Window deposition apparatus
US-2024307909-A1 · Sep 19, 2024 · US
US10113227B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10113227-B2 |
| Application number | US-201414436925-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 28, 2014 |
| Priority date | Apr 30, 2014 |
| Publication date | Oct 30, 2018 |
| Grant date | Oct 30, 2018 |
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The present invention provides a crucible, and belongs to the field of evaporation technology, for solving such problems of an existing crucible that evaporation material loss occurs in evaporation process, the crucible is inconvenient to clean, and the evaporation material filled in the crucible is not uniform. The crucible of the present invention includes a main cavity and a plurality of sub-cavities which are used for containing evaporation material and are arranged in the main cavity, each sub-cavity being provided with an opening. The crucible of the present invention may be used in preparation of an OLED device.
Opening claim text (preview).
The invention claimed is: 1. A crucible, comprising a main cavity, wherein the crucible further comprises a plurality of sub-cavities which are arranged in the main cavity and are used for containing solid evaporation material, each of the sub-cavities being provided with an opening, wherein between any two adjacent sub-cavities, a conduit for mutual communication between said two adjacent sub-cavities is arranged and a through hole is formed on a side wall of each of the two adjacent sub-cavities at a position that connects the through hole with the conduit, wherein the through hole penetrates a side of each of the two adjacent sub-cavities at a position below the respective opening, wherein the conduit is detachably fixed to the side wall of each of the two adjacent sub-cavities by a connecting device, wherein the conduit is made of a same material as the main cavity and the sub-cavities, and wherein a switch shutter is provided on the side wall of each of the two adjacent sub-cavities and aligned with the through hole formed on each of the two adjacent sub-cavities. 2. The crucible according to claim 1 , wherein the sub-cavities are detachably fixed in the main cavity. 3. The crucible according to claim 2 , wherein the sub-cavities are detachably fixed to a bottom of the main cavity through first connecting devices. 4. The crucible according to claim 1 , wherein a distance between the position of the through hole and the opening of each adjacent sub-cavity is not greater than 2 cm. 5. The crucible according to claim 1 , wherein an inner diameter of the conduit is larger than a diameter of the through hole of each of the two adjacent sub-cavities. 6. The crucible according to claim 1 , wherein spaces between any two adjacent sub-cavities are equal. 7. The crucible according to claim 2 , wherein spaces between any two adjacent sub-cavities are equal. 8. The crucible according to claim 3 , wherein spaces between any two adjacent sub-cavities are equal. 9. The crucible according to claim 4 , wherein spaces between any two adjacent sub-cavities are equal. 10. The crucible according to claim 5 , wherein spaces between any two adjacent sub-cavities are equal. 11. The crucible according to claim 1 , wherein the crucible further comprises a cover plate for closing the main cavity, and the cover plate is provided with a gas outlet. 12. The crucible according to claim 11 , wherein a nozzle is arranged on the cover plate at a position corresponding to the gas outlet.
Replenishment of source material · CPC title
Organic material · CPC title
Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title
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