Method of performing aging for a process chamber

Patent metadata

Field	Value
Publication number	US-10133264-B2
Application number	US-201514921605-A
Country	US
Kind code	B2
Filing date	Oct 23, 2015
Priority date	Oct 31, 2014
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A method of aging a substrate-processing apparatus according to the inventive concepts may include receiving advance information of a scheduled substrate-receiving container to be loaded on a load port of the substrate-processing apparatus from a host computer, and loading a test substrate into a process chamber to perform an inspection process by means of the advance information.

First claim

What is claimed is:

1. A method of performing aging for a process chamber included in a substrate-processing apparatus, the substrate-processing apparatus including a process substrate carrier configured to receive process substrates, a load port on which the process substrate carrier transported by a distribution automation apparatus is loaded, and a test substrate container configured to receive at least one test substrates, the method comprising:
receiving, by the substrate-processing apparatus, in advance schedule information with regard to the process substrate carrier to be loaded on the load port, from a processor configured to output a transfer control signal for the distribution automation apparatus to transfer the process substrate carrier; and
performing the aging by loading the test substrate into the process chamber to and making a process environment in the process chamber based on the schedule information.

2. The method of claim 1 , wherein the schedule information comprises:
process-related information regarding a process scheduled to be performed in the process chamber for the process substrates provided from the process substrate carrier; and
a time at which the process substrate carrier arrives at the load port.

3. The method of claim 1 , wherein the performing comprises:
making the environment in the process chamber in which the process substrates loaded from the process substrate carrier is processed before the process substrate carrier arrives at the load port.

4. The method of claim 3 , wherein the performing comprises:
adjusting a start time of the performing to set an end time of the performing to an estimated time of arrival of the process substrate carrier in response to the end time of the performing being earlier than the estimated time of arrival of the process substrate carrier.

5. The method of claim 1 , the method further comprising:
determining whether an aging process has been performed or not after the process chamber is shut down for an idle time of the process chamber and before the test substrate is loaded into the shut-down process chamber to perform the aging process.

6. The method of claim 1 , wherein the loading the test substrate includes loading the test substrate into the process chamber in which a first process is completed in response to an idle time of the process chamber in which the first process is completed is greater than a reference value.

Assignees

• Semes Co Ltd

Inventors

• Lim Sung Min

Classifications

• H10P72/0612 Primary

  Production flow monitoring, e.g. for increasing throughput · CPC title

• Y02P90/22

  Cross-Sectional Technologies · mapped topic

• G05B2219/32195

  Feedforward quality control · CPC title

• G05B2219/32177

  Computer assisted quality surveyance, caq · CPC title

• H01L21/67276

  Electricity · mapped topic