Integrated detection device, in particular detector of particles such as particulates or alpha particles

Patent metadata

Field	Value
Publication number	US-10132934-B2
Application number	US-201514748961-A
Country	US
Kind code	B2
Filing date	Jun 24, 2015
Priority date	Sep 17, 2014
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A detection device is formed in a body of semiconductor material having a first face, a second face, and a cavity. A detection area formed in the cavity, and a gas pump is integrated in the body and configured to force movement of gas towards the detection area. A detection system of an optical type or a detector of alpha particles is arranged at least in part in the detection area.

First claim

The invention claimed is:

1. A detection device comprising:
a body of semiconductor material having a first face and a second face;
a cavity comprising a first end and an opposite second end;
a detection area in the cavity;
a concentration area in the cavity, the concentration area being coupled to the detection area, the concentration area comprising a wider cross-sectional footprint than the detection area;
a gas pump integrated in the body and configured to force a movement of gas from the concentration area through the cavity towards the detection area, the gas pump comprising a first grid at the first end and a second grid at the second end; and
a detection system arranged at least in part in the detection area.

2. The detection device according to claim 1 , wherein the gas pump is of an ionic type and comprises an ionization structure arranged on a first side of the detection area and an attracting structure arranged on a second side of the detection area, the ionization structure and the attracting structure configured to ionize gas entering the cavity and force the gas through the detection area.

3. The detection device according to claim 2 , wherein the first grid comprises a conductive grid having tips, and the second grid comprises a biasable conductive grid.

4. The detection device according to claim 1 , wherein the gas pump is of a thermal type and comprises a heating structure arranged on a first side of the detection area and a cooling structure arranged on a second side of the detection area, the heating structure and the cooling structure being configured to generate a temperature difference and gas movement through the detection area.

5. The detection device according to claim 4 , wherein the heating structure comprises a conductive grid configured to generate heat by Joule effect, and the cooling structure comprises a Peltier cell.

6. The detection device according to claim 1 , wherein the cavity is a through cavity and extends between the first and second faces, and the gas pump is configured to generate gas movement through the body.

7. The detection device according to claim 1 , wherein the cavity extends generally parallel to the first face and has inlet and outlet openings on the body, and the gas pump is configured to generate gas movement in a generally parallel direction through the body.

8. The detection device according to claim 1 , wherein the detection system comprises an optical system and comprises a light source configured to generate an optical beam, and a photodetector configured to detect scattered light, the optical system configured to direct the optical beam towards the detection area.

9. The detection device according to claim 8 , wherein the light source comprises a laser source integrated in the body in a first position adjacent to the detection area, and the photodetector is integrated in the body in a second position adjacent to the detection area.

10. The detection device according to claim 9 , wherein the optical system comprises a beam adjustment assembly arranged between the light source and the detection area, the beam adjustment assembly including a plurality of lenses and a hydrophobic support or a variable hydrophobicity support carrying the plurality of lenses.

11. The detection device according to claim 8 , wherein the light source is configured to generate polarized laser light.

12. The detection device according to claim 8 , wherein the light source is configured to generate polarized laser light, and the photodetector comprises a polarization-splitting unit and two pluralities of photoreceiver elements, each plurality of photoreceiver elements configured to detect light having a single respective polarization.

13. The detection device according to claim 12 , wherein the polarization-splitting unit comprises a grating coupler.

14. The detection device according to claim 8 , wherein the detection area has oblique walls having reflecting surfaces configured to define an optical path of the optical beam, the light source and the photodetector being arranged in facing positions of the detection area on the optical path.

15. The detection device according to claim 1 , wherein the detection system comprises an alpha-particle detector.

16. The detection device according to claim 15 , wherein the alpha-particle detector comprises a semiconductor substrate having a portion extending through the cavity and comprising an array of sensitive regions and a plurality of through holes adjacent to the sensitive regions, wherein attraction electrodes are formed on walls of the plurality of through holes.

17. The detection device according to claim 15 , wherein the alpha-particle detector is integrated in the body of semiconductor material on walls delimiting the cavity.

18. A method for detecting particles comprising:
providing a cavity in a semiconductor body, the cavity comprising a detection area, a concentration area, a first end and an opposite second end, the concentration area being coupled to the detection area, wherein the concentration area comprises a wider cross-sectional footprint than the detection area;
generating gas movement from the concentration area to the detection area of the cavity of the semiconductor body via a gas pump, the gas pump comprising a first grid at the first end and a second grid at the second end; and
measuring a particle parameter within the detection area via a detection device.

19. The method according to claim 18 , wherein generating the gas movement comprises generating ionized gas molecules in proximity of the first end of the detection area and attracting the ionized gas molecules towards the second end of the detection area, wherein the generating the ionized gas and the attracting generates a movement of the gas molecules through the detection area and increasing a particle concentration within the detection area.

20. The method according to claim 18 , wherein generating the gas movement comprises generating a thermal gradient in the detection area, wherein the thermal gradient generates a movement of gas molecules in the gas through the detection area and increasing a particle concentration within the detection area.

21. The method according to claim 18 , wherein the particle parameter comprising one of a number and size distribution of the particles.

22. A detection device comprising:
a body of semiconductor material having a first major surface, a second major surface, and a cavity;
a detection area in the cavity;
a gas pump integrated in the body and configured to force a movement of gas through the cavity towards the detection area; and
a detection system in the detection area, the detection system comprises an optical system, a light source, and a photodetector, wherein the optical system comprises a beam adjustment assembly arranged between the light source and the detection area, the beam adjustment assembly including a plurality of lenses and a hydrophobic support or a variable hydrophobicity support carrying the plurality of lenses.

23. The detection device according to claim 22 , further comprising:
a first conductive grid disposed at the first major surface; and
a second conductive grid disposed at the second major surface, the cavity extending between the first conductive grid and the second conductive grid.

24. The detection device according to claim 22 , further comprising:
a heating element disposed at the first major surface; a

Assignees

• St Microelectronics Srl

Inventors

• Loi Sara
• Pagani Alberto

Classifications

• G01N15/10

  Investigating individual particles · CPC title

• G01N2001/2276

  Personal monitors · CPC title

• G01N2015/035

  the optical arrangement forming an integrated apparatus with the sample container · CPC title

• F04B19/06

  Pumps for delivery of both liquid and elastic fluids at the same time (wet gas pumps F04B37/20) · CPC title

• F04B37/00

  Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 · CPC title