Semiconductor device

Patent metadata

Field	Value
Publication number	US-10128370-B2
Application number	US-201515502409-A
Country	US
Kind code	B2
Filing date	Sep 18, 2015
Priority date	Oct 1, 2014
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

A semiconductor device capable of increasing a value of current that flows through the whole chip until a p-n diode in a unit cell close to a termination operates and reducing a size of the chip and a cost of the chip resulting from the reduced size, and including a second well region formed on both sides, as seen in plan view, of the entirety of a plurality of first well regions, a second ohmic electrode located over the second well region, a third separation region of a first conductivity type that is positioned closer to the first well regions than the second ohmic electrode in the second well region and that is formed to penetrate the second well region from a surface layer of the second well region in a depth direction, and a second Schottky electrode located on the third separation region.

First claim

The invention claimed is:

1. A semiconductor device, comprising:
a drift layer of a first conductivity type formed on a semiconductor substrate of the first conductivity type;
a plurality of first well regions of a second conductivity type located at a interval in a surface layer of said drift layer;
a second well region of the second conductivity type formed on both sides, as seen in plan view, of the entirety of said, plurality of first well regions in the surface layer of said drift layer, said second well region having a formation area larger than that of each of said first well regions;
a first separation region of the first conductivity type formed to penetrate each of said first well regions from a surface layer of each of said first well regions in a depth direction;
a source region of the first conductivity type formed on both sides, as seen in plan view, of said first separation region in the surface layer of each of said first well regions;
a first Schottky electrode located on said first separation region;
a first ohmic electrode ( 70 ) located over each of said first well regions and located on said source region while contacting each of said first well regions and said source region;
a second separation region of the first conductivity type being a region for separating said first well regions from each other;
a second ohmic electrode located over said second well region;
a third separation region of the first conductivity type that is positioned closer to said first well regions than said second ohmic electrode in said second well region and that is formed to penetrate said second well region from a surface layer of said second well region in the depth direction;
a second Schottky electrode located on said third separation region;
a gate electrode located, through a first insulating film, over part of said first and second well regions except for positions in which said first and second Schottky electrodes and said first and second ohmic electrodes are located;
a second insulating film formed so as to cover said gate electrode; and
a source electrode located so as to cover said first and second Schottky electrodes, said first and second ohmic electrodes, and said second insulating film.

2. The semiconductor device according to claim 1 , wherein a distance between said second Schottky electrode and each of said first well regions is less than or equal to 3 μm.

3. The semiconductor device according to claim 1 , wherein said third separation region is continuously formed in a direction that intersects a direction from said second well region toward said first well regions in plan view.

4. The semiconductor device according to claim 1 , wherein said third separation region surrounds said second ohmic electrode plan view and at least part of the portion that surrounds said ohmic electrode is missing.

5. The semiconductor device according to claim 1 , further comprising:
a fourth separation region of the first conductivity type formed to penetrate said second well region from a surface layer of said second well region in the depth direction; and
a third Schottky electrode located, on said fourth separation region,
wherein said second ohmic electrode is located over said second well region.

6. The semiconductor device according to claim 1 , wherein said drift layer comprises silicon carbide.

7. A semiconductor device, comprising:
a drift layer of a first conductivity type formed on a semiconductor substrate of the first conductivity type;
a plurality of first well regions of a second conductivity type located at an interval in a surface layer of said drift layer;
a second well region of the second conductivity type formed on both sides, as seen in plan view, of some of said plurality of first well regions in the surface layer of said drift layer, said second well region having a formation area, larger than that of each of said first well regions;
a sense region that includes at least one first well region of said plurality of first well regions and is separated from another first well region of said first well regions by said second well region formed on both sides, as seen in plan view, of said sense region;
a first separation region of the first conductivity type formed to penetrate each of said first well regions in at least said sense region from a surface layer of each of said first well regions in a depth direction;
a source region of the first conductivity type formed on both sides, as seen in plan view, of said first separation region in the surface layer of each of said first well regions in at least said sense region;
a first Schottky electrode located on said first separation region;
a first ohmic electrode located over each of said first well regions and located on said source region in at least said sense region;
a second separation region of the first conductivity type being a region for separating said first well regions from each other;
a second ohmic electrode located over said second well region;
a third separation region of the first conductivity type that is positioned closer to said sense region than said second ohmic electrode in said second well region and that is formed to penetrate said second well region from a surface, layer of said second well region in the depth direction;
a second Schottky electrode located on said third separation region;
a gate electrode located, through a first insulating film, over part of said first and second well regions except for positions in which said first and second Schottky electrodes and said first and second ohmic electrodes are, located;
a second insulating film formed so as to cover said gate electrode; and
a sense electrode located so as to cover said first Schottky electrode and said first ohmic electrode.

8. The semiconductor device according to claim 7 , wherein a distance between said second Schottky electrode and each of said first well regions is less than or equal to 3 μm.

9. The semiconductor device according to claim 7 , wherein said third separation region is continuously formed in a direction that intersects a direction from said second well region toward said sense region in plan view.

10. The semiconductor device according to claim 7 , wherein
said sense region includes said plurality of first well regions, and
said source region is not formed in at least one first well region of said first well regions in said sense region.

11. The semiconductor device according to claim 7 , wherein
said sense region includes said plurality of first well regions, and
said second separation region is not formed between part of said sense region and another first well region of said first well regions.

12. The semiconductor device according to claim 7 , wherein said drift layer comprises silicon carbide.

Assignees

• Mitsubishi Electric Corp

Inventors

• Ebihara Kohei
• Hino Shiro
• Sadamatsu Koji

Classifications

• H10D84/811

  Combinations of field-effect devices and one or more diodes, capacitors or resistors · CPC title

• H01L29/0696

  Electricity · mapped topic

• H01L29/7818 Primary

  Electricity · mapped topic

• H01L29/7815

  Electricity · mapped topic

• H01L27/0629

  Electricity · mapped topic