Method for detecting a perturbation by hysteretic cycle using a nonlinear electromechanical resonator and device using the method

Patent metadata

Field	Value
Publication number	US-10119856-B2
Application number	US-201414558314-A
Country	US
Kind code	B2
Filing date	Dec 2, 2014
Priority date	Dec 3, 2013
Publication date	Nov 6, 2018
Grant date	Nov 6, 2018

Abstract

A method is provided for detecting a perturbation with respect to an initial state, of a device including at least one resonant mechanical element exhibiting a physical parameter sensitive to a perturbation such that the said perturbation modifies the resonance frequency of the said resonant mechanical element. A device is provided for detecting a perturbation by hysteretic cycle having at least one electromechanical resonator with nonlinear behavior and means for actuation and detection of the reception signal via a transducer so as to analyze the response signal implementing the method. A mass sensor and a mass spectrometer using the device are also provided.

First claim

The invention claimed is:

1. A method for detecting a perturbation of a device comprising resonant mechanical element exhibiting a physical parameter sensitive to the perturbation, said method comprising:
exciting the resonant mechanical element to vibrate the resonant mechanical element at a non-linear amplitude and at a vibration frequency, the amplitude and the frequency being linked by an initial function, the perturbation generating a measurement function; and
detecting and analyzing variations of the amplitude between an amplitude of the initial function and an amplitude of the measurement function; and
wherein the initial function exhibits a bifurcation frequency, corresponding to a change of the frequency as a function of amplitude and possessing at least one unstable frequency band having at least two stable amplitudes for the same frequency, and at least one stable frequency band having a single stable amplitude corresponding to a single frequency,
wherein the exciting is carried out at a variable vibration frequency within a frequency band defined by a minimum frequency and a maximum frequency, and according to at least one frequency cycle centered on a central frequency Ω op , and one of the minimum and maximum frequencies being situated in the stable frequency band of the initial function, the other maximum or minimum frequency being situated in the unstable frequency band.

2. The method of claim 1 , wherein the vibration frequency varies around the central frequency Ω op according to Ω(t)=Ω op +δΩ Cos(επt+φ), with ε the frequency scan rate, φ having a value lying between 0 and 2π.

3. The method of claim 1 , wherein a frequency scan rate ε of a cycle lies between about 1 Hz and 100 kHz, or with a ratio επ/Ω op such that 0<επ/Ω op <10 −1 .

4. A device for detecting a perturbation with respect to an initial state, comprising:
resonant mechanical element exhibiting a physical parameter sensitive to a perturbation such that the perturbation modifies a resonance frequency of said resonant mechanical element;
an excitation source configured to cause the resonant mechanical element to vibrate at a non-linear amplitude and at a vibration frequency, the amplitude and the frequency being linked by an initial function, the perturbation generating a measurement function; and
means for detecting variations of amplitude of vibrations of the mechanical element between an amplitude of the initial function, and an amplitude of the measurement function,
wherein the initial function, exhibits a bifurcation frequency corresponding to an increase or a decrease of the frequency as a function of amplitude and possesses at least one unstable frequency band in which there exist at least two stable amplitudes for one and the same frequency, and at least one stable frequency band in which a single stable amplitude corresponds to a single frequency, and
wherein the excitation source comprises means which vary the vibration frequency in a frequency band defined by a minimum frequency and a maximum frequency and according to at least one frequency cycle centered on a central frequency, one of the minimum or maximum frequencies being situated in the stable frequency band of the initial function, the other maximum or minimum frequency being situated in the unstable frequency band.

5. The device of claim 4 , wherein the resonant mechanical element is a resonator beam and the excitation source comprises an actuation electrode facing the resonator.

6. The device of claim 5 , wherein the resonator beam has nanometric dimensions, a drive electrode is configured to apply voltages of the order of a few Volts, a gap between the drive electrode and the resonator being of the order of 10 nm and 1 μm.

7. A mass sensor comprising a device according to claim 4 .

8. A mass spectrometer comprising a device according to claim 4 , and being configured to measure a mass of particles deposited on the resonant mechanical element.

Assignees

• Commissariat Energie Atomique
• Ecole Nat Travaux Publics De Letat
• Institut Nat Sciences Appliquees De Lyon
• Centre Nat Rech Scient

Inventors

• Hentz Sebastien
• Baguet Sebastien
• Dufour Regis
• Lamarque Claude-Henri
• Nguyen Van Nghi

Classifications

• B81B2201/0214

  Biosensors; Chemical sensors · CPC title

• H01J49/26

  Mass spectrometers or separator tubes · CPC title

• H03H2009/02267

  having dimensions of atomic scale, e.g. involving electron transfer across vibration gap · CPC title

• G01H13/00 Primary

  Measuring resonant frequency · CPC title

• B81B2203/0118

  Cantilevers · CPC title