Cryopump arrangement for improved pump speed

Patent metadata

Field	Value
Publication number	US-10119529-B2
Application number	US-201514660567-A
Country	US
Kind code	B2
Filing date	Mar 17, 2015
Priority date	Mar 17, 2015
Publication date	Nov 6, 2018
Grant date	Nov 6, 2018

Abstract

An apparatus including a movable cryopump that may be disposed in a first operational position and a second regeneration position is disclosed. In the first operational position, the front surface of the cryopump may be disposed in the same plane as the wall of the processing chamber, effectively serving as a part of a chamber wall. In certain embodiments, the front surface of the cryopump may extend into the processing chamber. In the second regeneration position, the cryopump is retracted into a cavity, which is isolated from the processing chamber by a movable gate. The first operational position serves to enhance the pumping speed of the cryopump, while the second regeneration position ensures that previously trapped molecules are not released back into the processing chamber.

First claim

What is claimed is:

1. A pumping apparatus, comprising:
a cryopump, having a front surface through which molecules enter and interior surfaces cooled through the use of closed loop compressed helium or other cooled fluids, the cryopump disposed in a cavity, the cavity being adjacent to a processing chamber;
an actuator to move the cryopump from a first operational position to a second regeneration position; and
a bellows attached at one end to the body of the cryopump and attached at a second end to a wall of the cavity so as to partition the cavity into a first portion and a second portion, wherein the first portion is isolated from the processing chamber, the front surface of the cryopump is disposed in the second portion and wherein the actuator is isolated from the processing chamber; and
a movable gate to separate the cavity from the processing chamber, the movable gate having an open position and a closed position;
wherein in the first operational position, the front surface extends beyond the movable gate toward the processing chamber when the movable gate is in the open position, and in the second regeneration position, the front surface is disposed behind the movable gate, so that the movable gate can move to the closed position, isolating the cavity from the processing chamber.

2. The pumping apparatus of claim 1 , wherein the cryopump is in communication with the processing chamber in the first operational position, and wherein the actuator is isolated from the processing chamber in the first operational position.

3. The pumping apparatus of claim 2 , wherein the actuator is disposed inside the cavity.

4. The pumping apparatus of claim 3 , wherein the bellows is used to isolate the actuator from the processing chamber.

5. The pumping apparatus of claim 1 , wherein the actuator is disposed outside the cavity.

6. The pumping apparatus of claim 5 , further comprising a bearing shaft in communication with the cryopump and the actuator, wherein the cavity is defined by an overpressure containment structure having an opening, and the bearing shaft passes through the opening, wherein the bellows isolates the bearing shaft from the processing chamber.

7. The pumping apparatus of claim 5 , wherein a portion of the cryopump is disposed outside the cavity in the first operational position.

8. The pumping apparatus of claim 2 , wherein the cryopump is isolated from the processing chamber in the regeneration position.

9. A pumping apparatus, comprising:
an overpressure containment structure, defining a cavity, the overpressure containment structure having an opening;
a cryopump, having a body and a front surface, the cryopump disposed in the cavity, the cavity being adjacent to a processing chamber;
a movable gate to separate the cavity from the processing chamber, the movable gate having an open position and a closed position;
a bearing shaft, attached to the body of the cryopump, passing through the opening in the overpressure containment structure;
an external collar surrounding the bearing shaft, providing a vacuum seal between the cavity and an exterior of the cavity;
a bellows attached at one end to the body of the cryopump and attached at a second end to a wall of the cavity so as to divide the cavity into a first portion and a second portion, where the first portion is always isolated from the processing chamber, wherein the opening and the bearing shaft are disposed in the first portion and the front surface of the cryopump is disposed in the second portion; and
an actuator, disposed outside the cavity, in communication with the bearing shaft to move the cryopump between a first operational position where the front surface extends beyond the movable gate toward the processing chamber when the movable gate is in the open position, and a second regeneration position, where the front surface is disposed behind the movable gate, so that the movable gate can move to the closed position, isolating the cavity from the processing chamber.

10. The pumping apparatus of claim 9 , wherein the bearing shaft comprises electrical and fluid conduits to deliver electrical signals, gasses and fluids to and from the cryopump.

11. The pumping apparatus of claim 9 , further comprising a load bearing structure to support the bearing shaft, the load bearing structure in communication with the actuator and the bearing shaft, and adapted to roll on a floor or other surface.

12. The pumping apparatus of claim 9 , wherein the body of the cryopump extends beyond an interior surface of a chamber wall, while in the first operational position, where the chamber wall surrounds and defines the processing chamber.

13. The pumping apparatus of claim 9 , wherein the front surface of the cryopump extends to an interior surface of a chamber wall, while in the first operational position, where the chamber wall surrounds and defines the processing chamber.

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Borichevsky Steven C
• Hermanson Eric D

Classifications

• F04B37/08

  by condensing or freezing, e.g. cryogenic pumps · CPC title

• B01D8/00

  Cold traps; Cold baffles (pumps for evacuating by condensing or freezing F04B37/08) · CPC title

• F04B37/085 Primary

  Regeneration of cryo-pumps · CPC title