In-situ thin film based temperature sensing for high temperature uniformity and high rate of temperature change thermal reference sources

Patent metadata

Field	Value
Publication number	US-10139287-B2
Application number	US-201514884459-A
Country	US
Kind code	B2
Filing date	Oct 15, 2015
Priority date	Oct 15, 2015
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A thin-film device for generating a blackbody spectrum is disclosed. The device includes first layer configured to generate heat in response to an applied voltage and a second layer configured to generate the blackbody radiation spectrum in response to the heat from the first layer. A thermocouple is disposed between the first layer and the second layer for measuring a temperature at the second layer. The thermocouple measures temperature at the second layer in order to control temperature at the second layer. The thermocouple can be a copper-carbon nanotube thermocouple.

First claim

What is claimed is:

1. A thin-film device for generating a blackbody spectrum, comprising:
a first carbon nanotube layer configured to generate heat in response to an applied voltage;
a second carbon nanotube layer configured to generate the blackbody radiation spectrum in response to the heat from the first carbon nanotube layer; and
a thermocouple between the first carbon nanotube layer and the second carbon nanotube layer for measuring a temperature at the second carbon nanotube layer.

2. The thin-film device of claim 1 , wherein the thermocouple further comprises a copper-carbon nanotube thermocouple layer.

3. The thin-film device of claim 2 , wherein the copper-carbon nanotube thermocouple layer includes a carbon nanotube material having a main body proximate the second carbon nanotube layer and a carbon nanotube tail and a copper electrode having a junction end affixed to the main body of the carbon nanotube material and a contact end distal from the main body of the carbon nanotube material.

4. The thin-film device of claim 3 , wherein the copper electrode further comprises a plurality of copper electrodes, wherein each copper electrode includes a junction end affixed to the main body of the carbon nanotube material and a contact end distal from the main body of the carbon nanotube material, wherein the thermocouples measure temperatures at various locations of the second carbon nanotube layer.

5. The thin-film device of claim 1 , wherein the thermocouple layer includes a strip of alumel deposited on the second carbon nanotube layer and a strip of chromel deposited on the second carbon nanotube layer and one end of the strip of alumel is in contact one end of the strip of chromel.

6. The thin-film device of claim 1 , wherein the thermocouple produces a local variation of the temperature at the second carbon nanotube layer of less than about +−0.5 kelvin.

7. The thin-film device of claim 1 , further comprising a thermal spreading layer between the first carbon nanotube layer and the second carbon nanotube layer, wherein the thermocouple is between the thermal spreading layer and the second carbon nanotube layer.

8. The thin-film device of claim 1 , further comprising a voltmeter for measuring a voltage difference across the thermocouple to determine the temperature at the second carbon nanotube layer and a controller configured to control a current through the first carbon nanotube layer in response to the determined temperature.

9. The thin-film device of claim 1 , wherein the thermocouple allows transverse temperature uniformity at the second carbon nanotube layer.

Assignees

• Raytheon Co

Inventors

• Chow James R
• Townsend Carl W
• Ketola Kurt S

Classifications

• G01K7/021

  Particular circuit arrangements (G01K7/026, G01K7/12, G01K7/14 take precedence) · CPC title

• G01K7/02 Primary

  using thermoelectric elements, e.g. thermocouples · CPC title

• G01K15/005

  Calibration · CPC title

• G01J5/522

  Physics · mapped topic

• G01J5/53

  Reference sources, e.g. standard lamps; Black bodies · CPC title