Light irradiation apparatus and drawing apparatus

Patent metadata

Field	Value
Publication number	US-10133187-B2
Application number	US-201514725059-A
Country	US
Kind code	B2
Filing date	May 29, 2015
Priority date	May 29, 2015
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A light irradiation apparatus ( 31 ) includes a light source unit ( 40 ) and an irradiation optical system ( 5 ). In the light source unit, light source parts ( 4 ) arrayed in a plane emit laser light toward the irradiation optical system from different directions along the plane, and by the irradiation optical system, the laser light is guided along an optical axis (J 1 ) to an irradiation plane ( 320 ). The irradiation optical system includes a division lens part ( 62 ), an optical path length difference generation part ( 61 ), and a condensing lens part ( 63 ). The division lens part includes element lenses ( 620 ) that divide light incident from the light source parts. The optical path length difference generation part includes transparent parts ( 610 ) having different optical path lengths from each other, and light that has passed through the element lenses respectively enters the transparent parts. The condensing lens part superimposes irradiation regions ( 50 ) of the light from the transparent parts on each other on the irradiation plane. Accordingly, the irradiation plane can be irradiated with high-intensity light having a uniform intensity distribution.

First claim

The invention claimed is:

1. A light irradiation apparatus comprising:
a light source unit including a plurality of light source parts arrayed in a plane and in which said plurality of light source parts emit laser light toward a predetermined position from different directions along said plane; and
an irradiation optical system disposed at said predetermined position and for guiding the laser light emitted from said light source unit along an optical axis to an irradiation plane,
said irradiation optical system including:
a division lens part including a plurality of lenses arrayed in an array direction that is perpendicular to said optical axis and along said plane, and for dividing light incident from said plurality of light source parts by said plurality of lenses, wherein light emitted from each of said plurality of light source parts enters each of said plurality of lenses;
an optical path length difference generation part including a plurality of transparent parts that are arrayed in said array direction and have different optical path lengths from each other, and in which a plurality of light fluxes that have passed through said plurality of lenses are incident respectively on said plurality of transparent parts, wherein each of said plurality of transparent parts has an entrance surface and an exit surface which are perpendicular to said optical axis; and
a condensing lens part disposed closer to said irradiation plane on a path of said laser light than said optical path length difference generation part is, and for superimposing irradiation regions of said plurality of light fluxes from said plurality of transparent parts on each other on said irradiation plane, wherein
images of a plurality of light sources included in said plurality of light source parts are formed in the vicinity of an exit surface of each of said plurality of lenses and said images are arranged in said array direction,
said plurality of light fluxes from said plurality of lenses enter said plurality of transparent parts while diverging in said array direction, and
said division lens part and said optical path length difference generation part are disposed sufficiently close to each other that, with respect to said array direction of said plurality of transparent parts, a width of light flux emitted from said exit surface of each of said plurality of transparent parts is smaller than a pitch of said plurality of transparent parts.

2. A drawing apparatus comprising:
the light irradiation apparatus according to claim 1 ;
a spatial light modulator disposed in said irradiation plane in said light irradiation apparatus;
a projection optical system for guiding light spatially modulated by said spatial light modulator onto an object;
a movement mechanism for moving an irradiation position of said spatially modulated light on said object; and
a control part for controlling said spatial light modulator in synchronization with the movement of said irradiation position caused by said movement mechanism.

3. The light irradiation apparatus according to claim 1 , wherein
a condition expressed by the following Expression 1 is satisfied:
w s ≤p′

where
w s =w h +2( d s ·tan θ d +t s ·tan θ′ d ), and

p′=p− 2 p o   (Expression 1),

where w s is a width in said array direction of light flux on said exit surface of a transparent part that has a largest length in a direction of said optical axis among said plurality of transparent parts,
p′ is a width in said array direction of an effective region of said exit surface of each of said plurality of transparent parts,
w h is a width in said array direction of light flux on said exit surface of each of said plurality of lenses,
d s is a width of a space between said exit surface of each of said plurality of lenses and said entrance surface of each of said plurality of transparent parts,
t s is a length of said transparent part that has said largest length in said direction of said optical axis among said plurality of transparent parts,
θ d is a half angle of divergence of light that passes through a light condensing point on said exit surface of each of said plurality of lenses,
θ′ d is a half angle of divergence of said light inside said optical path length difference generation part,
p is said pitch, and
p o is a width in said array direction of a non-effective region which is present at, and in the vicinity of, each edge of said exit surface of each of said plurality of transparent parts.

Assignees

• Screen Holdings Co Ltd

Inventors

• Furuya Yoshio
• Kokubo Masahiko
• Kitamura Fujikazu
• Sasada Masaki

Classifications

• G03F7/70191 Primary

  Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like · CPC title

• G03F7/70291

  Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices · CPC title

• G03F7/70075 Primary

  Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection · CPC title

• G03F7/7005

  by multiple sources, e.g. light-emitting diodes [LED] or light source arrays (addressable array sources specially adapted to produce patterns without a mask G03F7/70391) · CPC title

• G02B19/0047

  for use with a light source (G02B19/009, G02B19/0095 take precedence; details of lighting devices in general F21V; non-semiconductor lasers having optical devices external to the laser cavity H01S3/005) · CPC title