Top notch slit profile for mems device
US-2024381034-A1 · Nov 14, 2024 · US
US10106397B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-10106397-B1 |
| Application number | US-201313868965-A |
| Country | US |
| Kind code | B1 |
| Filing date | Apr 23, 2013 |
| Priority date | Apr 23, 2012 |
| Publication date | Oct 23, 2018 |
| Grant date | Oct 23, 2018 |
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In some aspects of the disclosure, an apparatus includes an XYZ control stage and an acoustic transducer coupled with the XYZ control stage. The acoustic transducer includes a multi-foci Fresnel lens having multiple focal spots.
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What is claimed is: 1. An apparatus comprising: an XYZ control stage: and acoustic tweezers comprising a single acoustic transducer coupled with the XYZ control stage, the single acoustic transducer configured to generate, when actuated by a sinusoidal signal, an acoustic wave having a frequency of the sinusoidal signal and propagating along a center line, the single acoustic transducer comprising a multi-foci Fresnel lens, wherein the multi-foci Fresnel lens comprises annular rings centered on the center line, at least two annular rings having different focal lengths, the first of the at least two annular rings disposed closer to the center line than the second of the at least two annular rings, the first of the at least two annular rings being configured to focus a corresponding first portion of the acoustic wave to a first focal spot on the center line, and the second of the at least two annular rings disposed farther from the center line than the first of the at least two annular rings, the second of the at least two annular rings being configured to focus a corresponding second portion of the acoustic wave to a second focal spot on the center line, the first focal spot being positioned closer with respect to the multi-foci Fresnel lens than the second focal spot to form, along the center line and between the first and second focal spots, a negative pressure region capable of trapping one or more particles without the aid of other devices, including another acoustic tweezer or a MYLAR® sheet. 2. The apparatus of claim 1 , wherein the multi-foci Fresnel lens consists of seven annular rings, starting radially inward, the first two of the seven annular rings having a first focal length corresponding to the first focal spot, the next two of the seven annular rings being disposed farther from the center line than the first two of the seven annular rings and having a second focal length longer than the first focal length and corresponding to the second focal spot, and the remaining three of the seven annular rings being disposed farther from the center line than the next two if the seven annular rings and having a third focal length longer than the second focal length and corresponding to a third focal spot positioned farther with respect to the multi-foci Fresnel lens than the second focal spot. 3. The apparatus of claim 1 , wherein the annular rings consist of any number of annular rings between two and twelve, and the annular rings are grouped into any number of sets between two and twelve, wherein each set has a different focal length, with increasing focal length of each set corresponding to increasing annular ring radii of each set, wherein the first of the at least two annular rings is in one set with one focal length and the second of the at least two annular rings is in another set with another focal length that is greater than the one focal length. 4. The apparatus of claim 3 , wherein a radius r k , of an annular ring of order k of a j th set of annular rings of the multi-foci Fresnel lens is related to the focal length F j of the j th set and the wavelength λ of the acoustic wave generated by the single acoustic transducer as r k = 2 k λ ( F j + k λ 2 ) , where j=1, . . . , N with N≥2 is an index of focal points P 1 , . . . , P N of the multi-foci Fresnel lens to which the focal lengths F 1 , . . . F N correspond. 5. The apparatus of claim 1 , wherein the multi-foci Fresnel lens comprises one or more air-reflectors. 6. The apparatus of claim 1 , wherein the multi-foci Fresnel lens is formed on a PZT (lead zirconate titanate) ultrasonic transducer with top and bottom electrodes sandwiching the PZT. 7. The apparatus of claim 1 , wherein the multi-foci Fresnel lens comprises circular electrodes on top and bottom surfaces of a PZT. 8. The apparatus of claim 1 , wherein the multi-foci Fresnel lens comprises one or more pie-shaped electrodes on top and bottom surfaces of a PZT. 9. The apparatus of claim 1 , wherein the multi-foci Fresnel lens is formed on a silicon substrate with ZnO film, AlN film, or PZT film. 10. The apparatus of claim 1 , wherein the multi-foci Fresnel lens is integrated with microfluidic components built on a silicon, glass or plastic substrate. 11. The apparatus of claim 1 , wherein the sinusoidal signal to actuate the single acoustic transducer is a continuous sinusoidal signal. 12. The apparatus of claim 1 , wherein the sinusoidal signal to actuate the single acoustic transducer is a pulsed sinusoidal signal. 13. The apparatus of claim 12 , wherein the pulsed sinusoidal signal has the frequency in a range of 1-100 MHz with a pulse width in a range of 1-1 μs, and the pulse[d] sinusoidal signal is applied to the single acoustic transducer with a pulse repetition frequency in a range of 10-20 kHz. 14. The apparatus of claim 12 , wherein the pulsed sinusoidal signal has the frequency in a range of 100-900 MHz with a pulse width in a range of 0.1-1 μs, and the pulse[d] sinusoidal signal is applied to the single acoustic transducer with a pulse repetition frequency in a range of 10-20 kHz. 15. The apparatus of claim 12 , wherein the pulsed sinusoidal signal has the frequency in a range of 100-900 MHz with a pulse width in a range of 0.1-1 μs, and the pulse[d] sinusoidal signal is applied to the single acoustic transducer with a pulse repetition frequency in a range of 10-100 Hz. 16. A method of microparticle trapping in three dimensional space, the method comprising: providing the apparatus of claim 14 , using the single acoustic transducer to produce said negative pressure region, wherein said negative pressure region is on a micron scale range and trapping the one or more particles, wherein said particles are microparticles.
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