Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US10137471B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10137471-B2 |
| Application number | US-201715658586-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 25, 2017 |
| Priority date | Jul 27, 2016 |
| Publication date | Nov 27, 2018 |
| Grant date | Nov 27, 2018 |
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Systems useful for reinforcing a support mat over at least one seam formed between upper and lower panels of the mat include at least one extruder configured to apply weld-forming material over the seam(s) to form at least one weld atop the seam(s) and at least one electronic controller associated with the extruder.
Opening claim text (preview).
The invention claimed is: 1. A system useful for reinforcing a support mat over at least one seam formed between upper and lower panels of the mat, the upper and lower panels having similar or dissimilar shapes and dimensions, the system comprising: at least one extruder configured to apply weld-forming material over the at least one seam to form at least one weld atop the at least one seam; at least one electronic controller associated with said at least one extruder and configured to control and vary the rate and/or quantity of output of weld-forming material from said at least one extruder; at least one measuring instrument electronically coupled to said at least one electronic controller, said at least one measuring instrument being configured to emit a series of reflective signals onto the mat, retrieve at least some of the reflective signals and communicate data relating thereto to said at least one electronic controller; and at least one force sensor associated with said at least one extruder and electronically coupled to said at least one electronic controller, said at least one force sensor being configured to measure one or more forces placed upon, or caused by, said at least one extruder during use of the system and communicate data relating thereto to said at least one electronic controller, whereby said at least one electronic controller is configured to determine whether corrective adjustments need to be made to the rate and/or quantity of output of weld-forming material from said at least one extruder based at least partially upon data received from said at least one measuring instrument and/or said at least one force sensor and, if so, determine the desired corrective adjustment(s) and cause such corrective adjustment(s) to be made to the rate and/or quantity of output of weld-forming material from said at least one extruder. 2. The system of claim 1 wherein said at least one extruder is configured to be stationary relative to the mat and the mat is moveable relative to said at least one extruder during use of the system. 3. The system of claim 1 wherein said at least one extruder is configured to move relative to the mat while applying weld-forming material thereto. 4. The system of claim 1 wherein said at least one extruder is electronically-controlled and configured to apply weld-forming material over the at least one seam under pressure without human intervention or operator involvement. 5. The system of claim 1 wherein said at least one electronic controller is a programmable logic controller. 6. The system of claim 1 wherein said at least one extruder includes at least one nozzle configured to be positioned closest to the mat during use of the system, said at least one nozzle being constructed at least partially of Teflon. 7. The system of claim 1 wherein the path of the at least one seam of the mat includes at least one corner, further wherein said at least one electronic controller is configured to cause said at least one extruder to apply the weld-forming material in one or more continuous, uninterrupted streams over the at least one corner of the at least one seam. 8. The system of claim 1 wherein said at least one measuring instrument is a laser unit. 9. The system of claim 1 wherein said at least one measuring instrument uses at least one among radar, sonar, optical and whisker switch proximity technology. 10. The system of claim 1 wherein at least one said measuring instrument is configured to emit at least one reflective signal onto the mat behind said at least one extruder to measure the geometry of the weld-forming material applied to the mat by said at least one extruder. 11. The system of claim 1 wherein at least one said measuring instrument is configured to emit at least one reflective signal onto at least one surface of the upper panel of the mat adjacent to the at least one seam and forward of said at least one extruder to measure the distance between said at least one extruder and the upper panel, further wherein said at least one electronic controller is configured to vary the position of said at least one extruder relative to the mat and/or the rate and/or quantity of output of weld-forming material from said at least one extruder based at least partially upon measurements received from said at least one measuring instrument. 12. The system of claim 1 wherein at least one said measuring instrument is configured to emit at least one reflective signal onto at least one surface of the lower panel of the mat adjacent to the at least one seam and forward of said at least one extruder to measure the distance between said at least one extruder and the lower panel, further wherein said at least one electronic controller is configured to vary the position of said at least one extruder relative to the mat and/or the rate and/or quantity of output of weld-forming material from said at least one extruder based at least partially upon measurements received from said at least one measuring instrument. 13. The system of claim 1 wherein said at least one force sensor is configured to measure at least one among back-pressure resistance caused by said at least one extruder and push and pull on said at least one extruder during use of the system. 14. The system of claim 1 further including at least one robot carrying said at least one extruder and being electronically coupled to said at least one electronic controller, said at least one robot being configured to control and vary the rate and/or quantity of output of weld-forming material from said at least one extruder, wherein said at least one electronic controller is configured to direct said at least one robot to make the desired corrective adjustment(s) to the rate and/or quantity of output of weld-forming material from said at least one extruder. 15. A system for reinforcing a support mat over at least one seam formed between upper and lower panels of the mat, the upper and lower panels having similar or dissimilar shapes and dimensions, the system comprising: at least one extruder configured to apply weld-forming material over the at least one seam to form at least one weld atop the at least one seam, each said extruder including at least one screw configured to feed weld-forming material through said at least one extruder to the mat; at least one servo-motor coupled to at least one said screw and configured to selectively apply force to rotate said at least one screw and control the rate said at least one screw feeds weld-forming material through said at least one associated extruder; at least one electronic controller associated with said at least one servo-motor and configured to dictate the amount of force applied to said at least one screw by said at least one servo-motor to control the rate and/or quantity of output of weld-forming material from said at least one extruder; and at least one measuring instrument electronically coupled to said at least one electronic controller, said at least one measuring instrument being configured to emit a series of reflective signals onto the mat, retrieve at least some of the reflective signals and communicate data relating thereto to said at least one electronic controller, wherein said at least one electronic controller is configured to determine whether corrective adjustments need to be made to the rate and/or quantity of output of weld-forming material from said at least one extruder based at least partially upon data received from said at least one measuring instrument and, if so, determine the desired corrective adjustment(s) and cause such corrective adjustment(s) to be made to the rate an
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