Glass composite for use in extreme ultra violet lithography
US-2018105452-A1 · Apr 19, 2018 · US
US10106453B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10106453-B2 |
| Application number | US-201615358287-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 22, 2016 |
| Priority date | Nov 25, 2015 |
| Publication date | Oct 23, 2018 |
| Grant date | Oct 23, 2018 |
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A low cost method for producing a mechanically and thermally stable composite body containing a first layer of a material with a high silicic acid content and an additional component connected to a second layer of a material with a high silicic acid content and an additional component in a second concentration differing from the first concentration is provided. The method involves (a) preparing a first slurry layer having a free surface using a first shirt mass containing SiO2 particles and an additional component dispersed in a first dispersing agent, (b) providing a second slurry mass containing SiO2 particles and an additional component in a second concentration dispersed in a second dispersing agent, (c) forming a composite-body intermediate product by applying the second slurry mass to the free surface of the first slurry layer, and (d) heating the composite-body intermediate product while forming the composite body.
Opening claim text (preview).
We claim: 1. A method for producing a composite body comprising a first layer of a material having a high silicic acid content and a first additional component in a first concentration connected to a second layer of a material having a high silicic acid content and a second additional component in a second concentration that differs from the first concentration, wherein the first and the second concentrations are greater than or equal to zero, the method comprising the following steps: (a) preparing a first slurry layer having a free surface from a first slurry mass containing first SiO 2 particles and the first additional component in the first concentration dispersed in a first dispersing agent, (b) providing a second slurry mass containing second SiO 2 particles and the second additional component in a second concentration that differs from the first concentration dispersed in a second dispersing agent, (c) forming a composite-body intermediate product by applying the second slurry mass to the free surface of the first slurry layer, and (d) heating the composite-body intermediate product while forming the composite body. 2. The method according to claim 1 , wherein each of the first and the second SiO 2 -containing slurry masses has a solids content of at least 65% by wt. 3. The method according to claim 1 , wherein the solids contents of the first and the second SiO 2 -containing slurry masses differ by not more than 5% by wt. 4. The method according to claim 1 , wherein the preparation of the first slurry layer according to step (a) and the formation of the composite-body intermediate product according to step (c) are carried out by introducing the first and the second SiO 2 slurry masses into an absorbent mold one after the other. 5. The method according to claim 1 , wherein the preparation of the first slurry layer according to step (a) comprises a settling phase of at least 30 minutes, followed by removing a supernatant of the first slurry mass from the surface of the first slurry layer. 6. The method according to claim 1 , wherein the second SiO 2 -containing slurry mass is applied by a pouring stream guided at an angle in a range of 3° to 15° relative to the free surface of the first slurry layer. 7. The method according to claim 6 , wherein the pouring stream has an elongated shape in a horizontal cross-section. 8. The method according to claim 1 , wherein the first and the second SiO 2 -containing slurry masses contain amorphous SiO 2 particles in a splintery and/or spherical form with particle sizes in a range of 1 μm to 50 μm. 9. The method according to claim 1 , wherein at least one of the first and the second additional components contains silicon particles and/or carbon particles. 10. The method according to claim 9 , wherein the silicon particles are contained with a solids content in a range of 0.1% by wt. to 5% by wt. 11. The method according to claim 9 wherein the carbon particles are contained with a solids content in a range of 0.01 by wt. to 3% by wt. 12. The method according to claim 9 , wherein the heating in step (d) is carried out at a temperature of not more than 1400° C. while forming the composite body. 13. The method according to claim 9 , wherein at least one of the first and second SiO 2 -containing slurry masses forms a base body layer of the composite body.
After-treatment · CPC title
Methods of making the composites · CPC title
using colloidal silica sols · CPC title
Multilayers · CPC title
containing carbon · CPC title
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