatus according to claim 12 , further comprising:
a two-dimensional detector that detects scattered X-rays or diffracted X-rays generated by irradiation of a sample with X-rays generated by the bean generation unit.

Assignees

• Rigaku Denki Co Ltd

Inventors

• Omote Kazuhiko
• Ito Kazuki

Classifications

• G01N2223/315

  monochromators · CPC title

• G21K1/10

  Scattering devices; Absorbing devices; Ionising radiation filters · CPC title

• G21K1/06

  using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence) · CPC title

• G01N23/201 Primary

  by measuring small-angle scattering · CPC title

• G01N23/207

  Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions · CPC title