Method of constructing 3D image, image processor, and electron microscope

Patent metadata

Field	Value
Publication number	US-10132761-B2
Application number	US-201514836024-A
Country	US
Kind code	B2
Filing date	Aug 26, 2015
Priority date	Aug 29, 2014
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A method capable of constructing an accurate three-dimensional image is offered. The method comprises the step (S10) of obtaining a first series of tilted images which are constituted by electron microscope images or elemental mapping images of a sample (S) at different tilt angles and which have been obtained by tilting the sample in angular increments, the step (S14) of obtaining a second series of tilted images which are constituted by electron microscope images or elemental mapping images of the sample at different tilt angles and which have been obtained by rotating the sample about an axis (P) perpendicular to a surface (Sf) of the sample and then tilting the sample in angular increments, and the step (S16) of constructing the three-dimensional image on the basis of the first and second series of tilted images.

First claim

The invention claimed is:

1. A method of constructing a three-dimensional image, comprising the steps of:
obtaining a first series of tilted images which are constituted by electron microscope images or elemental mapping images of a sample at different tilt angles and which have been obtained by tilting the sample in a plurality of angular increments;
rotating the sample through 180 degrees about an axis perpendicular to the surface of the sample after the step of obtaining the first series of tilted images;
obtaining a second series of corresponding tilted images which are constituted by electron microscope images or elemental mapping images of the sample at different tilt angles; and
constructing the three-dimensional image on the basis of the first and second series of tilted images wherein, during the step of constructing the three-dimensional image, said second series of tilted images is rotated to the same orientation as said first series of tilted images and some of the electron microscope images or elemental mapping images of the sample constituting the first series of tilted images are replaced by some of the electron microscope images or elemental mapping images of the sample constituting the second series of tilted images so as to create a third series of tilted images for constructing the three-dimensional image.

2. The method of constructing a three-dimensional image as set forth in claim 1 , wherein said elemental mapping images of the sample are obtained by irradiating the sample with an electron beam to induce X-rays and detecting the X-rays by an energy dispersive X-ray detector.

3. A method of constructing a three-dimensional image, comprising the steps of:
obtaining a first series of tilted images which are constituted by electron microscope images or elemental mapping images of a sample at different tilt angles and which have been obtained by tilting the sample in a plurality of angular increments;
turning the sample upside down after the step of obtaining said first series of tilted images and prior to the step of obtaining said second series of tilted images;
obtaining a second series of corresponding tilted images which are constituted by electron microscope images or elemental mapping images of the sample at different tilt angles; and
constructing the three-dimensional image on the basis of the first and second series of tilted images, wherein said three-dimensional image is constructed by reversing said second series of tilted images to the same orientation as said first series of tilted images and replacing some of the electron microscope images or elemental mapping images of the sample constituting the first series of tilted images by some of the electron microscope images or elemental mapping images of the sample constituting the second series of tilted images so as to create a third series of tilted images for constructing the three-dimensional image.

4. An image processor comprising:
a first series tilted image acquisition portion for obtaining a first series of tilted images which are constituted by electron microscope images or elemental mapping images of a sample at different tilt angles and which have been obtained by tilting the sample in a plurality of angular increments;
means for rotating the sample about an axis perpendicular to the surface of the sample through 180 degrees when the sample is in the same state as when said first series of tilted images was obtained;
a second series tilted image acquisition portion for obtaining a second series of corresponding tilted images which are constituted by electron microscope images or elemental mapping images of the sample at different tilt angles; and
a three-dimensional image constructing portion for constructing a three-dimensional image on the basis of the first and second series of tilted images, wherein said three-dimensional image constructing portion constructs said three-dimensional image by rotating said second series of tilted images to the same orientation as said first series of tilted images and replacing some of the electron microscope images or elemental mapping images of the sample constituting the first series of tilted images by some of the electron microscope images or elemental mapping images of the sample constituting said second series of tilted images so as to create a third series of tilted images.

5. The image processor as set forth in claim 4 , wherein said elemental mapping images of the sample are obtained by irradiating the sample with an electron beam to induce X-rays and detecting the X-rays by an energy dispersive X-ray detector.

6. An electron microscope including an image processor as set forth in claim 4 .

7. An image processor comprising:
a first series tilted image acquisition portion for obtaining a first series of tilted images which are constituted by electron microscope images or elemental mapping images of a sample at different tilt angles and which have been obtained by tilting the sample in a plurality of angular increments;
a second series tilted image acquisition portion for obtaining a second series of corresponding tilted images which are constituted by electron microscope images or elemental mapping images of the sample at different tilt angles and which have been obtained by turning the sample upside down when the sample is in the same state as when the first series of tilted images was obtained and then tilting the sample in a plurality of angular increments; and
a three-dimensional image constructing portion for constructing a three-dimensional image on the basis of the first and second series of tilted images, wherein said three-dimensional image constructing portion constructs said three-dimensional image by reversing said second series of tilted images to the same orientation as said first series of tilted images and replacing some of the electron microscope images or elemental mapping images of the sample constituting the first series of tilted images by some of the electron microscope images or elemental mapping images of the sample constituting the second series of tilted images so as to create a third series of tilted images.

Assignees

• Jeol Ltd

Inventors

• Aoyama Yoshitaka

Classifications

• H01J37/22

  Optical {, image processing} or photographic arrangements associated with the tube · CPC title

• G01N23/2252

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• H01J2237/2807

  X-rays · CPC title

• H01J2237/226

  Image reconstruction · CPC title

• H01J2237/2611

  Stereoscopic measurements and/or imaging · CPC title