Stripping device and display substrate production line

Patent metadata

Field	Value
Publication number	US-10137482-B2
Application number	US-201615506301-A
Country	US
Kind code	B2
Filing date	Feb 19, 2016
Priority date	Sep 18, 2015
Publication date	Nov 27, 2018
Grant date	Nov 27, 2018

Abstract

A stripping device and a display substrate production line are provided. The stripping device comprises a stripping chamber. A stripping liquid with a set temperature is provided within the stripping chamber; the stripping device further comprising a liquid jet component, the liquid jet component includes a liquid supplying pipeline and a liquid jet head, the liquid supplying pipeline is configured to supply a cleaning liquid to the liquid jet head, the liquid jet head is configured to output the cleaning liquid, the liquid supplying pipeline is arranged in the stripping chamber, and the stripping liquid enables the cleaning liquid in the liquid supplying pipeline to reach the set temperature. The stripping device enables the cleaning liquid to reach the set temperature, such that the stripping liquid and the photoresist remaining on the display substrate are effectively removed, the stripping liquid is prevented from being separated out on the display substrate and is further prevented from being crystallized to block an output port of the liquid jet head; and the stripping device further effectively uses the thermal energy in the stripping chamber to save energy consumption.

First claim

The invention claimed is:

1. A stripping device, comprising a stripping chamber and a cleaning chamber, wherein,
a stripping liquid having a set temperature is provided within the stripping chamber,
the stripping device further comprises a liquid jet component, the liquid jet component comprises a liquid supplying pipeline and a liquid jet head, the liquid supplying pipeline is configured to supply a cleaning liquid to the liquid jet head, the liquid jet head is configured to output the cleaning liquid, the liquid supplying pipeline is arranged in the stripping chamber, and the stripping liquid heats the cleaning liquid in the liquid supplying pipeline as the cleaning liquid flows through the liquid supplying pipeline arranged in the stripping chamber,
the cleaning chamber is provided outside of, and communicated with, the stripping chamber, and
in a direction from the stripping chamber to the cleaning chamber, the liquid supplying pipeline continuously extends from a first end of the stripping chamber to a second end, which is connected with the cleaning chamber and opposite to the first end, of the stripping chamber without disconnecting at a center portion of the stripping chamber.

2. The stripping device according to claim 1 , wherein a sprayer is arranged in the stripping chamber and is configured to spray the stripping liquid having the set temperature.

3. The stripping device according to claim 1 , wherein the stripping chamber includes a plurality of sub-stripping chambers, the plurality of sub-stripping chambers are mutually communicated to form the stripping chamber, and the liquid supplying pipeline is continuously arranged in the plurality of sub-stripping chambers.

4. The stripping device according to claim 1 , wherein the liquid supplying pipeline includes two or more sub-pipelines, which are parallel with one another and are connected end to end in sequence.

5. The stripping device according to claim 1 , wherein the liquid supplying pipeline is zigzagged in a continuous S-shaped curve.

6. The stripping device according to claim 1 , wherein the liquid supplying pipeline is arranged in a spiral curve.

7. The stripping device according to claim 1 , wherein the liquid supplying pipeline is paved at a bottom of the stripping chamber.

8. The stripping device according to claim 1 , wherein the liquid supplying pipeline is suspended on a side wall of the stripping chamber.

9. The stripping device according to claim 1 , wherein the liquid jet head is located outside the stripping chamber and the liquid jet head is connected to an end part of one end of the liquid supplying pipeline.

10. The stripping device according to claim 9 , wherein the liquid jet component further includes a supplying source for supplying the cleaning liquid, and wherein an end part of the other end of the liquid supplying pipeline is connected to the supplying source.

11. The stripping device according to claim 10 , wherein the supplying source includes a liquid supplying tank for containing the cleaning liquid and a pressure pump for inputting the cleaning liquid in the liquid supplying tank into the liquid supplying pipeline.

12. The stripping device according to claim 11 , wherein a pressure output from the pressure pump is in direct proportion to a flow rate of the cleaning liquid in the liquid supplying pipeline, and wherein the pressure output from the pressure pump is adjustable.

13. The stripping device according to claim 1 , wherein the liquid jet head is provided in the cleaning chamber.

14. The stripping device according to claim 13 , wherein the cleaning chamber further includes a plurality of sprayers for spraying the cleaning liquid, and wherein the plurality of sprayers are different from the liquid jet head.

15. A display substrate production line, comprising the stripping device according to claim 1 .

Assignees

• Boe Technology Group Co Ltd
• Hefei Boe Optoelectronics Tech

Inventors

• Zhang Fan
• Hu Wei
• Chen Xianhao
• Liu Jianzhao
• Wang Jianwei
• Liu Zuhong
• Oh Daeoh

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title

• B08B3/02

  Cleaning by the force of jets or sprays · CPC title

• H01L21/6708

  Electricity · mapped topic

• G03F7/421

  using biological means only, e.g. enzymes · CPC title