Method for in-situ measuring electrical properties of carbon nanotubes

Patent metadata

Field	Value
Publication number	US-10132767-B2
Application number	US-201715598281-A
Country	US
Kind code	B2
Filing date	May 17, 2017
Priority date	May 20, 2016
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A method for in-situ measuring electrical properties of carbon nanotubes includes placing a first electrode in a chamber, wherein the first electrode defines a cavity. A growth substrate is suspend inside of the cavity, and a catalyst layer is located on the growth substrate. A measuring meter having a first terminal and a second terminal opposite to the first terminal is provided. The first terminal is electrically connected to the first electrode, and the second terminal is electrically connected to the growth substrate. A carbon source gas, a protective gas, and hydrogen are supplied to the cavity, to grow the carbon nanotubes on the catalyst layer. The electrical properties of the carbon nanotubes are obtained by the measuring meter.

First claim

What is claimed is:

1. A method for in-situ measuring electrical properties of carbon nanotubes, the method comprising:
placing a first electrode in a chamber, wherein the first electrode defines a cavity;
suspending a growth substrate inside of the cavity, and locating a catalyst layer on the growth substrate;
providing a measuring meter having a first terminal and a second terminal opposite to the first terminal, wherein the first terminal is electrically connected to the first electrode, and the second terminal is electrically connected to the growth substrate;
supplying a carbon source gas, a protective gas, and hydrogen to the cavity, heating the chamber, and growing a plurality of first carbon nanotubes on the catalyst layer;
obtaining electrical properties of the plurality of first carbon nanotubes from the measuring meter.

2. The method of claim 1 , wherein the first electrode is a hollow cylinder.

3. The method of claim 1 , wherein the first electrode comprises a first conductive plate and a second conductive plate, and the first conductive plate is spaced from and electrically connected to the second conductive plate.

4. The method of claim 1 , wherein the growth substrate is conductive at a temperature used for growing the carbon nanotubes.

5. The method of claim 1 , wherein the growth substrate comprises a plurality of second carbon nanotubes.

6. The method of claim 5 , wherein the plurality of second carbon nanotubes are entangled with each other.

7. The method of claim 1 , further comprising supporting the growth substrate by a support substrate.

8. The method of claim 7 , wherein a material of the support substrate is selected from the group consisting of carbon material, silicon, and silica.

9. The method of claim 7 , further comprising supporting the support substrate by a connecting wire, a second electrode, and a support structure; wherein the second electrode comprises a first end and a second end opposite to the first end, and the second end defines a first hole; a part of the connecting wire is inserted into the first hole; and the support structure defines a second hole, and the first end is inserted into the second hole.

10. The method of claim 9 , wherein the connecting wire comprises a support element and a conductive thread, the conductive thread comprises a first thread end and a second thread end opposite to the first thread end, the first thread end is electrically connected to the second electrode, and the second thread end is electrically connected to the growth substrate.

11. The method of claim 10 , wherein the conductive thread helically surrounds an outside surface of the support element.

12. The method of claim 10 , wherein the conductive thread is buried inside of the support element, and two opposite ends of the conductive thread protrude out of the support element.

13. The method of claim 10 , wherein the support element is a quartz tube.

14. The method of claim 10 , wherein the conductive thread is a carbon nanotube wire structure comprising a plurality of third carbon nanotubes joined end to end by van der Waals attractive force.

15. The method of claim 14 , wherein the plurality of third carbon nanotubes are helically oriented around an axial direction of the carbon nanotube wire structure.

16. The method of claim 14 , wherein the plurality of third carbon nanotubes substantially extends along the same direction.

Assignees

• Univ Tsinghua
• Hon Hai Prec Ind Co Ltd

Inventors

• Wang Jiang-Tao
• Jin Xiang
• Liu Peng
• Wei Yang
• Jiang Kai-Li
• Fan Shou-Shan

Classifications

• H10P74/207

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• G01N27/226

  Construction of measuring vessels; Electrodes therefor · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• C23C16/26

  Deposition of carbon only · CPC title

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title