Image sensor, method of manufacturing the image sensor, and electronic device including the image sensor
US-2016073065-A1 · Mar 10, 2016 · US
US10115757B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10115757-B2 |
| Application number | US-201514743959-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 18, 2015 |
| Priority date | Aug 22, 2014 |
| Publication date | Oct 30, 2018 |
| Grant date | Oct 30, 2018 |
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An image sensor may include: a substrate including a substrate comprising a photoelectric conversion element; a pixel lens formed over the substrate and comprising a plurality of light condensing layers in which a lower layer has a larger area than an upper layer; a color filter layer covering the pixel lens; and an anti-reflection structure formed over the color filter layer.
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What is claimed is: 1. An image sensor comprising: a substrate comprising a photoelectric conversion element; a pixel lens formed over the substrate and comprising a plurality of light condensing layers in which a lower layer has a larger area than an upper layer; a color filter layer covering an entire surface of the pixel lens; and an anti-reflection structure formed over the color filter layer, wherein the anti-reflection structure prevents reflection of incident light, wherein each of the plurality of light condensing layers has a flat surface, and the lower layer exposed by the upper layer has a smaller width than the wavelength of the incident light, and wherein the upper layer has a smaller effective refractive index than the lower layer, and the upper layer and the lower layer are formed of a same material. 2. The image sensor of claim 1 , further comprising: a focusing layer provided between the photoelectric conversion element and the pixel lens. 3. The image sensor of claim 2 , wherein the focusing layer has a larger refractive index than the pixel lens. 4. The image sensor of claim 2 , wherein the focusing layer has the same area as or a larger area than the pixel lens. 5. The image sensor of claim 2 , wherein a focal distance between the pixel lens and the photoelectric conversion element is inversely proportional to the thickness of the focusing layer. 6. The image sensor of claim 1 , wherein the pixel lens has a multilayer stepped structure. 7. The image sensor of claim 1 , wherein the lower layer exposed by the upper layer has a smaller width than the wavelength of incident light which colors are separated through the color filter layer. 8. The image sensor of claim 1 , wherein the plurality of light condensing layers have the same shape and are arranged in parallel to each other. 9. The image sensor of claim 1 , wherein the upper layer has the same thickness as or a smaller thickness than the lower layer. 10. The image sensor of claim 1 , wherein the upper layer has the same refractive index as or a smaller refractive index than the lower layer. 11. The image sensor of claim 1 , further comprising: an anti-reflection layer formed over the pixel lens. 12. The image sensor of claim 1 , wherein the color filter layer covers the entire surface of the pixel lens and has a flat top surface. 13. The image sensor of claim 1 , wherein the color filter layer has a smaller refractive index than the pixel lens. 14. The image sensor of claim 1 , wherein the anti-reflection structure comprises an anti-reflection layer or a hemispherical lens. 15. The image sensor of claim 1 , wherein the color filter layer is contacted with the pixel lens. 16. An electronic device comprising: an optical system; an image sensor suitable for receiving light from the optical system and comprising a pixel array in which a plurality of unit pixels are arranged in a matrix shape; and a signal processing unit suitable for processing a signal outputted from the image sensor, wherein each of the unit pixels comprises: a substrate comprising a photoelectric conversion element; a pixel lens formed over the substrate and comprising a plurality of light condensing layers in which a lower layer has a larger area than an upper layer; a color filter layer covering an entire surface of the pixel lens; and an anti-reflection structure formed over the color filter layer, wherein the anti-reflection structure prevents reflection of incident light, wherein each of the plurality of light condensing layers has a flat surface, and the lower layer exposed by the upper layer has a smaller width than the wavelength of the incident light, and wherein the upper layer has a smaller effective refractive index than the lower layer, and the upper layer and the lower layer are formed of a same material. 17. The electronic device of claim 16 , further comprising: a focusing layer provided between the photoelectric conversion element and the pixel lens. 18. The electronic device of claim 17 , wherein the focusing layer has a larger refractive index than the pixel lens, and wherein the color filter layer has a smaller refractive index than the pixel lens. 19. The electronic device of claim 17 , wherein a focal distance between the pixel lens and the photoelectric conversion element is inversely proportional to the thickness of the focusing layer. 20. The image sensor of claim 16 , wherein the color filter layer is contacted with the pixel lens.
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