Tunnel field effect transistor having anisotropic effective mass channel

Patent metadata

Field	Value
Publication number	US-10141436-B2
Application number	US-201715479247-A
Country	US
Kind code	B2
Filing date	Apr 4, 2017
Priority date	Apr 4, 2016
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A tunnel field effect transistor (TFET) includes a substrate, heavily doped source and drain regions disposed at opposite ends of a channel region forming a PiN or NiP structure, the channel region including a first substantially parallelogram portion having a first length defined along a longitudinal axis extending from the source region to the drain region and a second substantially parallelogram portion having a second length defined along the longitudinal axis larger than the first length, the TFET device having an effective channel length that is an average of the first and second lengths. The channel region includes a channel material with a first effective mass along a longitudinal axis extending from the source region to the drain region and a second effective mass along a lateral axis perpendicular to the longitudinal axis, the first effective mass being greater than the second effective mass.

First claim

The invention claimed is:

1. A tunnel field effect transistor (TFET) device, comprising:
a substrate;
heavily doped source and drain regions disposed at opposite ends of the substrate separated by a channel region, where the channel region is intrinsic or lightly doped with doping of less than 10 18 /cm 3 and the source and drain regions doped with doping of between about 10 18 /cm 3 to about 10 21 /cm 3 , collectively forming a structure wherein the structure is PiN or NiP;
a gate terminal separated from the channel region by a dielectric layer;
a source and drain terminal coupled to the source and drain regions, respectively,
the channel region comprising a channel material having a first effective mass along a longitudinal axis extending from the source region to the drain region and a second effective mass along a lateral axis perpendicular to the longitudinal axis, wherein a ratio of the first effective mass to the second effective mass is between 1 and 50, the channel region comprising a first substantially parallelogram portion having a first length defined along a longitudinal axis extending from the source region to the drain region and a second substantially parallelogram portion connected to the first substantially parallelogram portion having a second length defined along the longitudinal axis and larger than the first length, the TFET device having an effective channel length defined along the longitudinal axis that is an average of the first and second lengths.

2. The TFET device of claim 1 , the channel region comprising one or more layers selected from the group consisting of i) 2-dimensional inherently anisotropic effective mass material made from phosphorene, titanium trisulfide, or any combination thereof; ii) 2-dimensional inherently isotropic effective mass material made from transition metal dichalcogenide including molybdenum disulfide, tungsten disulfide, molybdenum diselenide, tungsten diselenide, molybdenum ditelluride, or any combination thereof; and iii) 3-dimensional bulk material made from Si, germanium, gallium arsenide (GaAs), an alloy of silicon and germanium, indium phosphide, or any combination thereof, wherein, if formed, the 2-dimensional inherently isotropic effective mass material and the 3-dimensional bulk material are formed to induce the first effective mass and the second effective mass.

3. The TFET device of claim 1 , the dielectric layer made from HfO 2 , SiO 2 , Al 2 O 3 , or any combination thereof.

4. The TFET device of claim 1 , the gate, source, and drain terminals made from Al, Cu, Ni, a heavily-doped silicon, tungsten, and metal silicides from the group consisting essentially of TiSi 2 , MoSi 2 , and WSi 2 , or any combination thereof.

5. The TFET device of claim 1 , wherein the channel region is L-shaped.

6. The TFET device of claim 1 , wherein the channel region is V-shaped.

7. The TFET device of claim 1 , the effective channel length having a value of about 2 nm to about 20 nm.

8. The TFET device of claim 1 , the difference between the second length and the first length (dL) having a value of about 1 nm to about 10 nm.

9. The TFET device of claim 8 , the TFET having a ratio of drain to source current (I DS ) in an on state to I DS in an off state of between about 10 4 to about 10 7 .

10. The TFET device of claim 9 , the TFET I DS current in the on state for a supply voltage applied to the drain region of about 0.2 V, and I DS in the off state of about 10 −4 μA/μm, a dL of about 3 nm is between about 1 μA/μm to about 50 μA/μm.

Assignees

• Purdue Research Foundation

Inventors

• Ilatikhameneh Hesameddin
• Beshari Tarek Ameen
• Novakovic Bozidar
• Klimeck Gerhard
• Rahman Rajib

Classifications

• H01L29/7391 Primary

  Electricity · mapped topic

• H01L29/0847

  Electricity · mapped topic

• H01L29/1033

  Electricity · mapped topic

• H01L29/267

  Electricity · mapped topic

• H10D64/311

  Gate electrodes for field-effect devices · CPC title