Power-scalable nonlinear optical wavelength converter

Patent metadata

Field	Value
Publication number	US-10120262-B2
Application number	US-201715809016-A
Country	US
Kind code	B2
Filing date	Nov 10, 2017
Priority date	Jul 1, 2015
Publication date	Nov 6, 2018
Grant date	Nov 6, 2018

Abstract

A system includes a nonlinear crystal positioned such that a focus of a laser beam is outside the nonlinear crystal in at least one plane perpendicular to a beam propagation direction of the laser beam. The nonlinear crystal is disposed in a crystal mount assembly. A laser beam may be directed at the nonlinear crystal for wavelength conversion. The system may be used as a deep-UV wavelength converter.

First claim

What is claimed is:

1. A method comprising:
generating a laser beam;
directing the laser beam at a nonlinear crystal configured for wavelength conversion, wherein the nonlinear crystal is positioned such that a focus of the laser beam is outside the nonlinear crystal in at least one plane perpendicular to a beam propagation direction of the laser beam, wherein the nonlinear crystal is disposed on a crystal mount assembly, wherein the crystal mount assembly provides an angle stability of greater than 0% and less than or equal to 27% of an angular acceptance range during operation, wherein the crystal mount assembly includes a plurality of mounting features at different distances from a laser source in the beam propagation direction, wherein each of the mounting features includes a hole that the crystal mount assembly is fastened into, and wherein a beam size of the laser beam in the nonlinear crystal is provided by selecting one of the mounting features; and
nonlinearly converting the laser beam from a first wavelength to a second wavelength with the nonlinear crystal.

2. The method of claim 1 , wherein the nonlinearly converting is one of second harmonic generation, sum-frequency generation, or difference frequency generation.

3. The method of claim 1 , further comprising directing the laser beam through beam shaping optics disposed between a laser source and the nonlinear crystal and disposed downstream of the nonlinear crystal in the beam propagation direction.

4. The method of claim 1 , further comprising adjusting a beam size of the laser beam in the nonlinear crystal with the crystal mount assembly by adjusting a distance between a center of the nonlinear crystal and the focus.

5. The method of claim 1 , wherein the nonlinear crystal is positioned such that the focus of the laser beam is outside the nonlinear crystal in the at least one plane perpendicular to the beam propagation direction of the laser beam with a Rayleigh range configured such that time averaged fundamental optical power density or harmonic optical power density at the spatial peak of the beam profile on or in at least one optical component in the system is limited to below 1 MW/cm 2 .

6. The method of claim 1 , wherein the laser beam is a pulsed laser beam, and wherein the nonlinear crystal is positioned such that the focus of the pulsed laser beam is outside the nonlinear crystal in the at least one plane perpendicular to the beam propagation direction of the pulsed laser beam with a Rayleigh range configured such that fundamental optical fluence power density or harmonic optical fluence on or in at least one optical component of the system is limited to below 10 J/cm 2 .

7. The method of claim 1 , wherein the crystal mount assembly is adjustable, and wherein the nonlinear crystal is positioned such that the focus of the laser beam is outside the nonlinear crystal in the at least one plane perpendicular to the beam propagation direction of the laser beam with a Rayleigh range configured such that time-averaged fundamental optical power density or harmonic optical power density at the spatial peak of the beam profile on or in at least one optical component in the system is limited to below 1 MW/cm 2 .

8. The method of claim 1 , wherein the laser beam is a pulsed laser beam, wherein the crystal mount assembly is adjustable, and wherein the nonlinear crystal is positioned such that the focus of a pulsed laser beam is outside the nonlinear crystal in the at least one plane perpendicular to the beam propagation direction of the pulsed laser beam with a Rayleigh range configured such that fundamental optical fluence or harmonic optical fluence on or in at least one optical component in the system is limited to below 10 J/cm 2 .

9. The method of claim 1 , wherein the focus is at least one of circular, elliptical, or astigmatic.

10. The method of claim 1 , wherein the focus is elliptical, and wherein the focus in a plane parallel to a walk-off is larger than the focus in a plane perpendicular to the walk-off.

11. The method of claim 1 , wherein the focus is astigmatic, and wherein the focus in one plane is inside the nonlinear crystal and the focus in another plane is outside the nonlinear crystal.

12. The method of claim 1 , wherein the focus is astigmatic and elliptical, wherein the focus in one plane is inside the nonlinear crystal and the focus in another plane is outside the nonlinear crystal, and wherein the focus inside the nonlinear crystal has a larger width than the focus outside the nonlinear crystal.

13. The method of claim 1 , further comprising fastening the crystal mount assembly into one of the mounting features.

14. The method of claim 13 , wherein the fastening comprises screwing the crystal mount assembly into one of the mounting features.

Assignees

• Kla Tencor Corp

Inventors

• Woll Dirk

Classifications

• H01S3/108

  using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering {(mode locking using a non-linear element H01S3/1112)} · CPC title

• H01S3/08086 Primary

  Multiple-wavelength emission · CPC title

• H01S3/0092

  Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity (nonlinear frequency conversion per se G02F1/35) · CPC title

• H01S3/005

  Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title

• G02F1/3551

  Crystals · CPC title