Composition for forming a coating type bpsg film, substrate formed a film by said composition, and patterning process using said composition
US-2015004791-A1 · Jan 1, 2015 · US
US10131603B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10131603-B2 |
| Application number | US-201715585720-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 3, 2017 |
| Priority date | Jun 23, 2016 |
| Publication date | Nov 20, 2018 |
| Grant date | Nov 20, 2018 |
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The present invention provides a method for reducing a metal of a sugar-alcohol compound, the method including the steps of (A) protecting a hydroxyl group of a sugar-alcohol compound containing metal impurities with a protecting group, (B) removing the metal impurities from the sugar-alcohol compound having the hydroxyl group protected with the protecting group, and (C) eliminating the protecting group of the sugar-alcohol compound from which the metal has been removed. There can be provided a method for reducing a metal of a sugar-alcohol compound that can provide a sugar-alcohol compound with a suitable quality for the semiconductor apparatus manufacturing process.
Opening claim text (preview).
What is claimed is: 1. A method for reducing a content of metal impurities of a sugar-alcohol compound, the method comprising the steps of: (A) protecting a hydroxyl group of a sugar-alcohol compound containing metal impurities with a protecting group; (B) removing the metal impurities from the sugar-alcohol compound having the hydroxyl group protected with the protecting group; and (C) eliminating the protecting group of the sugar-alcohol compound from which the metal has been removed, wherein step (C) is performed by a hydrolysis reaction using deionized water. 2. The method according to claim 1 , wherein the sugar-alcohol compound containing metal impurities is selected from the group consisting of erythritol, threitol, arabinitol, xylitol, ribitol, iditol, galactitol, sorbitol, mannitol, volemitol, perseitol, octitol, inositol, and quercitol. 3. The method according to claim 1 , wherein the step (B) includes (B1) liquid-liquid separation and water washing or (B2) distillation. 4. The method according to claim 2 , wherein the step (B) includes (B1) liquid-liquid separation and water washing or (B2) distillation. 5. The method according to claim 1 , wherein the protecting group is acetonide. 6. The method according to claim 2 , wherein the protecting group is acetonide. 7. The method according to claim 3 , wherein the protecting group is acetonide. 8. The method according to claim 4 , wherein the protecting group is acetonide. 9. The method according to claim 1 , wherein the sugar-alcohol compound obtained by the method has a sodium impurity content of 100 ppb or less. 10. The method according to claim 9 , wherein the sodium impurity content is 50 ppb or less. 11. The method according to claim 1 , wherein the deionized water is used in the presence of an acid catalyst. 12. The method according to claim 11 , wherein the acid catalyst is a mineral acid or a carbonic acid.
by a consecutive conversion and reconstruction · CPC title
Hexahydroxylic alcohols · CPC title
Design of synthesis routes, e.g. reducing the use of auxiliary or protecting groups · CPC title
by distillation · CPC title
by alcoholysis · CPC title
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