Capacitive sensor, acoustic sensor and microphone
US-2015369653-A1 · Dec 24, 2015 · US
US10145728B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10145728-B2 |
| Application number | US-201514750312-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 25, 2015 |
| Priority date | Sep 15, 2014 |
| Publication date | Dec 4, 2018 |
| Grant date | Dec 4, 2018 |
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Described herein is a transceiver circuit for a capacitive micromachined ultrasonic transducer (CMUT), provided with: a transmitter stage, which generates excitation pulses for a first node of the CMUT transducer during a transmitting phase, a second node of the CMUT transducer being coupled to a biasing voltage; a receiver stage that is selectively coupled to the first node during a receiving phase and has an amplification stage; a switching stage that couples the receiver stage to the first node during the receiving phase and decouples the receiver stage from the first node during the transmitting phase. The amplification stage is provided with a charge amplifier that has an input terminal and is biased as a function of a biasing voltage; and the switching stage is coupled to the same biasing voltage thereby minimizing an injection of charge into the input terminal upon switching from the transmitting phase to the receiving phase.
Opening claim text (preview).
The invention claimed is: 1. A device, comprising: a transmitter configured to generate an excitation signal for a first node of a transducer during a transmitting phase, a second node of said transducer being coupled to a biasing voltage terminal; a receiver including a charge amplifier having an input terminal and biased as a function of an amplifier biasing voltage; and switching circuitry coupled to the amplifier biasing voltage and configured to: generate a pre-charge biasing voltage based on the amplifier biasing voltage during a pre-charge phase; couple the receiver to said first node during a receiving phase; and decouple the receiver from said first node during the transmitting phase. 2. The device of claim 1 , comprising: decoupling circuitry coupled between an output terminal of said transmitter and said first node and configured to decouple the transmitter from said first node during the receiving phase; and transmitter biasing circuitry coupled to said output terminal and configured to set a voltage of said output terminal to a reference voltage value during said receiving phase. 3. The device of claim 2 wherein said decoupling circuitry comprises a pair of diodes in antiparallel configuration, connected between said output terminal and said first node and biased during said receiving phase. 4. The device of claim 2 wherein said transmitter biasing circuitry comprises a switch and a high-impedance element, connected in series between said output terminal and a line set at said reference voltage, said switch being configured to open during said transmitting phase and to close during said receiving phase. 5. The device of claim 2 wherein said switching circuitry comprises an intermediate node and is configured to charge the intermediate node to the pre-charge biasing voltage during the pre-charge phase and to couple the amplifier input terminal to the intermediate node during the receiving phase. 6. The device of claim 1 wherein said switching circuitry comprises an intermediate node and is configured to charge the intermediate node to the pre-charge biasing voltage during the pre-charge phase and to couple the amplifier input terminal to the intermediate node during the receiving phase. 7. The device of claim 6 wherein said switching circuitry comprises: a first switch configured to selectively coupled the first node to the intermediate node; a second switch configured to selectively couple the intermediate node to the input terminal of the charge amplifier; a biasing-voltage generator coupled to the intermediate node and configured to generate the pre-charge biasing voltage based on said amplifier biasing voltage; and a third switch coupled between a reference voltage terminal and the biasing-voltage generator and configured to selectively activate the biasing-voltage generator during the pre-charge phase. 8. The device of claim 7 wherein, the receiver comprises a biasing-current generator coupled to the biasing voltage and configured to supply a biasing current, wherein the charge amplifier is configured to generate an operating voltage on the input terminal based on the biasing current; and the biasing-voltage generator comprises: a pre-charge-current generator, which is coupled to the biasing generator and configured to supply a pre-charge current, wherein the biasing-voltage generator is configured to provide the pre-charge biasing voltage on the intermediate node based on the pre-charge current, said pre-charge biasing voltage having a pre-set relation with said operating voltage. 9. The device of claim 8 wherein, said charge amplifier includes a first transistor coupled to the biasing-current generator to receive the biasing current and having a control terminal coupled to the input terminal, and a first aspect ratio; and said biasing-voltage generator comprises a fourth switch coupled between the intermediate node and the pre-charge-current generator, and a second transistor, coupled to the pre-charge-current generator to receive the pre-charge current, which is mirrored with respect to the biasing current via a mirror ratio, the second transistor having a control terminal coupled to the intermediate node and a second aspect ratio, wherein the second aspect ratio is a multiple of the first aspect ratio, the multiple being a function of the mirror ratio. 10. The device of claim 1 wherein the charge amplifier includes a feedback capacitor coupled between an output terminal of the charge amplifier and the input terminal of the charge amplifier. 11. The device of claim 1 wherein the transmitter operates at a first voltage and the receiver operates at a second voltage, lower than the first voltage, and the switching circuitry is configured to protect the receiver stage from the first voltage in the transmitter stage. 12. The device of claim 1 wherein the biasing voltage terminal is configured to receive a voltage from an external source. 13. The device of claim 1 wherein charge amplifier has a biasing terminal amplifier coupled to the amplifier biasing voltage and separate from the input terminal of the charge amplifier. 14. A system, comprising: an ultrasonic probe including a plurality of transducers arranged in an array and a corresponding plurality of transceiver circuits, each transceiver circuit having: a transmitter configured to generate an excitation signal for a first node of a transducer during a transmitting phase, a second node of said transducer being coupled to a biasing voltage terminal; a receiver including a charge amplifier having an input terminal and biased as a function of an amplifier biasing voltage; and switching circuitry coupled to the amplifier biasing voltage and configured to: generate a pre-charge biasing voltage based on the amplifier biasing voltage during a pre-charge phase; couple the receiver to said first node during a receiving phase; and decouple the receiver from said first node during the transmitting phase; and a controller configured to control timing of the receiving and transmitting phases of each of said transceiver circuits. 15. The system of claim 14 wherein each transceiver circuit comprises: decoupling circuitry coupled between an output terminal of the transmitter and the first node and configured to decouple the transmitter from the first node during the receiving phase of the respective transceiver; and transmitter biasing circuitry coupled to the output terminal and configured to set a voltage of the output terminal to a reference voltage value during the receiving phase of the respective transceiver. 16. The system of claim 14 configured to perform at least one of ultrasonography and ultrasonic tomography. 17. A method, comprising: transmitting an excitation signal of a transmitter to a first node of a transducer during a transmitting phase, a second node of said transducer being coupled to a biasing voltage terminal; biasing a charge amplifier of a receiver as a function of an amplifier biasing voltage, the charge amplifier having an input terminal; generating a pre-charge biasing voltage based on the amplifier biasing voltage during a pre-charge phase; coupling the receiver to said first node during a receiving phase; and decoupling the receiver from said first node during the transmitting phase. 18. The method of claim 17 , comprising: decoupling an output terminal of the transmitter from said first node during the receiving phase; and clamping a voltage of said output terminal to a reference voltage value during said receiving
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