P-tunneling field effect transistor device with pocket

Patent metadata

Field	Value
Publication number	US-10128356-B2
Application number	US-201415118843-A
Country	US
Kind code	B2
Filing date	Mar 27, 2014
Priority date	Mar 27, 2014
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

Tunneling field effect transistors (TFETs) are described herein. In an example, a TFET includes a pocket disposed near a junction of a source region, wherein the pocket region is formed from a material having lower percentage of one type of atom than percentage of the one type of atom in source, channel, and drain regions.

First claim

We claim:

1. A p-type tunneling field effect transistor (TFET), comprising:
a drain region having a first conductivity type;
a source region having a second conductivity type opposite of the first conductivity type;
a gate region to cause formation of a channel region between the source and drain regions; and
a pocket disposed near a junction of the source region, wherein the pocket is formed from a material having lower percentage of one type of atom than percentage of the one type of atom in the source, channel, and drain regions, wherein the gate region is to cause hole tunneling through the pocket.

2. The p-type TFET of claim 1 , wherein the material is from Group III-V of the periodic table.

3. The p-type TFET of claim 1 , wherein the material is Sn, and wherein the percentage of Sn in the pocket is substantially zero, and wherein the percentage of Sn in the source, channel, and drain regions is 10%.

4. The p-type TFET of claim 1 , wherein the material in the pocket is of such percentage so as to lower tunneling mass and lower bandgap of the pocket.

5. The p-type TFET of claim 1 , wherein the first conductivity type is a p-type and the second conductivity type is an n-type.

6. The p-type TFET of claim 1 , wherein the TFET is a FinFET, Tri-Gate, or square non-wire based device.

7. A method of forming a p-type TFET, the method comprising:
forming a drain region having a first conductivity type;
forming a source region having a second conductivity type opposite of the first conductivity type;
forming a gate region to cause formation of a channel region between the source and drain regions; and
forming a pocket disposed near a junction of the source region, wherein the pocket is formed from a material having lower percentage of one type of atom than percentage of the one type of atom in the source, channel, and gate regions, wherein the gate region is to cause hole tunneling in the pocket.

8. The method of claim 7 , wherein the material is from Group III-V of the periodic table.

9. The method of claim 7 , wherein the material is Sn, and wherein the percentage of Sn in the pocket is substantially zero, and wherein the percentage of Sn in the source, channel, and drain regions is 10%.

10. The method of claim 7 , wherein the material in the pocket is of such percentage so as to lower tunneling mass and lower bandgap of the pocket.

11. The method of claim 7 , wherein the first conductivity type is a p-type and the second conductivity type is an n-type.

12. The method of claim 7 , wherein the TFET is a FinFET, Tri-Gate, or square non-wire based device.

13. A system comprising:
a memory;
a processor coupled to the memory, the processor having p-type TFETs comprising:
a drain region having a first conductivity type;
a source region having a second conductivity type opposite of the first conductivity type;
a gate region to cause formation of a channel region between the source and drain regions; and
a pocket disposed near a junction of the source region, wherein the pocket is formed from a material having lower percentage of one type of atom than percentage of the one type of atom in the source, channel, and drain regions, wherein the gate region is to cause hole tunneling in the pocket; and
a wireless antenna for allowing the processor to communicate with another device.

14. The system of claim 13 further comprises a display unit.

15. The system of claim 14 , wherein the display unit is a touch screen.

16. A tunneling field effect transistor (TFET), comprising:
a drain region having a first conductivity type, the drain region comprising tin;
a source region having a second conductivity type opposite of the first conductivity type, the source region comprising tin;
a gate region to cause formation of a channel region between the source and drain regions, the channel region comprising tin; and
a pocket disposed near a junction of the source region, wherein the pocket is formed from a material having lower percentage of Sn than in the source, channel, and drain regions.

17. The TFET of claim 16 , wherein the source region comprises GeSn.

18. The TFET of claim 16 , wherein the percentage of Sn in the pocket is substantially zero, and wherein the percentage of Sn in the source, channel, and drain regions is 10%.

19. The TFET of claim 16 , wherein the material in the pocket is of such percentage so as to lower tunneling mass and lower bandgap of the pocket.

20. The TFET of claim 16 , wherein the TFET is a FinFET, Tri-Gate, or square non-wire based device.

Assignees

• Intel Corp

Inventors

• Avci Uygar E
• Kotlyar Roza
• Young Ian A

Classifications

• H10P10/00

  Bonding of wafers, substrates or parts of devices · CPC title

• H10W44/248

  for antennas · CPC title

• H10W44/20

  at high-frequency [HF] or radio frequency [RF] · CPC title

• H01L29/78696

  Electricity · mapped topic

• H01L29/78681

  Electricity · mapped topic