Testing of semiconductor chips with microbumps
US-2015362526-A1 · Dec 17, 2015 · US
US10106336B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10106336-B2 |
| Application number | US-201514748834-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 24, 2015 |
| Priority date | Dec 25, 2012 |
| Publication date | Oct 23, 2018 |
| Grant date | Oct 23, 2018 |
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The present invention provides a system that transports a tray in a horizontal attitude, the tray including a plurality of work placement portions arranged in a matrix. The system includes first and second transport units, a transfer device transferring the tray between the first transport unit and the second transport unit, a shooting unit including a line sensor shooting, between the first transport unit and the second transport unit, an image of the tray transferred by the transfer device and a moving device moving the transfer device and the shooting unit in a direction to traverse a plurality of transport lines of the first transport unit.
Opening claim text (preview).
What is claimed is: 1. A transport system that transports a tray in a horizontal attitude, the tray including a plurality of work placement portions arranged in a matrix on which works are placed, the system comprising: a plurality of first transport line mechanisms configured to convey the tray in a first direction and arranged parallel with each other in a second direction orthogonal to the first direction, each of the plurality of first transport line mechanisms extend in the first direction, having a first transport start end and a first transport terminal end and including a motor as a driving source, a guide member for guiding movement of the tray in the first direction and a base member supporting the motor and the guide member; at least one second transport line mechanism configured to convey the tray in the first direction, the at least one second transport line mechanism extends in the first direction, the at least one second transport line mechanism having a second transport start end and a second transport terminal end and including a motor as a driving source, a guide member for guiding movement of the tray in the first direction and a base member supporting the motor and the guide member of the second transport line mechanism; a moving element configured to move along a rail extending in the second direction in a space between the first transport terminal end and the second transport start end; a third transport line mechanism configured to be mounted on said moving element, the third transport line mechanism extending in the first direction and configured to transport the tray in the first direction from one of said plurality of first transport line mechanisms to said at least one second transport line mechanism, the third transport line mechanism including a motor as a driving source, a guide member for guiding movement of the tray in the first direction and a base member supporting the motor and the guide member of the third transport line mechanism; a line sensor configured to be mounted on said moving element and shoot a one-dimensional image, long in a direction perpendicular to a transferring direction, of the tray; and an image generator configured to generate an overall image of the tray based on a plurality of partial images shot by said line sensor concerning one tray, wherein the tray includes tray information capable of identifying each tray, the work includes work information capable of identifying each work and a work identifier configured to identify an attitude of each work, and the system comprises an information generator configured to generate information representing the tray, the work placed on the tray, and a position of the work based on the tray information, the work information and the attitude of work based on the work identifier obtained from the overall image of the tray generated by said image generator. 2. A transport system that transports a tray in a horizontal attitude, the tray including a plurality of work placement portions arranged in a matrix on which works are placed, the system comprising: a plurality of first transport line mechanisms configured to convey the tray in a first direction and arranged parallel with each other in a second direction orthogonal to the first direction, each of the plurality of first transport line mechanisms extend in the first direction, having a first transport start end and a first transport terminal end and including a motor as a driving source, a guide member for guiding movement of the tray in the first direction and a base member supporting the motor and the guide member; at least one second transport line mechanism configured to convey the tray in the first direction, the at least one second transport line mechanism extends in the first direction, the at least one second transport line mechanism having a second transport start end and a second transport terminal end and including a motor as a driving source, a guide member for guiding movement of the tray in the first direction and a base member supporting the motor and the guide member of the second transport line mechanism; a moving element configured to move along a rail extending in the second direction in a space between the first transport terminal end and the second transport start end; a third transport line mechanism configured to be mounted on said moving element, the third transport line mechanism extending in the first direction and configured to transport the tray in the first direction from one of said plurality of first transport line mechanisms to said at least one second transport line mechanism, the third transport line mechanism including a motor as a driving source, a guide member for guiding movement of the tray in the first direction and a base member supporting the motor and the guide member of the third transport line mechanism; a line sensor configured to be mounted on said moving element and shoot a one-dimensional image, long in a direction perpendicular to a transferring direction, of the tray; and an image generator configured to generate an overall image of the tray based on a plurality of partial images shot by said line sensor concerning one tray, wherein the work includes an identifier configured to identify each work and an attitude of each work, the tray includes tray information capable of identifying each tray, and the system comprises an information generator configured to generate information representing the tray, the work placed on the tray, and a position of the work based on the tray information, the work and the attitude of work based on the identifier obtained from the overall image of the tray generated by said image generator. 3. The transport system according to claim 2 , comprising: a work detection sensor configured to detect a placement manner of the work on the tray transferred by said third transport line mechanism, wherein said work detection sensor is moved by said moving element together with said third transport line mechanism and said line sensor. 4. The transport system according to claim 3 , wherein said work detection sensor is arranged to detect the placement manner of the work from a side of the tray, and the system comprising: an elevator configured to move said work detection sensor up and down; and a drive controller configured to control said elevator so as to locate said work detection sensor at a predetermined height. 5. The transport system according to claim 2 , comprising: a sensor configured to detect a transferring speed of the tray transferred by said third transport line mechanism; and a shooting controller configured to control a shooting interval of said line sensor in accordance with the transferring speed of the tray detected by said sensor. 6. The transport system according to claim 2 , wherein said moving element includes: a first fixing portion to which said third transport line mechanism is fixed; and a second fixing portion to which said line sensor is fixed. 7. The transport system according to claim 6 , comprising: an illuminator configured to illuminate the tray to be shot; and a support configured to support said line sensor and said illuminator, said support being fixed to said moving element, and wherein said illuminator is pivotably supported by said support. 8. The transport system according to claim 2 , wherein said line sensor shoots the image of the tray during a process of transporting the tray from one of said plurality of first transport line mechanisms to the transport line to said third transport line mechanism. 9. The transport system according to claim 2 , wherein said moving element moves said third transport line mechanism to a first location where said t
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