Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US10109427B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10109427-B2 |
| Application number | US-201113877000-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 30, 2011 |
| Priority date | Oct 1, 2010 |
| Publication date | Oct 23, 2018 |
| Grant date | Oct 23, 2018 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
The present invention relates to a process for the production of a layer composition ( 10 ) with an electrically conductive layer ( 11 ), comprising the process steps: a) provision of a substrate ( 12 ) with a substrate surface ( 13 ); b) formation of a polymer layer ( 14 ) comprising an electrically conductive polymer ( 15 ) on at least a part of the substrate surface ( 13 ); c) application of a liquid stabilizer phase, comprising a stabilizer and a liquid phase, to the polymer layer ( 14 ) from process step b), wherein the stabilizer phase comprises less than 0.2 wt. %, based on the stabilizer phase, of the electrically conductive polymer, wherein the stabilizer is an aromatic compound with at least two OH groups, and a layer composition ( 10 ) and uses thereof.
Opening claim text (preview).
The invention claimed is: 1. A process for the production of a layer composition with an electrically conductive layer, comprising the process steps: a) providing a substrate with a substrate surface; b) forming a polymer layer comprising an electrically conductive polymer on at least a part of the substrate surface, wherein the electrically conductive polymer comprises at least one polythiophene; c) applying a liquid stabilizer phase, comprising a stabilizer and a liquid phase, onto the polymer layer from process step b), wherein the liquid stabilizer phase comprises less than 0.2 wt. %, based on the stabilizer phase, of the electrically conductive polymer, wherein the stabilizer is tannin. 2. The process according to claim 1 , wherein after application of the liquid stabilizer phase in process step c) the liquid phase is at least partly removed in a further process step d). 3. The process according to claim 1 , wherein the substrate comprises an electrode body of an electrode material, and a dielectric that at least partly covers a surface of this electrode material. 4. The process according to claim 3 , wherein the electrode material is a valve metal or NbO. 5. The process according to claim 1 , wherein the liquid phase in process step c) comprises water or an alcohol or a mixture thereof. 6. The process according to claim 1 , wherein the liquid stabilizer phase in process step c) comprises the stabilizer in a concentration in a range of from 0.1 to 50 wt. %, based on the stabilizer phase. 7. The process according to claim 1 , wherein the electrically conductive polymer comprises at least one polythiophene with recurring units chosen from the group consisting of the general formula (I), the general formula (II) or the general formula (III) or a combination of at least two of these wherein A represents an optionally substituted C 1 -C 5 -alkylene radical, R represents a linear or branched, optionally substituted C 1 -C 18 -alkyl radical, an optionally substituted C 5 -C 12 -cycloalkyl radical, an optionally substituted C 6 -C 14 -aryl radical, an optionally substituted C 7 -C 18 -aralkyl radical, an optionally substituted C 1 -C 4 -hydroxyalkyl radical or a hydroxyl radical, x represents an integer from 0 to 8 and in the case where several radicals R are bonded to A, these can be identical or different. 8. The process according to claim 1 , wherein the electrically conductive polymer is poly(3,4-ethylenedioxythiophene). 9. The process according to claim 1 , wherein the electrically conductive polymer additionally comprises at least one polymeric anion. 10. The process according to claim 9 , wherein the polymeric anion is polystyrenesulphonic acid. 11. The process according to claim 1 , wherein the formation of the polymer layer in process step b) is carried out by application of a dispersion containing particles of an electrically conductive polymer and a dispersing agent and the at least partial removal of this dispersing agent. 12. The process according to claim 11 , wherein the particles of the dispersion in process step b) have a size (d50) of 70 nm and less. 13. The process according to claim 11 , wherein the dispersion containing particles of an electrically conductive polymer in process step b) comprises organic solvents, water or mixtures of an organic solvent and water as the dispersing agent.
Homopolymers or copolymers of aromatic monomers containing elements other than carbon and hydrogen · CPC title
Electrically-conducting paints {(conductive materials H01B1/00)} · CPC title
Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain (C09D107/00 - C09D157/00, C09D161/00 take precedence); Coating compositions based on derivatives of such polymers · CPC title
Compositions of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain (C08L7/00 - C08L57/00, C08L61/00 take precedence); Compositions of derivatives of such polymers · CPC title
Of polythioether · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.