Method for microwave processing of photosensitive polyimides

Patent metadata

Field	Value
Publication number	US-10139728-B2
Application number	US-201615375773-A
Country	US
Kind code	B2
Filing date	Dec 12, 2016
Priority date	Jan 13, 2014
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A method for curing photosensitive polyimide (PSPI) films includes the steps of: depositing a PSPI film on a selected substrate, and curing the film by microwave heating at a selected temperature from about 200 to 340° C. in a selected atmosphere containing an oxygen concentration from about 20 to 200,000 ppm. The process atmosphere may be static or flowing. The addition of oxygen improves the removal of acrylate residue and improves the T g of the cured film, while the low processing temperature characteristic of the microwave process prevents the oxygen from damaging the polyimide backbone. The method may further include the steps of photopatterning and developing the PSPI film prior to curing. The process is particularly suitable for dielectric films on silicon for electronic applications.

First claim

The invention claimed is:

1. A method for curing photopolymer films, comprising:
depositing a photopolymer film on a substrate;
supplying a known amount of oxygen gas (O 2 ) or adjusting a pressure to provide a selected atmosphere containing an oxygen concentration in a range from about 20 to 200,000 ppm; and
curing the photopolymer film by microwave heating for a selected time in the selected atmosphere.

2. The method of claim 1 , wherein the photopolymer is a photosensitive polyimide (PSPI).

3. The method of claim 2 , wherein the PSPI comprises a polyamic acid (PAA) precursor resin modified with a photosensitive methacrylate alcohol to form a photosensitive polyamic ester (PAE).

4. The method of claim 3 , wherein the photosensitive methacrylate alcohol comprises one or more compositions in the methacrylate family (R—CH 2 CH 2 OC(O)CH═C(CH 3 ) 2 ) of monomers and oligomers, where R indicates any selected organic moiety attached at the indicated position.

5. The method of claim 1 , wherein the selected time is from about 60 to about 180 minutes.

6. The method of claim 1 , wherein the selected atmosphere contains an oxygen concentration in the range from about 200 to 200,000 ppm.

7. The method of claim 1 , wherein the photopolymer is a polybenzoxazole (PBO).

8. A method for curing photopolymer films, comprising:
depositing a photopolymer film on a substrate;
photopatterning the photopolymer film;
developing the photopatterned photopolymer film; and
curing the developed photopolymer film by microwave heating for a selected time in a selected atmosphere containing an oxygen concentration from about 20 to 200,000 ppm, wherein the oxygen concentration is maintained by at least one of supplying a known amount of oxygen gas to the atmosphere or adjusting the pressure of the atmosphere.

9. The method of claim 8 , wherein the photopolymer is a photosensitive polyimide (PSPI).

10. The method of claim 9 , wherein the PSPI comprises a polyamic acid (PAA) precursor resin modified with a photosensitive methacrylate alcohol to form a photosensitive polyamic ester (PAE).

11. The method of claim 10 , wherein the methacrylate alcohol comprises one or more compositions in the methacrylate family (R—CH 2 CH 2 OC(O)CH═C(CH 3 ) 2 ) of monomers and oligomers, where R indicates any selected organic moiety attached at the indicated position.

12. The method of claim 8 , wherein the selected time is from about 60 to about 180 minutes.

13. The method of claim 8 , wherein the selected atmosphere contains an oxygen concentration in the range from about 200 to 200,000 ppm.

14. The method of claim 8 , wherein the photopolymer is a polybenzoxazole (PBO).

Assignees

• Applied Materials Inc

Inventors

• Hubbard Robert L
• Ahmad Iftikhar

Classifications

• H10P50/28

  of insulating materials · CPC title

• H10P14/6529

  by exposure to a gas or vapour · CPC title

• H10P14/683

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title

• G03F7/0387 Primary

  Polyamides or polyimides · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title