Ultrathin perpendicular pinned layer structure for magnetic tunneling junction devices

Patent metadata

Field	Value
Publication number	US-10103319-B2
Application number	US-201715458641-A
Country	US
Kind code	B2
Filing date	Mar 14, 2017
Priority date	Dec 23, 2014
Publication date	Oct 16, 2018
Grant date	Oct 16, 2018

Abstract

A material stack of a synthetic anti-ferromagnetic (SAF) reference layer of a perpendicular magnetic tunnel junction (MTJ) may include an SAF coupling layer. The material stack may also include and an amorphous spacer layer on the SAF coupling layer. The amorphous spacer layer may include an alloy or multilayer of tantalum and cobalt or tantalum and iron or cobalt and iron and tantalum. The amorphous spacer layer may also include a treated surface of the SAF coupling layer.

First claim

What is claimed is:

1. A material stack of a synthetic anti-ferromagnetic (SAF) reference layer of a perpendicular magnetic tunnel junction (MTJ), the material stack comprising:
an SAF coupling layer;
an amorphous spacer layer on the SAF coupling layer, in which the amorphous spacer layer comprises a treated surface of the SAF coupling layer;
a plurality of repetitions of perpendicular magnetic anisotropy (PMA) multilayers within a first anti-parallel pinned layer (AP 1 ) directly coupled to the SAF coupling layer; and
no repetitions of the PMA multilayers within a second anti-parallel pinned layer (AP 2 ) on the SAF coupling layer.

2. The material stack of claim 1 , in which the amorphous spacer layer is configured to maintain or increase tunneling magneto resistance (TMR) provided by the material stack.

3. The material stack of claim 1 , further comprising a single perpendicular magnetic anisotropy (PMA) layer between the SAF coupling layer and the amorphous spacer layer.

4. The material stack of claim 1 , integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.

5. A perpendicular magnetic tunnel junction, comprising:
a perpendicular free layer;
a perpendicular synthetic anti-ferromagnetic (SAF) reference layer; and
a tunnel barrier layer between the SAF reference layer and the perpendicular free layer, in which the SAF reference layer comprises:
a first anti-parallel material stack,
a second anti-parallel material stack between the first anti-parallel material stack and the tunnel barrier layer, and
an SAF coupling layer between the first anti-parallel material stack and the second anti-parallel material stack, the second anti-parallel material stack comprising:
means for blocking diffusion of boron from the second material stack to the first material stack to improve thermal stability of the SAF reference layer during an annealing process.

6. The perpendicular magnetic tunnel junction of claim 5 , in which the means for blocking diffusion of boron comprises an amorphous spacer layer on the SAF coupling layer.

7. The perpendicular magnetic tunnel junction of claim 6 in which the amorphous spacer layer comprises an alloy or multilayer comprising tantalum and cobalt or tantalum and iron or cobalt and iron and tantalum.

8. The perpendicular magnetic tunnel junction of claim 6 in which the amorphous spacer layer comprises a treated surface of the SAF coupling layer.

9. The perpendicular magnetic tunnel junction of claim 5 , in which the second material stack comprises a tunneling magnetic resistance (TMR) enhancement layer and the means for blocking diffusion of boron comprises an amorphous spacer layer between the TMR enhancement layer and the SAF coupling layer.

10. The perpendicular magnetic tunnel junction of claim 9 in which the amorphous spacer layer is configured to provide a thin buffer layer to allow stronger body-centered cubic crystal structure formation with a miller index of <001> in the TMR enhancement layer.

11. The perpendicular magnetic tunnel junction of claim 9 in which the amorphous spacer layer is configured to provide a structural buffer, a diffusion barrier, a magnetic coupling layer and to enhance or maintain TMR during high temperature annealing.

12. The perpendicular magnetic tunnel junction of claim 5 in which a thickness of the SAF reference layer is between about 5 nanometers and 6 nanometers.

13. The perpendicular magnetic tunnel junction of claim 5 integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.

14. A method of reducing synthetic anti-ferromagnetic (SAF) reference layer thickness in a perpendicular magnetic tunnel junction (MTJ), the method comprising:
forming a first anti-parallel perpendicular magnetic anisotropy (PMA) material stack comprising a plurality of repetitions of PMA multilayers, the PMA multilayers comprising cobalt and platinum, cobalt and palladium or cobalt and nickel;
depositing an SAF coupling layer on the first anti-parallel material stack;
forming a second anti-parallel PMA material stack on the SAF coupling layer the second anti-parallel PMA material stack having no repetitions of PMA multilayers; and
forming an amorphous spacer layer on the SAF coupling layer to maintain or increase TMR provided by the SAF reference layer during high temperature annealing.

15. The method of claim 14 , further comprising:
treating a surface of the SAF coupling layer to form the amorphous spacer layer using light oxidation, plasma treatment or ion irradiation.

16. The method of claim 14 , further comprising integrating the perpendicular MTJ into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.

Assignees

• Qualcomm Inc

Inventors

• Lee Kangho
• Kan Jimmy
• Zhu Xiaochun
• Gottwald Matthias Georg
• Park Chando
• Kang Seung Hyuk

Classifications

• H01F10/3286

  Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy · CPC title

• H01F10/3272 Primary

  by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets · CPC title

• H01F41/305

  applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling · CPC title

• G11C11/161

  details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell · CPC title

• H01L43/10

  Electricity · mapped topic