Electrostatic capacitance type transducer and drive method therefor

Patent metadata

Field	Value
Publication number	US-10119941-B2
Application number	US-201514877082-A
Country	US
Kind code	B2
Filing date	Oct 7, 2015
Priority date	Oct 10, 2014
Publication date	Nov 6, 2018
Grant date	Nov 6, 2018

Abstract

A drive method for an electrostatic capacitance type transducer is provided. The electrostatic capacitance type transducer includes a plurality of elements, the element including one or more cells, the cell having a first electrode and a second electrode separated from the first electrode by a gap, the first electrode or the second electrode in the plurality of elements being applied with an alternating current voltage. The plurality of elements includes a first element and a second element. A waveform of an alternating current voltage applied to the first element is set the similar as a waveform of an alternating current voltage applied to the second element. A phase difference between the alternating current voltage applied to the first element and the alternating current voltage applied to the second element is set equal to approximately 90 degrees.

First claim

What is claimed is:

1. A drive method for an electrostatic capacitance type transducer including a plurality of elements, each of the plurality of elements including at least one cell, the cell having a first electrode and a second electrode separated from the first electrode, the plurality of elements including a first element and a second element, the first electrode or the second electrode in the first and second elements being applied with an alternating current voltage, the drive method comprising:
setting a similar waveform of an alternating current voltage applied to the first and second elements; and
setting a phase difference between the alternating current voltage applied to the first element and the alternating current voltage applied to the second element to be equal to approximately 90 degrees, and
transmitting an ultrasonic wave from the first element and the second element by applying the alternating current voltage that are different in phase from each other by approximately 90 degrees to the first electrode or the second electrode of the first element and to the first electrode or the second electrode of the second element.

2. The drive method for an electrostatic capacitance type transducer according to claim 1 , wherein the plurality of elements includes a first group comprising a plurality of the first elements and a second group comprising a plurality of the second element,
an alternating current voltage having a similar waveform and a same phase is applied to the first elements of the first group, and
an alternating current voltage having the similar waveform as and a phase difference of about 90 degrees from the alternating current voltage applied to the first elements in the first group is applied to the second elements in the second group.

3. The drive method for an electrostatic capacitance type transducer according to claim 1 , wherein alternating current voltages having a similar waveform and provided with a phase difference for forming an acoustic wave beam are applied to each element in a first group including a plurality of the first element, and
wherein an alternating current voltage having the similar waveform as the waveform of the alternating current voltage applied to the elements in the first group and having a phase difference of approximately 90 degrees as compared with the waveform of the alternating current voltage applied to the elements in the first group, and further provided with a phase difference for forming an acoustic wave beam is applied to each element in a second group including a number of the second elements same as a number of the first elements.

4. The drive method for an electrostatic capacitance type transducer according to claim 2 , wherein the alternating current voltages are applied in such a manner that the elements in the first group and the elements in the second group are alternately arranged.

5. An ultrasonic wave diagnosis device comprising:
an electrostatic capacitance type transducer configured to be driven by the drive method according to claim 1 ;
a power supply configured to apply a direct current (DC) voltage to the electrostatic capacitance type transducer;
a waveform generation device configured to apply alternating current voltages to the electrostatic capacitance type transducer;
a switch configured to switch a mode between a reception mode in which the DC voltage is applied to the electrostatic capacitance type transducer and a transmission mode in which the alternating current voltages are applied to the electrostatic capacitance type transducer; and
a signal processing unit configured to process a signal received by the electrostatic capacitance type transducer.

6. A subject information acquisition device comprising:
an electrostatic capacitance type transducer configured to be driven by the drive method according to claim 1 ,
wherein the subject information acquisition device is configured to transmit an acoustic wave output by the electrostatic capacitance type transducer to a subject, receive an acoustic wave returned from the subject, and acquire information of the subject by using the received acoustic wave.

7. The drive method for an electrostatic capacitance type transducer according to claim 1 , wherein the phase difference between the alternating current voltage applied to the first element and the alternating current voltage applied to the second element is in a range of 85 to 95 degrees.

8. An electrostatic capacitance type transducer including a plurality of elements, each of the elements including one or more cells, the cell having a first electrode and a second electrode separated from a first electrode by a gap, the plurality of elements including a first element and a second element, the electrostatic capacitance type transducer comprising a waveform generation device configured to apply an alternating current voltage to the first electrode or the second electrode in the first elements and the second elements,
wherein the waveform generation device is configured to set a waveform of an alternating current voltage applied to the first element to be similar as a waveform of an alternating current voltage applied to the second element, and set a phase difference between the alternating current voltage applied to the first element and the alternating current voltage applied to the second element to be equal to approximately 90 degrees, and
wherein the electrostatic capacitance type transducer is configured to transmit an ultrasonic wave from the first element and the second element by applying the alternating current voltage that are different in phase from each other by approximately 90 degrees to the first electrode or the second electrode of the first element and to the first electrode or the second electrode of the second element.

9. The electrostatic capacitance type transducer according to claim 8 , wherein the waveform generation device is configured to apply an alternating current voltage having a similar waveform and a same phase to elements in a first group including at least one or more of the first element, and
wherein the waveform generation device is configured to apply an alternating current voltage having the similar waveform as the waveform of the alternating current voltage applied to the elements in the first group and having a phase difference of approximately 90 degrees as compared with the waveform of the alternating current voltage applied to the elements in the first group to elements in a second group including a number of the second elements same as a number of the first element.

10. The electrostatic capacitance type transducer according to claim 8 , wherein the waveform generation device is configured to apply alternating current voltages having a similar waveform and provided with a phase difference for forming an acoustic wave beam to each element in a first group including at least one or more of the first element, and
wherein the waveform generation device is configured to apply an alternating current voltage having the similar waveform as the waveform of the alternating current voltage applied to the elements in the first group and having a phase difference of approximately 90 degrees as compared with the waveform of the alternating current voltage applied to the elements in the first group, and further provided with a phase difference for forming an acoustic wave beam to each element in a second group including a number of the second elements same as a number of the first element.

11. The electrostatic capacitance type transducer according to claim 9 , wherein the waveform generation device is configured in such a manner that the alternating current voltages are ap

Assignees

• Canon Kk

Inventors

• Akiyama Takahiro
• Kato Ayako

Classifications

• B06B2201/51

  Electrostatic transducer · CPC title

• B06B1/0292

  Electrostatic transducers, e.g. electret-type · CPC title

• G01N29/34

  Generating the ultrasonic, sonic or infrasonic waves {, e.g. electronic circuits specially adapted therefor} · CPC title

• G01N29/2406 Primary

  Electrostatic or capacitive probes, e.g. electret or cMUT-probes · CPC title

• B06B1/0207

  Driving circuits (specially adapted for particular applications, see the relevant subclass, e.g. G01; circuits for steering transducer arrays G10K11/34; basic circuits H03) · CPC title