X-ray apparatus

Patent metadata

Field	Value
Publication number	US-10145806-B2
Application number	US-201315103031-A
Country	US
Kind code	B2
Filing date	Dec 12, 2013
Priority date	Dec 12, 2013
Publication date	Dec 4, 2018
Grant date	Dec 4, 2018

Abstract

An X-ray apparatus includes: an X-ray source that radiates X-rays upon an object to be measured; a frame upon which the X-ray source is mounted; an anti-vibration mechanism that attenuates vibration applied to the frame; and a shift mechanism that shifts the frame and the anti-vibration mechanism integrally together.

First claim

The invention claimed is:

1. An X-ray apparatus, comprising:
an X-ray source that radiates X-rays upon an object to be measured;
a frame upon which the X-ray attenuates vibration applied to the frame;
a base plate unit that supports a shift mechanism; and
the shift mechanism that shifts the frame and the anti-vibration mechanism integrally together.

2. The X-ray apparatus according to claim 1 , wherein:
the frame further comprises:
a stage upon which the object to be measured is mounted; and
an X-ray detector that detects X-rays that have been radiated from the X-ray source and that have passed through the object to be measured.

3. The X-ray apparatus according to claim 2 , wherein:
the shift mechanism supports the frame via the anti-vibration mechanism.

4. The X-ray apparatus according to claim 1 , wherein:
the shift mechanism comprises:
a guide rail; and
a plurality of shift members that relatively shift along the guide rail; and wherein:
the shift members are positioned below the anti-vibration mechanism in the vertical direction.

5. The X-ray apparatus according to claim 4 , wherein:
the shift mechanism is adapted so that leg member for supporting the frame can be installed below the shift member.

6. The X-ray apparatus according to claim 5 , wherein:
the shift mechanism comprises a regulation member that, when the leg member is to be installed, temporarily regulates shifting of the frame to a position at a predetermined shift amount within the total shiftable amount of the frame.

7. The X-ray apparatus according to claim 4 , further comprising:
a chamber that houses the frame, and wherein:
the base plate constitutes a portion of the chamber; and
in a position in which the frame has been shifted by a predetermined shift amount, at least a portion of the frame is exposed from the chamber.

8. The X-ray apparatus according to claim 1 , wherein:
the anti-vibration mechanism is provided more inward upon a lower surface of the frame than an outer edge portion of the lower surface of the frame.

9. The X-ray apparatus according to claim 2 , further comprising:
a reconstruction unit that calculates the internal structure of the object to be measured on the basis of projection images of the object to be measured obtained when X-rays have passed through the object to be measured from a plurality of different directions while changing a relative position of the X-ray detector and the object to be measured.

Assignees

• Nikon Corp

Inventors

• Tanaka Toshihisa

Classifications

• G01N23/04 Primary

  and forming images of the material · CPC title

• G01N2223/33

  scanning, i.e. relative motion for measurement of successive object-parts · CPC title

• G01N2223/308

  support of radiation source · CPC title