Generation of VUV, EUV, and X-ray Light Using VUV-UV-VIS Lasers
US-2016315442-A1 · Oct 27, 2016 · US
US10126631B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10126631-B2 |
| Application number | US-201414146892-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 3, 2014 |
| Priority date | Jan 8, 2013 |
| Publication date | Nov 13, 2018 |
| Grant date | Nov 13, 2018 |
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Excitation light of two wavelengths is incident to an optical crystal from a first face side, and a terahertz wave THzb is generated from a second face, and the excitation light that has passed through the optical crystal is reflected, made incident to the optical crystal from the second face side, and a terahertz wave THza is generated from the first face. Terahertz waves with similar characteristics to each other are thereby generated reliably in plural directions.
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The invention claimed is: 1. A terahertz wave generator comprising: a nonlinear optical crystal comprising a single crystal disposed in an optical path of excitation light of a plurality of different wavelength components, and configured to generate terahertz waves having similar characteristics from a first face and a second face of the single nonlinear optical crystal at the same time by difference frequency generation based on incident excitation light, the second face being on an opposite side from the first face; a plurality of placement sections comprising a first placement section provided for a reference sample placement and a second placement section provided for a measurement sample placement; a waveguide section configured to guide a first terahertz wave so as to be illuminated onto the first placement section without splitting, and a second terahertz wave so as to be illuminated at the same time onto the second placement section among terahertz waves generated from the nonlinear optical crystal without splitting and having similar characteristics; and a plurality of detectors configured to detect each terahertz wave that has passed through a respective placement section or has been reflected by a respective placement section, wherein a measurement result is obtained from each terahertz wave detected by a plurality of detectors at the same time, and wherein the terahertz waves are respectively generated from the first face and the second face by collinear phase matching by entry of the excitation light into the nonlinear optical crystal from the first face towards the second face of the nonlinear optical crystal, and by passage of the excitation light through the nonlinear optical crystal from the second face towards the first face of the nonlinear optical crystal. 2. The terahertz wave generator of claim 1 , further comprising: an excitation light generator equipped with a first mirror and a second mirror that together with the first mirror forms an oscillator, where the excitation light generator is configured to generate the excitation light. 3. The terahertz wave generator of claim 1 , further comprising: a pair of off-axis parabolic mirrors, with each mirror comprising a pass-through portion through which the excitation light passes and a reflection face that reflects incident terahertz waves, and that are each disposed so as to reflect the incident terahertz waves, wherein the nonlinear optical crystal is disposed between the pair of off-axis parabolic mirrors. 4. The terahertz wave generator of claim 1 , wherein the nonlinear optical crystal has a shape with at least two flat faces. 5. The terahertz wave generator of claim 1 , wherein the first face is flat and the second face is flat, and the terahertz waves are generated by Cherenkov phase matching when the excitation light is incident from the nonlinear optical crystal. 6. The terahertz wave generator of claim 5 , further comprising: an excitation light generator equipped with a first mirror and a second mirror that together with the first mirror form an oscillator, and where the excitation light generator to generate the excitation light. 7. The terahertz wave generator of claim 5 , further comprising a guide-wave body provided at one of the first flat face and/or the second flat face of the nonlinear optical crystal and configured to guide the terahertz wave generated from the nonlinear optical crystal in a direction according to a generation direction. 8. The terahertz wave generator of claim 1 , wherein the nonlinear optical crystal is plate shaped. 9. The terahertz wave generator of claim 1 , wherein each of the plurality of detectors is an imaging apparatus configured to capture an image according to intensity of a generated terahertz wave. 10. The terahertz wave generator of claim 1 , wherein one of the terahertz waves generated from the nonlinear optical crystal in the plurality of directions is illuminated onto the measurement sample, and another of the terahertz waves is illuminated onto the reference sample. 11. The terahertz wave generator of claim 1 , wherein each of the terahertz waves generated from the nonlinear optical crystal in the plurality of directions is illuminated onto different measurement samples or reference samples.
Three-wave interaction, e.g. sum-difference frequency generation (G02F1/3532 takes precedence) · CPC title
Physics · mapped topic
Particular phase matching techniques · CPC title
involving THZ radiation · CPC title
using far infrared light; using Terahertz radiation · CPC title
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