Piezoelectric film, piezoelectric element including the same, and liquid discharge apparatus

Patent metadata

Field	Value
Publication number	US-10103316-B2
Application number	US-201715600395-A
Country	US
Kind code	B2
Filing date	May 19, 2017
Priority date	Nov 28, 2014
Publication date	Oct 16, 2018
Grant date	Oct 16, 2018

Abstract

Provided is a piezoelectric film formed by a vapor phase growth method, the piezoelectric film containing:
a perovskite oxide in which a perovskite oxide represented by the following formula P is doped with Si in an amount of from 0.2 mol % to less than 0.5 mol %, wherein a ratio of a peak intensity of a pyrochlore phase to a sum of peak intensities in respective plane orientations of (100), (001), (110), (101) and (111) of a perovskite phase measured by an X-ray diffraction method is 0.25 or less:

A 1+δ [(Zr x Ti 1−x ) 1−a Nb a ]O y   Formula P
wherein, in formula P, A is an A-site element primarily containing Pb; Zr, Ti, and Nb are B-site elements; x is more than 0 but less than 1; a is 0.1 or more but less than 0.3.

First claim

What is claimed is:

1. A piezoelectric film formed by a vapor phase growth method, the piezoelectric film comprising:
a perovskite oxide in which a perovskite oxide represented by the following formula P is doped with Si in an amount of from 0.2 mol % to less than 0.5 mol %, wherein a ratio of a peak intensity of a pyrochlore phase to a sum of peak intensities in respective plane orientations of (100), (001), (110), (101) and (111) of a perovskite phase measured by an X-ray diffraction method is 0.25 or less:
A 1+δ [(Zr x Ti 1−x ) 1−a Nb a ]O y   Formula P

wherein, in formula P, A is an A-site element primarily containing Pb; Zr, Ti, and Nb are B-site elements; x is more than 0 but less than 1; a is 0.1 or more but less than 0.3; and δ=0 and y=3 are standard, provided that these values may deviate from standard values in a range in which a perovskite structure is obtained.

2. The piezoelectric film according to claim 1 , wherein a peak position of perovskite (200) measured by a 2θ/θ measurement of an X-ray diffraction method is shifted to a higher angle side compared to a corresponding peak position of a piezoelectric film including a perovskite oxide which is not doped with Si and is represented by formula P.

3. The piezoelectric film according to claim 2 , wherein a shift amount of the peak position to the higher angle side is more than 0° but 0.5° or less.

4. The piezoelectric film according to claim 1 , wherein the piezoelectric film is a columnar crystal film consisting of a number of columnar crystals.

5. The piezoelectric film according to claim 1 , wherein the piezoelectric film has a film thickness of 1 μm or greater.

6. A piezoelectric element, comprising:
the piezoelectric film according to claim 1 ; and
an electrode which applies an electric field to the piezoelectric film.

7. A liquid discharge apparatus, comprising:
the piezoelectric element according to claim 6 ; and
a liquid discharge member which is provided integrally with, or separately from, the piezoelectric element,
wherein the liquid discharge member has a liquid storage chamber which stores a liquid, and a liquid discharge port through which the liquid is discharged from the liquid storage chamber to an exterior.

Assignees

• Fujifilm Corp

Inventors

• Murakami Naoki

Classifications

• H01L41/0805

  Electricity · mapped topic

• H01L41/187

  Electricity · mapped topic

• H01L41/09

  Electricity · mapped topic

• B41J2/045

  by pressure, e.g. electromechanical transducers · CPC title

• H01L41/316 Primary

  Electricity · mapped topic