Automated mask storage and retrieval system

Patent metadata

Field	Value
Publication number	US-10108095-B2
Application number	US-201615168424-A
Country	US
Kind code	B2
Filing date	May 31, 2016
Priority date	May 31, 2016
Publication date	Oct 23, 2018
Grant date	Oct 23, 2018

Abstract

An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

First claim

What is claimed is:

1. An automated photomask storage and retrieval system, comprising:
a plurality of mobile storage units aligned in a first direction, wherein each mobile storage unit is movable in the first direction and includes a plurality of storage cells;
a gantry disposed over the plurality of mobile storage units, wherein the gantry includes:
a supporting frame movable in the first direction, wherein the plurality of mobile storage units interpose a pair of supporting members of the supporting frame;
a beam connecting the pair of supporting members and movable along the pair of supporting members in a second direction perpendicular to the first direction, wherein the beam includes a plurality of buffer cells;
a robotic arm disposed adjacent to the plurality of buffer cells and movable along the beam, wherein the robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

2. The automated photomask storage and retrieval system of claim 1 , where each mobile storage unit is double-sided.

3. The automated photomask storage and retrieval system of claim 1 , wherein each storage cell has a barcode or radio-frequency identification (RFID) tag, and
wherein the robotic arm is configured to detect an identification of the storage cell by scanning the barcode or reading the RFID tag.

4. The automated photomask storage and retrieval system of claim 1 , wherein the robotic arm is configured to detect an identification of the photomask stored in the container by scanning a barcode or radio-frequency identification (RFID) tag of the container.

5. The automated photomask storage and retrieval system of claim 1 , wherein each storage cell includes a sloped bottom surface.

6. The automated photomask storage and retrieval system of claim 5 , wherein the robotic arm includes a tilt compensation component adjusted based on an angle of the sloped bottom surface for reaching the storage cell.

7. The automated photomask storage and retrieval system of claim 1 , wherein the plurality of mobile storage units include:
a first group of mobile storage units having initial locations disposed adjacent to each other; and
a second group of mobile storage units having initial locations disposed adjacent to each other;
wherein a space interposing a first end mobile storage unit of the first group of mobile storage units and a second end mobile storage unit of the second group of mobile storage units has a width greater than a width of the beam.

8. The automated photomask storage and retrieval system of claim 7 , further comprising:
a loading port adjacent to an end of the plurality of the mobile storage units.

9. The automated photomask storage and retrieval system of claim 8 , wherein a first distance between the first group of mobile storage units and the loading port is greater than a second distance between the second group of mobile storage units and the loading port,
wherein the first group of mobile storage units are configured to store containers containing masks with a first usage frequency, and
wherein the second group of mobile storage units are configured to store containers containing masks with a second usage frequency greater than the first usage frequency.

10. The automated photomask storage and retrieval system of claim 9 , wherein the first group of mobile storage units includes a first number of mobile storage units, and
wherein the second group of mobile storage units includes a second number of mobile storage units, wherein the second number is less than the first number.

11. The automated photomask storage and retrieval system of claim 1 , further comprising:
a loading port adjacent to an end of the plurality of the mobile storage units for transferring the container to a transportation system, wherein the transportation system is configured to transfer the container between the loading port and a tool for operating a mask.

12. The automated photomask storage and retrieval system of claim 11 , wherein the tool is one of a lithography tool and a mask repair tool.

13. The automated photomask storage and retrieval system of claim 11 , wherein the transportation system is an overhead hoist transportation system.

14. A method, comprising:
providing a mask storage system including a plurality of mobile storage units movable in a first direction, a gantry movable in a first direction, and a loading port;
receiving a plurality of mask transfer requests for storing a first plurality of masks in the mask storage system and retrieving a second plurality of masks from the mask storage system;
transferring the first plurality of masks from the loading port to a buffer area in the gantry;
accessing storage cells for the first plurality of masks and second plurality of masks, wherein accessing each storage cell includes:
providing an aisle for accessing a storage cell by moving the mobile storage units;
moving the gantry to access the storage cell; and
transferring a mask between the buffer area and the storage cell; and

transferring the retrieved second plurality of masks from the buffer area to the loading port.

15. The method of claim 14 , further comprising:
transferring the retrieved second plurality of masks between the loading port and a plurality of tools.

16. The method of claim 14 , wherein the moving the gantry to access the storage cell includes:
moving a pair of supporting members of the gantry in the first direction to the aisle;
moving a beam of the gantry along the pair of supporting members in a second direction perpendicular to the first direction to a height determined based on a height of the storage cell; and
moving a robotic arm along the beam so that the storage cell is reachable by the robotic arm.

17. The method of claim 16 , wherein the accessing storage cells includes:
accessing the storage cells according to a route determining based on a route distance, wherein the route distance includes one selected from a group consisting of a travel distance of the mobile storage units in the first direction, a travel distance of the pair of supporting members of the gantry in the first direction, a travel distance of the beam in the second direction, a travel distance of the robotic arm along the beam, and a combination thereof.

18. A method, comprising:
providing a mask storage system including a plurality of mobile storage units movable in a first direction, a gantry movable in a first direction, and a loading port;
receiving a plurality of mask transfer requests for storing a first plurality of masks in the mask storage system and retrieving a second plurality of masks from the mask storage system;
transferring the first plurality of masks from the loading port to a buffer area in the gantry;
accessing storage cells for the first plurality of masks and second plurality of masks, wherein accessing each storage cell includes:
providing an aisle for accessing a storage cell by moving the mobile storage units;
moving the gantry to access the storage cell; and
transferring, using a robotic arm, a mask between the buffer area and the storage cell; and

transferring the retrieved second plurality of masks from the buffer area to the loading port.

19. The method of claim 18 , further comprising:
determining an angle of a sloped bottom surface of the storage cell; and
adjusting a tilt compensation component of the robotic arm based on the angle of the sloped bottom surface for reaching the storage cell.

20. The

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Huang Chun-Jung
• Lee Chien-Fa
• LIN Yiang-Luen
• Chin Sam

Classifications

• G06K7/1413

  1D bar codes · CPC title

• G06K7/10366

  the interrogation device being adapted for miscellaneous applications · CPC title

• G03F7/70741 Primary

  Handling masks outside exposure position, e.g. reticle libraries · CPC title