Microbubble generator device, systems and method to fabricate

Patent metadata

Field	Value
Publication number	US-10124338-B2
Application number	US-201515526922-A
Country	US
Kind code	B2
Filing date	Nov 19, 2015
Priority date	Nov 19, 2014
Publication date	Nov 13, 2018
Grant date	Nov 13, 2018

Abstract

The present disclosure relates to microbubble generator devices for deflecting objects in a liquid, systems for sorting objects that utilize such devices, and methods for fabricating such devices. At least one embodiment relates to a micro-fluidic device for deflecting objects in a liquid. The device includes a substrate for providing an object-containing liquid thereon. The device also includes a microbubble generator that includes at least one microbubble generating element. The microbubble generator is located on a surface of the substrate and in direct contact with the object-containing liquid when the object-containing liquid is provided on the substrate. The at least one microbubble generating element is configured to deflect a single object in the object-containing liquid through generation of a plurality of microbubbles.

First claim

The invention claimed is:

1. A micro-fluidic device for deflecting objects in a liquid, the device comprising:
a substrate for providing an object-containing liquid thereon; and
a microbubble generator comprising at least one microbubble generating element,
wherein the microbubble generator is located on a surface of the substrate and in direct contact with the object-containing liquid when the object-containing liquid is provided on the substrate,
wherein the at least one microbubble generating element is configured to deflect a single object in the object-containing liquid through generation of a plurality of microbubbles,
wherein the at least one microbubble generating element comprises a first series of connected microstructures, and
wherein each of the connected microstructures is configured to generate a microbubble in the object-containing liquid when the microbubble generator is powered.

2. The micro-fluidic device according to claim 1 ,
wherein the microbubble generator is a heating element,
wherein the at least one microbubble generating element comprises at least one micro-heater, and
wherein the at least one micro-heater is shaped such that at least two of the connected microstructures heat up simultaneously when an electrical current flows through the at least one micro-heater.

3. The micro-fluidic device according to claim 2 ,
wherein the at least one micro-heater is a circular meander shaped structure, and
wherein the at least two connected microstructures are electrically connected in parallel.

4. The micro-fluidic device according to claim 1 ,
wherein the microbubble generator is a heating element,
wherein the at least one microbubble generating element comprises at least one micro-heater,
wherein the at least one micro-heater further comprises a second series of connected microstructures connected in parallel to the first series of connected microstructures, and
wherein the at least one micro-heater is shaped such that at least two microstructures of different series of connected microstructures heat up simultaneously when an electrical current flows through the at least one micro-heater.

5. The micro-fluidic device according to claim 1 ,
wherein the microbubble generator is an electrolytic unit comprising at least a set of electrodes,
wherein the electrodes are shaped such that at least two microstructures generate microbubbles simultaneously when a voltage is applied to the electrodes.

6. The micro-fluidic device according to claim 1 , further comprising a non-conductive layer located in between the object-containing liquid and the microbubble generator when the object-containing liquid is provided on the substrate,
wherein the non-conductive layer comprises a plurality of cavities fabricated down to the microbubble generator, and
wherein each of the plurality of cavities is aligned with a corresponding one of the connected microstructures.

7. The micro-fluidic device according to claim 6 , wherein one of the plurality of cavities comprises at least one sharp corner.

8. The micro-fluidic device according to claim 6 , wherein a cross-section, parallel to the substrate, of one of the plurality of cavities is triangular shaped or rectangular shaped.

9. The micro-fluidic device according to claim 1 , wherein each of the connected microstructures comprises a portion having a cross-sectional dimension of 10 micrometers or smaller.

10. The micro-fluidic device according to claim 1 , wherein the microbubble generator is a heating element, wherein the microbubble generator comprises only one metal layer.

11. The micro-fluidic device according to claim 1 , further comprising a controller connected to the microbubble generator, wherein the controller is configured to monitor at least one parameter of the microbubble generator related to the generation of microbubbles.

12. The micro-fluidic device according to claim 11 ,
wherein the microbubble generator is a heating element,
wherein the at least one microbubble generating element is at least one micro-heater,
wherein the controller is configured to monitor a temperature of the heating element or configured to monitor a resistance of the heating element.

13. The micro-fluidic device according to claim 1 , wherein the microbubble generator further comprises a SiC layer for preventing deformation of the microbubble generator.

14. A system for sorting objects comprising:
a first micro-fluidic device for deflecting objects in a liquid, comprising:
a substrate for providing an object-containing liquid thereon; and
a microbubble generator comprising at least one microbubble generating element,
wherein the microbubble generator is located on a surface of the substrate and in direct contact with the object-containing liquid when the object-containing liquid is provided on the substrate,
wherein the at least one microbubble generating element is configured to deflect a single object in the object-containing liquid through generation of a plurality of microbubbles,
wherein the at least one microbubble generating element comprises a first series of connected microstructures, and
wherein each of the connected microstructures is configured to generate a microbubble in the object-containing liquid when the microbubble generator is powered; and

a first micro-fluidic channel,
wherein the first micro-fluidic device is positioned to deflect single objects propagating in the first micro-fluidic channel by generating microbubbles.

15. The system according to claim 14 , further comprising a second micro-fluidic channel fluidically connected to the first micro-fluidic channel,
wherein the first micro-fluidic device is positioned in the second micro-fluidic channel and configured for deflecting single objects propagating in the first micro-fluidic channel by generating microbubbles.

16. The system according to claim 15 , further comprising:
a third micro-fluidic channel fluidically connected to the first micro-fluidic channel,
wherein the second micro-fluidic channel and the third micro-fluidic channel are aligned and positioned at opposite sides of the first micro-fluidic channel;
a second micro-fluidic device positioned in the third micro-fluidic channel,
wherein the first micro-fluidic device and the second micro-fluidic device are configured to deflect single objects propagating in the first micro-fluidic channel.

17. A method for fabricating a micro-fluidic device for deflecting objects in a liquid, the method comprising:
providing a substrate;
providing a conductive layer on top of the substrate; and
patterning a microbubble generator comprising at least one microbubble generating element in the conductive layer,
wherein patterning the microbubble generator comprises patterning a series of connected microstructures, and
wherein each of the connected microstructures is configured to generate a microbubble when the microbubble generator is powered.

18. The method according to claim 17 , wherein patterning the microbubble generator comprising at least one microbubble generating element comprises fabricating the at least one microbubble generating element such that its shape allows at least two microstructures of the at least one microbubble generating element to generate microbubbles simultaneously when the at least one microbubble generating element is activated.

19. The method according to claim 18 , wherein patterning the microbubble generator comprising at least one microbubble generating element further comprises patterning at lea

Assignees

• Imec Vzw

Inventors

• Liu Chengxun
• Peumans Peter
• Lagae Liesbet
• Majeed Bivragh

Classifications

• G01N2015/1006

  for cytology · CPC title

• B01L2400/046

  Chemical or electrochemical formation of bubbles · CPC title

• B01L2400/06

  Valves, specific forms thereof · CPC title

• B01L2300/0864

  comprising only one inlet and multiple receiving wells, e.g. for separation, splitting · CPC title

• B01L2400/0442

  thermal energy, e.g. vaporisation, bubble jet · CPC title