Gas sensor and method for manufacturing same

Patent metadata

Field	Value
Publication number	US-10132768-B2
Application number	US-201414895702-A
Country	US
Kind code	B2
Filing date	Aug 29, 2014
Priority date	Aug 30, 2013
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

Provided is a method for manufacturing a gas sensor according to an exemplary embodiment of the present invention including: a) forming a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate; b) forming a pair of carbon electrodes and a carbon wire that are connected to be integrated with each other, by pyrolyzing the pair of photoresist electrodes and the photoresist wire; and c) forming metal oxide nanowires on a surface of the carbon wire.

First claim

The invention claimed is:

1. A method for manufacturing a gas sensor, the method comprising:
forming a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate;
forming a pair of carbon electrodes and a carbon wire that are connected to be integrated with each other, by pyrolyzing the pair of photoresist electrodes and the photoresist wire; and
forming metal oxide nanowires on a surface of the carbon wire,
wherein the forming of the metal oxide nanowires on a surface of the carbon wire includes:
forming a metal oxide seed on the surface of the carbon wire; and
forming the metal oxide nanowires on the surface of the carbon wire by growing the metal oxide seed,
wherein the forming of the metal oxide nanowires on the surface of the carbon wire by growing the metal oxide seed includes:
growing single crystal metal oxide nanowires from the metal oxide seed by inserting the carbon wire on which the metal oxide seed is formed into an autoclave including a metal oxide aqueous solution and heating the autoclave.

2. The method of claim 1 , further comprising: after the forming of a pair of carbon electrodes and a carbon wire that are connected to be integrated with each other, by pyrolyzing the pair of photoresist electrodes and the photoresist wire and before the forming of the metal oxide nanowires on a surface of the carbon wire,
forming a photoresist sacrificial layer covering the pair of carbon electrodes and exposing the carbon wire by coating a second photoresist on the substrate on which the pair of carbon electrodes and the carbon wire are formed and exposing and developing the second photoresist.

3. The method of claim 1 , wherein the forming of a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate includes:
forming an insulating layer etching mask in which an insulating layer region positioned in a sensing region is exposed, the sensing region being a region at which the carbon wire is formed, by coating a 1-1-th photoresist on the substrate on which an insulating layer is formed and exposing and developing the 1-1-th photoresist;
removing the insulating layer region positioned in the sensing region using the insulating layer etching mask, and removing the insulating layer etching mask;
forming a concave portion groove by partially etching the substrate positioned in the sensing region using the insulating layer from which the insulating layer region positioned in the sensing region is removed, as a substrate etching mask; and
coating the first photoresist on the substrate in which the concave portion groove is formed.

4. The method of claim 1 , wherein the forming of a metal oxide seed on the surface of the carbon wire is performed by a coating method of applying a solution including a metal oxide precursor, an atomic layer deposition method of atomic layer-depositing a metal oxide, a physical deposition method of depositing a metal oxide by sputtering, or an oxidation method of oxidizing a metal deposited after depositing the metal, on at least one surface of the carbon wire.

5. The method of claim 1 , wherein the photoresist wire has any one shape selected from the group consisting of linear single wire or array in which a plurality of wires are assembled, mesh, and honey comb.

6. A method for manufacturing a gas sensor, the method comprising:
forming a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate;
forming a pair of carbon electrodes and a carbon wire that are connected to be integrated with each other, by pyrolyzing the pair of photoresist electrodes and the photoresist wire; and
forming metal oxide nanowires on a surface of the carbon wire,
wherein the forming metal oxide nanowires on a surface of the carbon wire; includes:
forming a metal oxide seed on the surface of the carbon wire; and
forming the metal oxide nanowires on the surface of the carbon wire by growing the metal oxide seed,
wherein the forming of the metal oxide nanowires on the surface of the carbon wire by growing the metal oxide seed; includes:
contacting a metal oxide precursor with the carbon wire, and then growing singlecrystal metal oxide nanowires from the seed by Joule heat generated from the carbon wire.

7. A method for manufacturing a gas sensor, the method comprising:
forming a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate;
forming a pair of carbon electrodes and a carbon wire that are connected to be integrated with each other, by pyrolyzing the pair of photoresist electrodes and the photoresist wire; and
forming metal oxide nanowires on a surface of the carbon wire,
wherein the forming a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate includes:
coating the first photoresist on the substrate;
exposing the first photoresist by using an electrode forming photomask having a shape corresponding to a pair of electrodes facing each other and spaced apart from each other;
re-exposing the first photoresist using a wire forming photomask having a wire shape so that upper portions of a pair of exposure regions exposed by the electrode forming photomask are connected to an exposure region exposed by the wire forming photomask; and
forming a pair of photoresist electrodes spaced apart from each other and forming a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other, by developing the re-exposed first photoresist.

8. The method of claim 7 , wherein in the re-exposing of the first photoresist, a surface region of the first photoresist is partially exposed.

9. A gas sensor comprising:
a pair of carbon electrodes facing each other and spaced apart from each other on an insulating substrate;
a carbon wire integrated with the pair of carbon electrodes and connecting upper portions of the pair of carbon electrodes; and
metal oxide nanowires bound to a surface of the carbon wire to radially protrude,
wherein the metal oxide nanowires are selectively formed on the surface of the carbon wire,
wherein a metal oxide of the metal oxide nanowires covers the surface of the carbon wire corresponding to 80 to 100% based on total surface area of the carbon wire.

10. The gas sensor of claim 9 , wherein the substrate has a concave portion groove formed in a sensing region, the sensing region being a region at which the carbon wire is positioned.

11. The gas sensor of claim 9 , wherein the metal oxide nanowires are monocrystal.

12. The gas sensor of claim 9 , wherein a metal oxide of the metal oxide nanowires is one or two or more selected from the group consisting of zinc oxide (ZnO), copper oxide (CuO), indium oxide (In 2 O 3 ) and tin oxide (SnO 2 ).

13. The gas sensor of claim 9 , wherein the metal oxide nanowires have a length of 10nm to 5 μm.

Assignees

• Sk Innovation Co Ltd
• Ulsan Nat Inst Science & Tech Unist

Inventors

• Shin Heung-Joo
• Lim Yeong Jin
• Heo Jeong Il

Classifications

• G01N27/127 Primary

  comprising nanoparticles · CPC title

• G01N33/0027

  concerning the detector · CPC title

• G01N27/125

  Composition of the body, e.g. the composition of its sensitive layer · CPC title

• G01N27/12 Primary

  of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid {, for detecting components in the fluid} · CPC title