Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US10133175B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10133175-B2 |
| Application number | US-201615209870-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 14, 2016 |
| Priority date | Feb 20, 2014 |
| Publication date | Nov 20, 2018 |
| Grant date | Nov 20, 2018 |
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Provided are a photosensitive resin composition from which a cured product having a thin film thickness, excellent light-shielding properties, and a high surface hardness is obtained; as well as a cured product obtained by curing the photosensitive resin composition, a cured film and a method for producing the same, a method for producing a resin pattern, and a liquid crystal display device, an organic EL display device, an infrared cut filter, or a solid-state imaging device, each having the cured film. The photosensitive resin composition of the present invention includes (Component A) a polymer having a constitutional unit containing a group in which an acid group is protected by an acid-decomposable group; (Component B) a photoacid generator; (Component C) a solvent; (Component D) a compound having a crosslinkable group and a molecular weight in the range of 100 to 2,000; and (Component S) titanium black.
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What is claimed is: 1. A photosensitive resin composition comprising: (Component A) a polymer having a constitutional unit containing a group in which an acid group is protected by an acid-decomposable group; (Component B) a photoacid generator; (Component C) a solvent; (Component D) a compound having a crosslinkable group and a molecular weight in the range of 100 to 2,000; (Component E) a dispersant; and (Component S) titanium black, wherein Component E comprises a polymer dispersant having an acid group in the side chain. 2. The photosensitive resin composition according to claim 1 , wherein the crosslinkable group is at least one selected from the group consisting of an epoxy group, an oxetanyl group, an alkoxymethyl group, a methylol group, a blocked isocyanate group, and a group having an ethylenically unsaturated bond. 3. The photosensitive resin composition according to claim 1 , wherein the crosslinkable group equivalent in the photosensitive resin composition is 100 to 1,000 per 1 g of organic solid content. 4. The photosensitive resin composition according to claim 1 , wherein the content of Component S is 40 mass % to 80 mass % based on the total solid content of the photosensitive resin composition. 5. The photosensitive resin composition according to claim 1 , wherein the crosslinkable group is at least one selected from the group consisting of an epoxy group, an oxetanyl group, and a (meth)acryloxy group. 6. The photosensitive resin composition according to claim 1 , wherein Component B is an oxime sulfonate compound. 7. A method for producing a cured product, comprising in this order: applying the photosensitive resin composition according to claim 1 onto a substrate; removing a solvent from the applied resin composition; and heat-treating the resin composition freed from the solvent, or irradiating the resin composition freed from the solvent with actinic rays. 8. A method for producing a resin pattern, comprising in this order: applying the photosensitive resin composition according to claim 1 onto a substrate; removing a solvent from the applied resin composition; patternwise exposing the resin composition freed from the solvent to actinic rays; and developing the exposed resin composition and the unexposed resin composition with an aqueous developer. 9. A photosensitive resin composition comprising: (Component A) a polymer having a constitutional unit containing a group in which an acid group is protected by an acid-decomposable group; (Component B) a photoacid generator; (Component C) a solvent; (Component D) a compound having a crosslinkable group and a molecular weight in the range of 100 to 2,000; and (Component S) titanium black, wherein the crosslinkable group equivalent in the photosensitive resin composition is 100 to 550 per 1 g of organic solid content. 10. The photosensitive resin composition according to claim 9 , wherein the crosslinkable group is at least one selected from the group consisting of an epoxy group, an oxetanyl group, an alkoxymethyl group, a methylol group, a blocked isocyanate group, and a group having an ethylenically unsaturated bond. 11. The photosensitive resin composition according to claim 9 , further comprising (Component E) a dispersant. 12. The photosensitive resin composition according to claim 9 , wherein the content of Component S is 40 mass % to 80 mass % based on the total solid content of the photosensitive resin composition. 13. The photosensitive resin composition according to claim 9 , wherein the crosslinkable group is at least one selected from the group consisting of an epoxy group, an oxetanyl group, and a (meth)acryloxy group. 14. The photosensitive resin composition according to claim 9 , wherein Component B is an oxime sulfonate compound. 15. A method for producing a cured product, comprising in this order: applying the photosensitive resin composition according to claim 9 onto a substrate; removing a solvent from the applied resin composition; and heat-treating the resin composition freed from the solvent, or irradiating the resin composition freed from the solvent with actinic rays. 16. A method for producing a resin pattern, comprising in this order: applying the photosensitive resin composition according to claim 9 onto a substrate; removing a solvent from the applied resin composition; patternwise exposing the resin composition freed from the solvent to actinic rays; and developing the exposed resin composition and the unexposed resin composition with an aqueous developer. 17. A photosensitive resin composition comprising: (Component A) a polymer having a constitutional unit containing a group in which an acid group is protected by an acid-decomposable group; (Component B) a photoacid generator; (Component C) a solvent; (Component D) a compound having a crosslinkable group and a molecular weight in the range of 100 to 2,000; and (Component S) titanium black, wherein the average primary particle diameter of Component S is in the range of from 10 nm to 100 nm, and the specific surface area of Component S is from 20 m 2 /g to 100 m 2 /g. 18. The photosensitive resin composition according to claim 17 , wherein the crosslinkable group is at least one selected from the group consisting of an epoxy group, an oxetanyl group, an alkoxymethyl group, a methylol group, a blocked isocyanate group, and a group having an ethylenically unsaturated bond. 19. The photosensitive resin composition according to claim 17 , wherein the crosslinkable group equivalent in the photosensitive resin composition is 100 to 1,000 per 1 g of organic solid content. 20. The photosensitive resin composition according to claim 17 , further comprising (Component E) a dispersant. 21. The photosensitive resin composition according to claim 17 , wherein the content of Component S is 40 mass % to 80 mass % based on the total solid content of the photosensitive resin composition. 22. The photosensitive resin composition according to claim 17 , wherein the crosslinkable group is at least one selected from the group consisting of an epoxy group, an oxetanyl group, and a (meth)acryloxy group. 23. The photosensitive resin composition according to claim 17 , wherein Component B is an oxime sulfonate compound. 24. A method for producing a cured product, comprising in this order: applying the photosensitive resin composition according to claim 17 onto a substrate; removing a solvent from the applied resin composition; and heat-treating the resin composition freed from the solvent, or irradiating the resin composition freed from the solvent with actinic rays. 25. A method for producing a resin pattern, comprising in this order: applying the photosensitive resin composition according to claim 17 onto a substrate; removing a solvent from the applied resin composition; patternwise exposing the resin composition freed from the solvent to actinic rays; and developing the exposed resin composition and the unexposed resin composition with an aqueous developer.
Oxygen · CPC title
reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection · CPC title
Treatment after imagewise removal, e.g. baking · CPC title
containing further carboxylic moieties · CPC title
the macromolecular compound having an alicyclic moiety in a side chain · CPC title
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