Optical multilayer coating, optical lens, and method of manufacturing optical multilayer coating

Patent metadata

Field	Value
Publication number	US-10114150-B2
Application number	US-201415103781-A
Country	US
Kind code	B2
Filing date	Dec 5, 2014
Priority date	Dec 13, 2013
Publication date	Oct 30, 2018
Grant date	Oct 30, 2018

Abstract

The present invention relates to an optical multilayer coating placed on or above a substrate. The optical multilayer coating includes a high-refractive index layer with a refractive index of 1.76 to 2.7, a magnesium oxyfluoride layer, and a magnesium fluoride layer. The high-refractive index layer, the magnesium oxyfluoride layer, and the magnesium fluoride layer are stacked on or above the substrate in this order and are in contact with each other. The magnesium oxyfluoride layer has a composition represented by the following formula:

Mg x O y F z   (1)
where z/x is not less than 0.01 nor greater than 1.45 and z/y is not less than 0.01 nor greater than 3.17.

First claim

The invention claimed is:

1. An optical multilayer coating formed on or above a substrate, comprising:
a high-refractive index layer with a refractive index of 1.76 to 2.7;
a magnesium oxyfluoride layer; and
a magnesium fluoride layer,
the high-refractive index layer, the magnesium oxyfluoride layer, and the magnesium fluoride layer being stacked on or above the substrate in this order and being in direct contact with each other,
wherein the magnesium oxyfluoride layer has a composition represented by the following formula:
Mg x O y F z   (1)

where z/x is not less than 0.01 nor greater than 1.45 and z/y is not less than 0.01 nor greater than 3.17.

2. The optical multilayer coating according to claim 1 , wherein the magnesium oxyfluoride layer has a thickness of 5 nm to 1.5 micrometer.

3. The optical multilayer coating according to claim 1 , wherein the high-refractive index layer contains Ta 2 O 5 , Nb 2 O 5 , or TiO 2 .

4. The optical multilayer coating according to claim 1 , wherein the high-refractive index layer contains Ta 2 O 5 or Nb 2 O 5 .

5. The optical multilayer coating according to claim 1 , wherein the magnesium fluoride layer has a refractive index of 1.40 or less at a wavelength of 550 nm.

6. An optical lens comprising an optical multilayer coating formed on or above a lens, wherein the optical multilayer coating includes a high-refractive index layer with a refractive index of 1.76 to 2.7, a magnesium oxyfluoride layer, and a magnesium fluoride layer; the high-refractive index layer, the magnesium oxyfluoride layer, and the magnesium fluoride layer are stacked on or above the lens in this order and are in direct contact with each other; and the magnesium oxyfluoride layer has a composition represented by the following formula:
Mg x O y F z   (1)

where z/x is not less than 0.01 nor greater than 1.45 and z/y is not less than 0.01 nor greater than 3.17.

7. The optical lens according to claim 6 , wherein the magnesium oxyfluoride layer has a thickness of 5 nm to 1.5 micrometer.

8. The optical lens according to claim 6 , wherein the high-refractive index layer contains Ta 2 O 5 , Nb 2 O 5 , or TiO 2 .

9. The optical lens according to claim 6 , wherein the high-refractive index layer contains Ta 2 O 5 or Nb 2 O 5 .

10. The optical lens according to claim 6 , wherein the magnesium fluoride layer has a refractive index of 1.40 or less at a wavelength of 550 nm.

11. A method of manufacturing an optical multilayer coating, comprising:
a step of providing a high-refractive index layer on or above a substrate;
a step of forming a magnesium oxyfluoride layer on the high-refractive index layer; and
a step of forming a magnesium fluoride layer directly on the magnesium oxyfluoride layer,
wherein the magnesium oxyfluoride layer has a composition represented by the following formula:
Mg x O y F z   (1)

where z/x is not less than 0.01 nor greater than 1.45 and z/y is not less than 0.01 nor greater than 3.17.

12. The method of manufacturing the optical multilayer coating according to claim 11 , wherein the step of forming the magnesium fluoride layer uses a sputtering process.

13. The method of manufacturing the optical multilayer coating according to claim 11 , wherein the step of forming the magnesium oxyfluoride layer and the step of forming the magnesium fluoride layer use a sputtering process.

14. The method of manufacturing the optical multilayer coating according to claim 11 , wherein the high-refractive index layer contains Ta 2 O 5 , Nb 2 O 5 , or TiO 2 .

15. The method of manufacturing the optical multilayer coating according to claim 11 , wherein the high-refractive index layer contains Ta 2 O 5 or Nb 2 O 5 .

Assignees

• Canon Kk

Inventors

• Akiba Hideo

Classifications

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• G02B1/115 Primary

  Multilayers · CPC title

• C03C17/3452

  comprising a fluoride · CPC title

• C23C14/0057

  using reactive gases other than O2, H2O, N2, NH3 or CH4 · CPC title

• C23C14/35

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title