Buffing apparatus and substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10131030-B2
Application number	US-201514879786-A
Country	US
Kind code	B2
Filing date	Oct 9, 2015
Priority date	Oct 10, 2014
Publication date	Nov 20, 2018
Grant date	Nov 20, 2018

Abstract

A buffing apparatus for buffing a substrate is provided. The apparatus includes: a buff table for holding the substrate, the buff table being rotatable; a buff head to which a buff pad for buffing the substrate is attachable, the buff head being rotatable and movable in a direction approaching the buff table and a direction away from the buff table, and an internal supply line for supplying process liquid for the buffing to the substrate being formed inside the buff head; and an external nozzle provided separately through the internal supply line in order to supply the process liquid to the substrate.

First claim

What is claimed is:

1. A buffing apparatus for buffing a substrate, the buffing apparatus comprising:
a buff table for holding the substrate, the buff table being rotatable;
a buff head to which a buff pad for buffing the substrate is attachable, the buff head being rotatable and movable in a direction approaching the buff table and a direction away from the buff table, and an internal supply line for supplying a process liquid for the buffing to the substrate being formed inside the buff head;
an external nozzle provided separately through the internal supply line in order to supply the process liquid to the substrate; and
a control section configured to control an operation of the buffing apparatus, the control section configured to control the buffing apparatus to supply the process liquid through the internal supply line while the buff head approaches the buff table as close as the contact position.

2. A buffing apparatus for buffing a substrate, the buffing apparatus comprising:
a buff table for holding the substrate, the buff table being rotatable;
a buff head to which a buff pad for buffing the substrate is attachable, the buff head being rotatable and movable in a direction approaching the buff table and a direction away from the buff table, and an internal supply line for supplying a process liquid for the buffing to the substrate being formed inside the buff head;
an external nozzle provided separately through the internal supply line in order to supply the process liquid to the substrate; and
a control section configured to control an operation of the buffing apparatus, wherein
the control section is configured to control the buffing apparatus to supply the process liquid from the external nozzle in a state in which the buff table is rotated before the buff head approaches the buff table as close as a contact position for bringing the buff pad into contact with the substrate.

3. The buffing apparatus according to claim 2 , wherein the control section is configured to control the buffing apparatus to supply the process liquid only through the internal supply line after a start of the buffing or after elapse of a predetermined time from the start of the buffing.

4. The buffing apparatus according to claim 2 , wherein the control section is configured to control the buffing apparatus to supply the process liquid through both of the internal supply line and the external nozzle during the buffing.

5. The buffing apparatus according to claim 1 , wherein the control section is configured to control the buffing apparatus to supply the process liquid from the external nozzle in a state in which rotation of the buff table is stopped before the buff head approaches the buff table as close as the contact position, and to move the buff head to the contact position after the supply is started, and start the rotation of the buff table.

6. The buffing apparatus according to claim 1 ,
wherein the control section is configured to control the buffing apparatus to, before the buff head approaches the buff table as close as a position for bringing the buff pad into contact with the substrate, supply the process liquid from the internal supply line in a state in which the buff table is rotated.

7. The buffing apparatus according to claim 1 , wherein the control section is configured to supply the process liquid through the internal supply line after the buff head approaches the buff table as close as a position for bringing the buff pad into contact with the substrate in a state in which rotation of the buff table and the buff head is stopped and start the rotation of the buff table and the buff head after the process liquid is supplied for a predetermined time.

8. The buffing apparatus according to claim 2 , wherein the control section is configured to control a load of the buff head such that a first load acts on the substrate with the buff head in an initial period of the buffing and a second load larger than the first load acts on the substrate in a period after the initial period.

9. A substrate processing apparatus comprising:
a chemical mechanical polishing apparatus; and
the buffing apparatus according to claim 1 for performing post process of a substrate processed by the chemical mechanical polishing apparatus.

10. A method for buffing a substrate with a buffing apparatus, the method comprising:
a step of disposing the substrate on a buff table for holding and rotating the substrate;
a step of supplying a process liquid from an external nozzle in a state in which the buff table is rotated before bringing a buff pad attached to a buff head, in which an internal supply line for supplying a process liquid for the buffing to the substrate is formed, into contact with the substrate; and
a step of performing the buffing while supplying the process liquid through the internal supply line after the step of supplying the process liquid from the external nozzle.

11. A method for buffing a substrate with a buffing apparatus, the method comprising:
a step of disposing the substrate on a buff table for holding and rotating the substrate;
a step of supplying a process liquid from an external nozzle in a state in which rotation of the buff table is stopped before bringing a buff pad attached to a buff head, in which an internal supply line for supplying a process liquid for the buffing to the substrate is formed, into contact with the substrate;
a step of bringing the buff pad into contact with the substrate and starting the rotation of the buff table after the supply of the process liquid from the external nozzle is started; and
a step of performing the buffing while supplying the process liquid through the internal supply line after the step of starting the rotation of the buff table.

12. The buffing apparatus according to claim 1 , wherein the control section is configured to control the buffing apparatus to supply the process liquid only through the internal supply line after a start of the buffing or after elapse of a predetermined time from the start of the buffing.

13. The buffing apparatus according to claim 1 , wherein the control section is configured to control the buffing apparatus to supply the process liquid through both of the internal supply line and the external nozzle during the buffing.

14. The buffing apparatus according to claim 2 , wherein
the control section is configured to control the buffing apparatus to supply the process liquid from the external nozzle in a state in which rotation of the buff table is stopped before the buff head approaches the buff table as close as the contact position, and to move the buff head to the contact position after the supply is started, and start the rotation of the buff table.

15. The buffing apparatus according to claim 2 , wherein
the control section is configured to control the buffing apparatus to, before the buff head approaches the buff table as close as a position for bringing the buff pad into contact with the substrate, supply the process liquid from the internal supply line in a state in which the buff table is rotated.

16. The buffing apparatus according to claim 2 , wherein
the control section is configured to supply the process liquid through the internal supply line after the buff head approaches the buff table as close as a position for bringing the buff pad into contact with the substrate in a state in which rotation of the buff table and the buff head is stopped and start the rotation of the buff table and the buff head after the process liquid is supplied for a predetermined time.

17. The buffing

Assignees

• Ebara Corp

Inventors

• Yamaguchi Kuniaki
• Kobata Itsuki
• Mizuno Toshio

Classifications

• H10P72/0472

  comprising at least one polishing chamber · CPC title

• H10P72/0458

  vertical arrangement · CPC title

• H10P72/0456

  in-line arrangement · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H01L21/67051

  Electricity · mapped topic