Magnetron having enhanced cooling characteristics

Patent metadata

Field	Value
Publication number	US-10141153-B2
Application number	US-201615271451-A
Country	US
Kind code	B2
Filing date	Sep 21, 2016
Priority date	Sep 22, 2015
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

Embodiments of the present disclosure generally provide magnetron configurations that provide more efficient and/or more uniform cooling characteristics and methods for forming the magnetrons. The magnetron includes one or more flow directing structures disposed between parallel cooling fins. The flow directing structures direct air flow across various surfaces of the cooling fins that otherwise would be obstructed by magnetron components, reducing the incidence and/or magnitude of hot spots on the cooling fins and/or on other magnetron components. The flow directing structures also adjust flow rates to improve cooling efficiency.

First claim

We claim:

1. A cooling assembly, comprising:
a plurality of cooling fins, each cooling fin having a central opening; and
one or more flow directing structures formed between neighboring cooling fins, wherein the one or more flow directing structures form a flow channel between the neighboring cooling fins, wherein each flow directing structure intersects two or more cooling fins, wherein the one or more flow directing structures comprises channel walls that are contiguous from a front edge of the cooling fin to an air restriction facing a rear edge of the cooling fin, and wherein the channel walls define the flow channel that expands in a cone-shape from the air restriction adjacent the rear edge to the front edge.

2. The cooling assembly of claim 1 , wherein the channel walls are perpendicular to the cooling fins.

3. The cooling assembly of claim 1 , wherein at least a portion of the channel walls converge towards and wrap around the central opening, wherein the portion of the channel walls that converge toward and wrap around the central opening is separated from the central opening.

4. The cooling assembly of claim 1 , wherein the plurality of cooling fins and the flow directing structures are formed into a monolithic body.

5. A magnetron, comprising: a core; a plurality of cooling fins surrounding the core, each cooling fin having a central opening; and one or more flow directing structures formed between neighboring cooling fins, wherein the one or more flow directing structures form a flow channel between the neighboring cooling fins, wherein each flow directing structure intersects two or more cooling fins, wherein the one or more flow directing structures comprise channel walls that are contiguous from a front edge of the cooling fin to an air restriction facing a rear edge of the cooling fin, and wherein the channel walls define the flow channel that expands in a cone-shape from the air restriction adjacent the rear edge to the front edge.

6. The magnetron of claim 5 , wherein the channel walls are substantially perpendicular to at least a portion of the cooling fins.

7. The magnetron of claim 5 , wherein the channel walls form a substantially flat surface proximate to the front edge of the cooling fins and form a curved surface proximate to the rear edge of the cooling fins.

8. The magnetron of claim 5 , wherein the cooling fins and the one or more flow directing structure are formed from at least one of copper, aluminum, or combinations thereof.

9. The magnetron of claim 5 , wherein the core, the cooling fins, and the one or more flow directing structures are formed to a monolithic body.

10. The magnetron of claim 5 , wherein the plurality of cooling fins are parallel to each other.

11. The magnetron of claim 5 , wherein a thickness of at least one cooling fin included in the plurality of cooling fins is about 1 millimeter or less.

12. The magnetron of claim 5 , wherein a thickness of at least one cooling fin included in the plurality of cooling fins is about 0.5 millimeters to about 1 millimeter.

13. The magnetron of claim 5 , further comprising a plurality of core cooling fins coupled to the core and between neighboring cooling fins.

14. The magnetron of claim 5 , wherein the one or more flow directing structure further comprises: two or more head channel walls disposed near a front edge of the cooling fin and in between the channel walls.

15. A method for forming a magnetron, comprising: forming a monolithic body comprising a core and a plurality of cooling fins attached to the core, each cooling fin having a central opening; and forming one or more flow directing features connected between the two or more cooling fins, wherein each flow directing structure intersects two or more cooling fins, wherein the one or more flow directing structures comprise channel walls that are contiguous from a front edge of the cooling fin to an air restriction facing a rear edge of the cooling fin, and wherein the channel walls define the flow channel that expands in a cone-shape from the air restriction adjacent the rear edge to the front edge.

16. The method of claim 15 , wherein the one or more flow directing structures form a flow channel between the neighboring cooling fins.

17. The method of claim 15 , wherein the monolithic body is formed from one of copper, aluminum, or combinations thereof.

Assignees

• Applied Materials Inc

Inventors

• Raj Govinda
• Yavelberg Simon
• Sankarakrishnan Ramprakash

Classifications

• H01J25/50

  Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field (with travelling wave not moving completely around the electron space H01J25/42; functioning with plural reflection or with reversed cyclotron action H01J25/62, H01J25/64) · CPC title

• B22F10/28

  Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM] · CPC title

• B33Y80/00

  Products made by additive manufacturing · CPC title

• B22F5/10

  of articles with cavities or holes, not otherwise provided for in the preceding subgroups · CPC title

• H01J23/005 Primary

  Cooling methods or arrangements (H01J23/033 takes precedence) · CPC title