Gas inlet valve with incompatible materials isolation

Patent metadata

Field	Value
Publication number	US-10132413-B2
Application number	US-201615139221-A
Country	US
Kind code	B2
Filing date	Apr 26, 2016
Priority date	Apr 29, 2015
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A gas inlet valve with incompatible materials isolation is provided. The valve may include a piston that seals against a surface when in a closed position and that permits gas to flow through the valve and out the outlet port when in an open position. A bellows may protect the actuation mechanism of the piston from gas that may be present in the valve when the valve is in the open or closed position, and the piston may include a second seal interface that seals the bellows off from the gas flow area when the valve is in the open or closed position.

First claim

What is claimed is:

1. A valve configured to regulate gas flow to a semiconductor manufacturing apparatus, the valve comprising:
a body, the body including:
a cavity partially or fully bounded by an interior surface of the body, and
at least one inlet port, wherein the at least one inlet port is fluidically connected with the cavity;

a bellows sealed to a first portion of the interior surface of the body; and
a piston assembly partially or fully located within the body and movable between an open configuration and a closed configuration, wherein the piston assembly includes:
a piston, the piston including:
a first seal interface, and
a second seal interface configured to seal against a second portion of the interior surface of the body to protect the bellows from exposure to process gases introduced into the cavity via the at least one inlet port when the piston assembly is in at least the open configuration; and

a rod, wherein:
when the piston assembly is in at least the open configuration, a portion of the piston assembly seals a portion of the cavity containing the bellows off from another portion of the cavity in fluidic communication with the at least one inlet port,
the bellows seals the rod from fluidic communication with the second seal interface,
the rod is slideably connected with the body and configured to allow the piston to translate along a first axis,
the first seal interface is substantially perpendicular to the first axis, and
a center axis of the piston is parallel to and offset from a center axis of the cavity in a direction perpendicular to the first axis.

2. The valve of claim 1 , wherein:
when the piston assembly is in the closed configuration, the portion of the cavity containing the bellows is not sealed off from the another portion of the cavity that is in fluidic communication with the at least one inlet port,
the bellows seals the rod from fluidic communication with the at least one inlet port,
the first seal interface and the second seal interface face in opposite directions, and
the first seal interface and the second seal interface are substantially perpendicular to the first axis.

3. The valve of claim 1 , wherein:
when the piston assembly is in the open and in the closed configurations, the portion of the piston assembly seals a portion of the cavity containing the bellows off from the another portion of the cavity in fluidic communication with the at least one inlet port, and
the second seal interface is further configured to seal against the second portion of the interior surface of the body when the piston assembly is in the open configuration, in the closed configuration, and between the open and closed configurations.

4. The valve of claim 3 , wherein the second seal interface is substantially parallel to the first axis.

5. The valve of claim 3 , wherein the piston further comprises a removable seat that includes the first seal interface.

6. The valve of claim 5 , wherein the removable seat is configured to be removed from the piston.

7. The valve of claim 5 , wherein:
the removable seat includes a first seal and a seat body with a face, and
the face and the first seal are configured to seal against one or more of: the body and a mounting surface to which the valve is mounted.

8. The valve of claim 7 , wherein:
the seat body is comprised of a ceramic, and
the piston is comprised of a material selected from the group consisting of: aluminum and an aluminum alloy.

9. The valve of claim 8 , wherein:
the removable seat is inserted into a cavity of the piston that includes a recessed area that is sized larger than a diameter of the removable seat,
the piston and the removable seat, when assembled, form a gland that receives the first seal,
a first sidewall of the gland is provided by the piston and is made of a material selected from the group consisting of: aluminum and aluminum alloy, and
a second sidewall of the gland is provided by the removable seat and is made of a ceramic material.

10. The valve of claim 7 , wherein the first seal encircles the face when viewed from an angle perpendicular to the face.

11. The valve of claim 1 , wherein the first seal interface is configured to seal against the body.

12. The valve of claim 1 , wherein the first seal interface is configured to seal against a mounting surface wherein the valve is mounted to the mounting surface.

13. The valve of claim 2 , wherein the piston includes a circumferential groove.

14. The valve of claim 13 , wherein the circumferential groove has a semi-circular cross-sectional shape.

15. The valve of claim 13 , wherein the circumferential groove is positioned on the piston such that when the piston assembly is in the open configuration, the groove is substantially aligned with the at least one inlet port along the first axis.

16. The valve of claim 13 , wherein a width of the circumferential groove is within 15% to a maximum diameter of the at least one inlet port.

17. The valve of claim 1 , wherein:
the piston has a circular cross-sectional shape in a plane perpendicular to the first axis, and
a bore region of the interior surface of the body has a cross-sectional shape in the plane perpendicular to the first axis selected from the group consisting of: a circular cross-sectional shape, an elliptical cross-sectional shape, and an obround cross-sectional shape.

18. The valve of claim 1 , further comprising a seal plate with an exterior surface, wherein:
the exterior surface is comprised of a ceramic material, and
the piston assembly is configured to seal to the seal plate.

19. The valve of claim 18 , wherein the seal plate is configured to seal directly to a gas distribution manifold.

20. The valve of claim 1 , wherein the bellows is comprised of stainless steel.

21. A valve configured to regulate gas flow to a semiconductor manufacturing apparatus, the valve comprising:
a body, the body including:
a cavity at partially or fully bounded by an interior surface of the body, and
at least one inlet port, wherein the at least one inlet port is fluidically connected with the cavity;

a bellows sealed to a first portion of the interior surface of the body; and
a piston assembly partially or fully located within the body and movable between an open configuration and a closed configuration, wherein the piston assembly includes:
a piston, the piston including:
a first seal interface, and
a second seal interface configured to seal against a second portion of the interior surface of the body to protect the bellows from exposure to process gases introduced into the cavity via the at least one inlet port when the piston assembly is in at least the open configuration; and

a rod, wherein:
when the piston assembly is in at least the open configuration, a portion of the piston assembly seals a portion of the cavity containing the bellows off from another portion of the cavity in fluidic communication with the at least one inlet port,
the bellows seals the rod from fluidic communication with the second seal interface,
the rod is slideably connected with the body and configured to allow the piston to translate along a first axis,
the first seal interface is substantially perpendicular to the first axis,
the piston has a circular cross-sectional shape in a plane perpendicular to the first axis, and
a bore region of the interior surface of the body has a cross-sectional shape in the plane perpendicular to the first axis selected from the group con

Assignees

• Lam Res Corp

Inventors

• Lind Gary Bridger
• Wongsenakhum Panya

Classifications

• F16K51/00

  Other details not peculiar to particular types of valves or cut-off apparatus · CPC title

• F16K1/32 Primary

  Details (details of more general applicability F16K25/00 - F16K51/00) · CPC title

• F16K31/122

  the fluid acting on a piston (F16K31/143, F16K31/163, F16K31/363, F16K31/383 take precedence) · CPC title

• F16K31/1221

  one side of the piston being spring-loaded · CPC title

• G05D7/00

  Control of flow (level control G05D9/00; control of flow ratio G05D11/00) · CPC title