Sulfonium salt, chemically amplified resist composition, and pattern forming process
US-9221742-B2 · Dec 29, 2015 · US
US10144699B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10144699-B2 |
| Application number | US-201815945945-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 5, 2018 |
| Priority date | Mar 28, 2014 |
| Publication date | Dec 4, 2018 |
| Grant date | Dec 4, 2018 |
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The present invention is able to provide a bifunctional compound represented by formula (1). (In the formula, R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO; and R 2 represents H, CH 3 or C 2 H 5 .)
Opening claim text (preview).
The invention claimed is: 1. A bifunctional compound of formula (1): wherein R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO; and R 2 represents H, CH 3 or C 2 H 5 , provided that when R 1 represents CHO, R 2 represents C 2 H 5 . 2. The bifunctional compound according to claim 1 , wherein R 1 represents COOCH 3 . 3. The bifunctional compound according to claim 1 , wherein R 1 represents COOC 2 H 5 . 4. The bifunctional compound according to claim 1 , wherein R 1 represents COOC 3 H 7 . 5. The bifunctional compound according to claim 1 , wherein R 1 represents COOC 4 H 9 . 6. The bifunctional compound according to claim 1 , wherein R 1 represents CHO.
having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, [IMAGE cpc-sch-C07C-0958.gif] groups,[IMAGE cpc-sch-C07C-0959.gif] groups, or[IMAGE cpc-sch-C07C-0960.gif] in the acid moiety · CPC title
Coordination complexes, e.g. organometallic complexes, immobilised on an inorganic support, e.g. ship-in-a-bottle type catalysts (catalysts comprising molecular sieves B01J29/00) · CPC title
containing four rings · CPC title
having a —CHO group on a condensed ring system · CPC title
Hydroformylation, metalformylation, carbonylation or hydroaminomethylation · CPC title
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