Magnetoresistive sensor with enhanced uniaxial anisotropy

Patent metadata

Field	Value
Publication number	US-10121499-B2
Application number	US-201715618970-A
Country	US
Kind code	B2
Filing date	Jun 9, 2017
Priority date	Sep 11, 2015
Publication date	Nov 6, 2018
Grant date	Nov 6, 2018

Abstract

A read sensor that includes a free layer having a magnetization that changes according to an external magnetic field. The read sensor also includes an additional magnetic layer and a non-magnetic layer. The non-magnetic layer may include a corrugated surface facing the additional magnetic layer. The corrugated surface is configured to enhance uniaxial anisotropy in the read sensor.

First claim

What is claimed is:

1. A method of forming a reader, the method comprising:
forming a non-magnetic layer having a corrugated or rough upper surface;
forming a first pinned layer on the corrugated or rough upper surface of the non-magnetic layer, wherein the first pinned layer comprises a bottom surface and a top surface, and wherein the bottom surface of the first pinned layer is in contact with the corrugated or rough upper surface, and wherein at least a portion of the top surface of the first pinned layer above the corrugated or rough upper surface is uneven;
performing a smoothing operation on the top surface of the first pinned layer to remove the unevenness by:
depositing a cap layer on the top surface of the first pinned layer; and
applying plasma treatment to the cap layer and the first pinned layer to remove the cap layer and to partially remove the first pinned layer to provide a smooth top surface of the first pinned layer; and

forming a free layer over the first pinned layer.

2. The method of claim 1 and further comprising forming an antiferromagnetic (AFM) layer adjacent, to the first pinned layer.

3. The method of claim 1 and further comprising forming a second pinned layer on the smooth top surface of the first pinned layer.

4. The method of claim 3 and further comprising forming a separation layer on the second pinned layer.

5. The method of claim 4 and further comprising forting the free layer on the separation layer.

6. A method of forming a reader comprising:
forming a bottom shield having a bottom surface, a top surface, a front surface and a back surface, wherein the front surface of the bottom shield forms a portion of a bearing surface of the reader;
forming a recessed antiferromagnetic (AFM) layer on a rear portion of the top surface of the bottom shield, wherein the recessed AFM layer comprises a bottom surface, a top surface, a front surface and a back surface;
forming a reader front shield on a front portion of the top surface of the bottom shield, wherein the reader front shield comprises a bottom surface, a top surface, a front surface and a back surface, wherein the back surface of the reader front shield is in contact with the front surface of the recessed AFM layer, and wherein the front surface of the reader front shield forms a portion of the bearing surface;
forming a non-magnetic layer on the top surface of the reader front shield, wherein the non-magnetic layer comprises a bottom surface, a top surface, a front surface and a back surface, wherein the top surface of the non-magnetic layer is a corrugated surface, and wherein the front surface of the non-magnetic layer forms a portion of the bearing surface; and
forming a pinned magnetic layer over the top surface of the recessed AFM layer and over the corrugated surface of the non-magnetic layer;
forming a free layer over the pinned magnetic layer.

7. The method of claim 6 and wherein forming the pinned magnetic layer comprises forming a first pinned layer on the top surface of the recessed AFM layer and on the corrugated surface of the non-magnetic layer, and wherein the first pinned layer comprises a bottom surface, a top surface, a back surface and a front surface, and wherein a front surface of the first pinned layer forms a portion of the bearing surface, and wherein at least a portion of the top surface of the first pinned layer above the corrugated surface in uneven.

8. The method of claim 7 and further comprising performing a smoothing operation on the top surface of the first pinned layer to remove the unevenness.

9. The method of claim 8 and wherein performing the smoothing operation to remove the unevenness comprises:
depositing a cap layer on the top surface of the first pinned layer; and
applying plasma treatment to the cap layer and the first pinned layer to remove the cap layer and to partially remove the first pinned layer to provide a smooth top surface of the pinned layer.

10. The method of claim 9 and wherein forming the pinned magnetic layer further comprises forming a second pinned layer on the smooth top surface of the first pinned layer.

11. The method of claim 10 and further comprising forming a separation layer on the second pinned layer.

12. The method of claim 11 and further comprising forming the free layer on the separation layer.

13. A method of forming a reader, the method comprising:
forming a bottom shield;
forming a non-magnetic layer over the bottom shield, the non-magnetic layer having a corrugated or rough upper surface;
forming a first pinned layer on the corrugated or rough upper surface of the non-magnetic layer, wherein the first pinned layer comprises a bottom surface and a top surface, and wherein the bottom surface of the first pinned layer is in contact with the corrugated or rough upper surface, and wherein at least a portion of the top surface of the first pinned layer above the corrugated or rough upper surface is uneven;
performing a smoothing operation on the top surface of the first pinned layer to remove the unevenness by:
depositing a cap layer on the top surface of the first pinned layer; and
applying plasma treatment to the cap layer and the first pinned layer to remove the cap layer and to partially remove the first pinned layer to provide a smooth top surface of the first pinned layer; and

forming a free layer over the first pinned layer.

14. The method of claim 13 and further comprising forming an antiferromagnetic (AFM) layer adjacent to the first pinned layer.

15. The method of claim 13 and further comprising forming a second pinned layer on the smooth top surface of the first pinned layer.

16. The method of claim 15 and further comprising forming a separation layer on the second pinned layer.

17. The method of claim 16 and further comprising forming the free layer on the separation layer.

Assignees

• Seagate Technology Llc

Inventors

• Hassan Sameh
• Jung Wonjoon
• Kief Mark
• Ormston Marcus

Classifications

• G11B5/3912

  Arrangements in which the active read-out elements are transducing in association with active magnetic shields, e.g. magnetically coupled shields (G11B5/3916 takes precedence) · CPC title

• G11B5/398

  Specially shaped layers · CPC title

• G11B5/3906

  Details related to the use of magnetic thin film layers or to their effects · CPC title

• H01L43/00

  Electricity · mapped topic

• G11B5/3163 Primary

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title