Multiple-stack wire grid polarizer

Patent metadata

Field	Value
Publication number	US-10139537-B2
Application number	US-201715715407-A
Country	US
Kind code	B2
Filing date	Sep 26, 2017
Priority date	Nov 22, 2016
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A wire grid polarizer (WGP) can have improved performance due to a high aspect ratio (e.g. >3, >5, >10, >15, >20, or >30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array 11 plus a thickness of wires of the second array 12 (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array 11 and/or of the second array 12. Such high aspect ratio can be achieved with two arrays of wires 11 and 12, each capped by a thin film 01 and 02.

First claim

What is claimed is:

1. A wire grid polarizer (WGP) comprising:
a substrate having a first side, having a second side opposite of the first side, and being transparent;
a first array of wires, defining a first array, located over the first side of the substrate with a proximal end closer to the substrate and a distal end farther from the substrate, the first array being parallel and elongated, with channels between adjacent wires;
a first thin film located at the distal end of the first array and being transparent;
a second array of wires, defining a second array, located over the first thin film with a proximal end closer to the first thin film and a distal end farther from the first thin film, the second array being parallel and elongated, with channels between adjacent wires;
a second thin film located at the distal end of the second array and being transparent; and
an aspect ratio being greater than 5, where aspect ratio=T/W, T is a sum of a thickness of wires of the first array plus a thickness of wires of the second array, and W is a maximum width of wires of the first array and of the second array.

2. The WGP of claim 1 , wherein the channels are adjacent to the wires and the channels are air filled.

3. The WGP of claim 1 , wherein the aspect ratio is greater than 10.

4. The WGP of claim 1 , wherein the aspect ratio is greater than 20.

5. The WGP of claim 1 , wherein:
each wire of the first array comprises a first absorptive rib and a first reflective rib, the first absorptive rib being sandwiched between the first reflective rib and the substrate; and
each wire of the second array comprises a second absorptive rib and a second reflective rib, the second reflective rib being sandwiched between the second absorptive rib and the second thin film.

6. The WGP of claim 5 , wherein the WGP, in a light wavelength range of 450 nm through 700 nm, is capable of absorbing at least 80% of one polarization of light from both sides of the WGP and transmitting at least 80% of an opposite polarization of light.

7. The WGP of claim 1 , wherein:
each wire of the first array comprises a stack of ribs in the following order extending outward from the substrate towards the first thin film: a first transparent rib, a second transparent rib, and a first reflective rib;
a material composition of the first transparent rib is different from a material composition of the second transparent rib;
each wire of the second array comprises a stack of ribs in the following order extending outward from the first thin film towards the second thin film: a second reflective rib, a third transparent rib, and a fourth transparent rib; and
a material composition of the fourth transparent rib is different from a material composition of the third transparent rib.

8. The WGP of claim 7 , wherein for a wavelength range of at least 100 nm in a visible spectrum of light an index of refraction of the first transparent rib (n1) is greater than an index of refraction of the second transparent rib (n2) and an index of refraction of the fourth transparent rib (n4) is greater than an index of refraction of the third transparent rib (n3).

9. The WGP of claim 7 , wherein:
a material composition of the first transparent rib is the same as a material composition of the fourth transparent rib; and
a material composition of the second transparent rib is the same as a material composition of the third transparent rib.

10. The WGP of claim 7 , wherein for a wavelength range of at least 100 nm in a visible spectrum of light, a percent reflection of one polarization of incident light on the first side of the substrate (Rs 1 ) is greater than 93% and a percent reflection of one polarization of incident light on the second side of the substrate (Rs 2 ) is greater than 93%.

11. The WGP of claim 1 , wherein:
the first thin film extends across the first array unbroken by any boundary layer extending parallel to the first array; and
the second thin film extends across the second array unbroken by any boundary layer extending parallel to the second array.

12. The WGP of claim 1 , further comprising
a first conformal coating over the first array, coating sides of wires of the first array, distal ends of wires of the first array between the first array and the first thin film, and an exposed surface of the first side of the substrate; and
a second conformal coating over the second array, coating sides of wires of the second array, distal ends of wires of the second array between the second array and the second thin film, and an exposed surface of the first thin film.

13. The WGP of claim 1 , wherein material of the first array and of the second array is reflective.

Assignees

• Moxtek Inc

Inventors

• Nielson R Stewart
• Ogden Shaun
• Free Matt
• Wang Bin
• Li Hua
• Bowers Brian

Classifications

• G02B1/14

  Protective coatings, e.g. hard coatings · CPC title

• G02B5/3058 Primary

  comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title

• G02B27/283

  used for beam splitting or combining · CPC title

• G02B5/045

  Prism arrays · CPC title

• G02B5/3075

  for use in the UV (G02B5/3066 takes precedence) · CPC title