Thermal mass flow meter and mass flow controller
US-2016178420-A1 · Jun 23, 2016 · US
US10113892B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10113892-B2 |
| Application number | US-201615353277-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 16, 2016 |
| Priority date | Nov 30, 2015 |
| Publication date | Oct 30, 2018 |
| Grant date | Oct 30, 2018 |
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A measuring apparatus including a tubular member, a sensor fixed to an outer peripheral surface of the tubular member, and a circuit board that relays a detection signal from the sensor, the circuit board being fixed to the outer peripheral surface in an area different from an area where the sensor is fixed and being separated from the sensor, and a wire that electrically connects the sensor and the circuit board.
Opening claim text (preview).
The invention claimed is: 1. A measuring apparatus comprising: a tubular member; a sensor fixed to a first area on an outer peripheral surface of the tubular member; a circuit board that relays a detection signal from the sensor, the circuit board being fixed to a second area on the outer peripheral surface that is different from the first area and being separated from the sensor; and one or more wires that electrically connect the sensor and the circuit board, wherein the sensor and the circuit board are separately supported by being fixed to the first and second areas on the outer peripheral surface, respectively, and are otherwise connected to one another solely by electrical connection via the one or more wires so as to reduce a mechanical coupling between the circuit board and the sensor. 2. The measuring apparatus according to claim 1 , wherein a bottom surface of the sensor is separated from the circuit board. 3. The measuring apparatus according to claim 1 , wherein the circuit board is provided with a cut-away, and the sensor is positioned in the cut-away. 4. The measuring apparatus according to claim 1 , wherein the sensor comprises a diaphragm. 5. The measuring apparatus according to claim 1 , wherein the tubular member is a glass capillary. 6. The measuring apparatus according to claim 1 , further comprising: a sensor housing comprising the sensor and the circuit board, wherein at least one end portion of the tubular member is fixed to the sensor housing via a joint member. 7. The measuring apparatus according to claim 1 , wherein the sensor measures a flow velocity of a fluid flowing in the tubular member. 8. The measuring apparatus according to claim 1 , wherein the sensor measures a flow rate of a fluid flowing in the tubular member. 9. The measuring apparatus according to claim 1 , wherein the sensor comprises a temperature sensor that measures a temperature of a fluid flowing in the tubular member and a heater that supplies a calorific power to the fluid, wherein the heater supplies the calorific power corresponding to a difference between a temperature measured by the temperature sensor and a setting temperature. 10. The measuring apparatus according to claim 9 , wherein the circuit board is provided with a plurality of cut-aways, and the temperature sensor is positioned in one of the cut-aways and the heater is positioned in another one of the cut-aways. 11. A method of manufacturing a measuring apparatus, comprising: fixing a sensor to a first area on an outer peripheral surface of a tubular member; fixing a circuit board that relays a detection signal from the sensor to a second area on the outer peripheral surface that is different from the first area, the circuit board being separated from the sensor; and electrically connecting the sensor to the circuit board with one or more wires, wherein the sensor and the circuit board are separately supported by being fixed to the first and second areas on the outer peripheral surface, respectively, and are otherwise connected to one another solely by electrical connection via the one or more wires so as to reduce a mechanical coupling between the circuit board and the sensor. 12. The method of manufacturing a measuring apparatus according to claim 11 , wherein a bottom surface of the sensor is separated from the circuit board. 13. The method of manufacturing a measuring apparatus according to claim 11 , wherein the circuit board is provide with a cut-away, and the sensor is positioned in the cut-away. 14. The method of manufacturing a measuring apparatus according to claim 11 , wherein the sensor comprises a diaphragm. 15. The method of manufacturing a measuring apparatus according to claim 11 , wherein the tubular member is a glass capillary. 16. The method of manufacturing a measuring apparatus according to claim 11 , further comprising a step of fixing at least one end portion of the tubular member to a sensor housing comprising the sensor and the circuit board via a joint member. 17. The method of manufacturing a measuring apparatus according to claim 11 , wherein the sensor is a sensor that measures a flow velocity of a fluid flowing in the tubular member. 18. The method of manufacturing a measuring apparatus according to claim 11 , wherein the sensor is a sensor that measures a flow rate of a fluid flowing in the tubular member. 19. The method of manufacturing a measuring apparatus according to claim 11 , wherein the sensor comprises a temperature sensor that measures a temperature of a fluid flowing in the tubular member and a heater that supplies a calorific power to the fluid. 20. A method of manufacturing a measuring apparatus according to claim 19 , wherein the circuit board is provided with a plurality of cut-aways, and the temperature sensor is positioned in one of the cut-aways and the heater is positioned in another one of the cut-aways.
by using electric or magnetic effects (G01F1/66 takes precedence) · CPC title
of resistive type · CPC title
by control of a separate heating or cooling element · CPC title
where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct · CPC title
using resistive elements · CPC title
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