Thin film transistor and array substrate thereof each having doped oxidized or doped graphene active region and oxidized graphene gate insulating layer and producing method thereof

Patent metadata

Field	Value
Publication number	US-10141409-B2
Application number	US-201615507878-A
Country	US
Kind code	B2
Filing date	Mar 24, 2016
Priority date	Sep 21, 2015
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A thin film transistor and a producing method thereof, and an array substrate, which belong to a technical field of the thin film transistor, can solve a problem of poor performance of a conventional thin film transistor. The producing method of the thin film transistor comprises: S 1 : forming a gate electrode ( 11 ) composed of graphene; S 2 : forming a gate insulating layer ( 12 ) composed of oxidized graphene; S 3 : forming an active region ( 13 ) composed of doped oxidized graphene or doped graphene; S 4 : forming a source electrode ( 14 ) and a drain electrode ( 15 ) composed of graphene, wherein, the graphene composing the source electrode ( 14 ), the drain electrode ( 15 ) and the gate electrode ( 11 ) is formed by reducing oxidized graphene, and the doped oxidized graphene or doped graphene composing the active region ( 13 ) is formed by treating oxidized graphene.

First claim

The invention claimed is:

1. A thin film transistor, comprising: a source electrode, a drain electrode, a gate electrode; an active region and a gate insulating layer, wherein, the source electrode, the drain electrode and the gate electrode are composed of graphene, the active region is composed of doped oxidized graphene, the gate insulating layer is composed of oxidized graphene,
and wherein, the graphene composing the source electrode, the drain electrode and the gate electrode is formed by reducing oxidized graphene, and the doped oxidized graphene composing the active region is formed by treating oxidized graphene.

2. The thin film transistor according to claim 1 , wherein,
doped oxidized graphene composing the active region is formed by doping oxidized graphene.

3. The thin film transistor according to claim 1 , wherein,
doped graphene composing the active region is formed by reducing oxidized graphene, and then doping the same.

4. The thin film transistor according to claim 1 , wherein, the source electrode and the drain electrode have a thickness in a range of 1 nm to 100 nm, and/or, the gate electrode has a thickness in a range of 1 nm to 100 nm, and/or, the active region has a thickness in a range of 1 nm to 100 nm, and/or, the gate insulating layer has a thickness in a range of 30 nm to 300 nm.

5. An array substrate, comprising:
the thin film transistor according to claim 1 .

6. The array substrate according to claim 5 , further comprising:
a pixel electrode, disposed in a same layer as the source electrode and the drain electrode; and/or
a common electrode, disposed in a same layer as the gate electrode.

7. A producing method of a thin film transistor, comprising steps of:
forming a gate electrode composed of graphene;
forming a gate insulating layer composed of oxidized graphene;
forming an active region composed of doped oxidized graphene or doped graphene;
forming a source electrode and a drain electrode composed of graphene,
wherein, the graphene composing the source electrode, the drain electrode and the gate electrode is formed by reducing oxidized graphene, and
the doped oxidized graphene composing the active region is formed by a first treating of oxidized graphene, or the doped graphene composing the active region is formed by a second treating of oxidized graphene,
wherein, the first treating of oxidized graphene is different from the second treating of oxidized graphene.

8. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming a gate electrode composed of graphene includes:
forming a first oxidized graphene material layer;
reducing the first oxidized graphene material layer to obtain a first graphene material layer, patterning the first graphene material layer to form the gate electrode; or patterning the first oxidized graphene material layer, and reducing the patterned first oxidized graphene material layer, to form the gate electrode.

9. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming a gate insulating layer composed of oxidized graphene includes:
forming a second oxidized graphene material layer, and taking the second oxidized graphene material layer as the gate insulating layer.

10. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming an active region composed of doped oxidized graphene includes:
forming a third oxidized graphene material layer;
doping the third oxidized graphene material layer, to obtain a doped oxidized graphene material layer, patterning the doped oxidized graphene material layer to form the active region; or patterning the third oxidized graphene material layer, and doping the patterned third oxidized graphene material layer, to form the active region.

11. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming an active region composed of doped graphene includes:
forming a third oxidized graphene material layer;
reducing the third oxidized graphene material layer, and then doping the same, to obtain the doped graphene material layer, patterning the doped graphene material layer, to form the active region; or patterning the third oxidized graphene material layer, reducing the patterned third oxidized graphene material layer, and then doping the same, to form the active region.

12. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming an active region composed of doped oxidized graphene includes:
forming a third oxidized graphene material layer;
forming a photoresist layer on the third oxidized graphene material layer, the photoresist layer including polymethyl methacrylate, heating to 50° C. to 100° C. so that polymethyl methacrylate penetrates into the third oxidized graphene material layer, and the third oxidized graphene material layer become a doped oxidized graphene material layer;
patterning the doped oxidized graphene material layer by a photolithography process, to form the active region.

13. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming an active region composed of doped graphene includes:
forming a third oxidized graphene material layer;
reducing the third oxidized graphene material layer, to obtain a second graphene material layer, and then forming a photoresist layer on the second graphene material layer, the photoresist layer including polymethyl methacrylate, heating to 50° C. to 100° C. so that polymethyl methacrylate penetrates into the second graphene material layer, and the second graphene material layer become a doped graphene material layer;
patterning the doped graphene material layer by a photolithography process, to form the active region.

14. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming a source electrode and a drain electrode composed of graphene includes:
forming a fourth oxidized graphene material layer;
reducing the fourth oxidized graphene material layer to obtain a third graphene material layer; patterning the third graphene material layer to form the source electrode and the drain electrode; or, patterning the fourth oxidized graphene material layer, and reducing the patterned fourth oxidized graphene material layer to form the source electrode and the drain electrode.

15. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming a gate insulating layer composed of oxidized graphene and the step of forming an active region composed of doped oxidized graphene include:
forming a fifth oxidized graphene material layer;
performing a treatment including doping and patterning to an upper layer portion of the fifth oxidized graphene material layer, to obtain the active region composed of doped oxidized graphene;
a portion of the fifth oxidized graphene material layer without being performed the treatment composes the gate insulating layer.

16. The producing method of the thin film transistor according to claim 7 , wherein, the step of forming a gate insulating layer composed of oxidized graphene and the step of forming an active region composed of doped graphene include:
forming a fifth oxidized graphene material layer;
performing a treatment including reducing, doping and patterning to an upper layer portion of the fifth oxidized graphene material layer, to obtain the active region composed of doped graphene;
a portion of the fifth oxidized graphene material layer without being performed

Assignees

• Boe Technology Group Co Ltd

Inventors

• Zhang Dacheng
• Hou Dianjie
• Dong Wenchu

Classifications

• H10P95/92

  Formation of n- or p-type semiconductors, e.g. doping of graphene · CPC title

• H10P10/00

  Bonding of wafers, substrates or parts of devices · CPC title

• H10D64/011

  of electrodes ohmically coupled to a semiconductor · CPC title

• H01L21/34

  Electricity · mapped topic

• H01L29/778

  Electricity · mapped topic