Ceramic susceptor
US-11963270-B2 · Apr 16, 2024 · US
US10143042B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10143042-B2 |
| Application number | US-201214402543-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 15, 2012 |
| Priority date | May 22, 2012 |
| Publication date | Nov 27, 2018 |
| Grant date | Nov 27, 2018 |
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A heating device 10 including a heat-generating member 20 and a support member 30 that supports the heat-generating member 20 and comprises bio-soluble inorganic fibers, wherein the bio-soluble inorganic fibers do not contact directly the heat-generating member 20 or contact of the bio-soluble inorganic fibers with the heat-generating member 20 is reduced.
Opening claim text (preview).
The invention claimed is: 1. A heating device comprising: a heater; and a support member that supports the heater and comprises bio-soluble inorganic fibers, wherein the bio-soluble inorganic fibers are Mg silicate fibers having the following composition or Ca silicate fibers having the following composition: [Mg silicate fibers] SiO 2 : 66 to 82 wt % CaO: 1 to 9 wt % MgO: 10 to 30 wt % Al 2 O 3 : 3 wt % or less Other oxides: less than 2 wt % [Ca silicate fibers] SiO 2 : 66 to 82 wt % CaO: 10 to 34 wt % MgO: 3 wt % or less Al 2 O 3 : 5 wt % or less Other oxides: less than 2 wt % wherein the heating device comprises any coating of the following configurations (1) to (3); and due to the coating, the bio-soluble inorganic fibers do not contact directly the heater or the contact of the bio-soluble inorganic fibers with the heater is reduced compared with a heater without the coating: (1) at least surfaces of the support member that contact the heater are coated; (2) bio-soluble inorganic fibers that are present on at least surfaces of the support member that contact the heater are coated; and (3) the heater is coated. 2. The heating device according to claim 1 , wherein in the configuration (1), a silica-containing treatment agent is infiltrated into the support member through at least the surfaces that contact the heater to cause the surfaces to be hardened. 3. The heating device according to claim 1 , wherein in the configuration (2), the bio-soluble inorganic fibers are coated with a silica-containing treatment agent. 4. The heating device according to claim 1 , wherein in the configuration (3), the heater is coated with a silica-containing treatment agent. 5. The heating device according to claim 2 , wherein the silica is in one form or in a combination of two or more forms selected from colloid, powder and a metal alkoxide. 6. The heating device according to claim 2 , wherein the silica-containing treatment agent comprises a chelating agent that does not contain metal ions. 7. The heating device according to claim 2 , wherein the silica-containing treatment agent contains an acid. 8. The heating device according to claim 2 , wherein the silica is an acidic colloidal silica or a cationic colloidal silica. 9. The heating device according to claim 1 , wherein the reaction between the bio-soluble inorganic fibers and the heater is suppressed when the temperature of the heater is 1100° C. 10. The heating device according to claim 1 , wherein the bio-soluble inorganic fibers are heat-treated.
Fibre or filament compositions (manufacture of fibres or filaments C03B37/00) · CPC title
Density · CPC title
Thermal treatment · CPC title
Fibres based on silica · CPC title
Heaters using non- flexible resistive rods or tubes not provided for in H05B3/42 · CPC title
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